JPH0215417A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH0215417A JPH0215417A JP16614488A JP16614488A JPH0215417A JP H0215417 A JPH0215417 A JP H0215417A JP 16614488 A JP16614488 A JP 16614488A JP 16614488 A JP16614488 A JP 16614488A JP H0215417 A JPH0215417 A JP H0215417A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- magnetic
- magnetic recording
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 26
- 229920000620 organic polymer Polymers 0.000 claims abstract description 8
- 238000004544 sputter deposition Methods 0.000 claims abstract description 6
- 239000000696 magnetic material Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 abstract description 37
- 239000010410 layer Substances 0.000 abstract description 27
- 239000011241 protective layer Substances 0.000 abstract description 16
- 239000010409 thin film Substances 0.000 abstract description 12
- -1 polytetrafluoroethylene Polymers 0.000 abstract description 8
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract description 8
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract description 8
- 230000001681 protective effect Effects 0.000 abstract description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 229910052731 fluorine Inorganic materials 0.000 abstract description 3
- 239000011737 fluorine Substances 0.000 abstract description 3
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 2
- 229910052786 argon Inorganic materials 0.000 abstract description 2
- 239000012298 atmosphere Substances 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 abstract description 2
- 230000002195 synergetic effect Effects 0.000 abstract description 2
- 229910020630 Co Ni Inorganic materials 0.000 abstract 1
- 229910002440 Co–Ni Inorganic materials 0.000 abstract 1
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 description 10
- 238000005260 corrosion Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910001096 P alloy Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は磁気記憶装置（磁気ディスク装置または磁気テ
ープ装置など）に用いられる磁気記録媒体及びその製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium used in a magnetic storage device (such as a magnetic disk device or a magnetic tape device) and a method for manufacturing the same.
従来の技術
近年、コンピューターのファイルメモリーとして磁気記
憶装置は高密度化・大容量化されており、磁気記憶装置
に用いられる磁気記録媒体はこれに適応し得る金属薄膜
磁性体を用いるなど新しい構成の開発がめざましい。そ
の中でら、記録媒体としての信頼性を維持する必要性か
ら、記録担体である磁性体が損傷することを防ぐため、
優れた保護層の開発が望まれている。Background of the Invention In recent years, magnetic storage devices used as computer file memories have become denser and larger in capacity, and the magnetic recording media used in magnetic storage devices have developed new configurations such as the use of metal thin film magnetic materials that can accommodate this. The development is remarkable. Among these, due to the need to maintain reliability as a recording medium, in order to prevent damage to the magnetic material that is the recording carrier,
The development of an excellent protective layer is desired.
しかしながら磁気記録の特徴として、高記録密度を実現
するためには記録再生に用いる磁気ヘッドと磁性体の間
隙を極めて小さ（する必要があり、このため保護層は可
能な限り薄いく厚さ数〜数十ｎ ｍ ）形状で、磁気ヘ
ッドの高速摺動による摩耗や、水分や、無機塩類の影響
による腐食などから磁性体を保護する必要があり、適用
できる材料は限られる。However, one of the characteristics of magnetic recording is that in order to achieve high recording density, the gap between the magnetic head and the magnetic material used for recording and reproduction must be extremely small. With a shape of several tens of nanometers), it is necessary to protect the magnetic material from wear caused by high-speed sliding of the magnetic head and corrosion caused by moisture and inorganic salts, and the materials that can be used are limited.
従来、磁気記録媒体の保護層として、カーボン膜、金属
膜（Ｃｒ等）、金属酸化物膜（Ｃｏ。Conventionally, carbon films, metal films (such as Cr), and metal oxide films (Co) have been used as protective layers for magnetic recording media.
等）が提案されている。また、フッ素含有有機ポリマー
粉末を溶媒乾燥法を用いて被覆しようとした例（例えば
特開昭６２−５７１２３）がある。etc.) have been proposed. There are also examples of attempts to coat fluorine-containing organic polymer powders using a solvent drying method (for example, JP-A-62-57123).
発明が解決しようとする課題
しかしながら従来の構成では、化学的に安定でしかも均
一性良く磁性体を被覆しうる保護層が形成できない。例
えば金属膜は薄膜形状では有効な保護皮膜となり得ない
し、またカーボン膜を除いては摩擦摩耗に弱いため、実
用上要求される保護性能をもった磁気記録媒体が得られ
なかった。Problems to be Solved by the Invention However, with the conventional structure, it is not possible to form a protective layer that is chemically stable and can cover the magnetic material with good uniformity. For example, a metal film cannot serve as an effective protective film in the form of a thin film, and other than carbon films are susceptible to frictional wear, making it impossible to obtain a magnetic recording medium with the protection performance required for practical use.
課題を解決するための手段
この課題を解決するために本発明は、磁性体上に保護層
として、下層がカーボン膜中間層が有機ポリマー膜、上
層がカーボン膜からなる多層薄膜を備え、本発明の磁気
記録媒体の製造方法は磁性体上にカーボン膜を被覆した
後有機ポリマー膜をスパッタリング法で形成する工程か
らなるものである。Means for Solving the Problem In order to solve this problem, the present invention provides a multilayer thin film as a protective layer on a magnetic material, the lower layer is a carbon film, the intermediate layer is an organic polymer film, and the upper layer is a carbon film. The method for manufacturing a magnetic recording medium comprises the steps of coating a magnetic material with a carbon film and then forming an organic polymer film by sputtering.
作用
本発明はこの構成により、化学的に極めて安定な分子構
造からなり、水分や無機塩類を効果的に遮蔽し磁性体の
腐食を防ぐが機械強度が脆弱で摩耗しやすい有機ポリマ
ーに上層カーボン膜を被覆した構造にすることで、磁気
ヘッドの接触摺動による保護層と磁性体の損傷を防ぎ、
また下層カーボン膜を被覆した効果によりスパッタリン
グ法を用いて極めて均一性が良く化学的に安定な有機ポ
リマー膜を形成することができ、耐摩擦摩耗性、耐食性
の優れた、信頼性の高い磁気記録媒体が得られる。Effect This invention has a chemically extremely stable molecular structure, effectively shields moisture and inorganic salts, and prevents corrosion of magnetic materials, but has weak mechanical strength and is easily abraded. This structure prevents damage to the protective layer and magnetic material due to contact sliding of the magnetic head.
Furthermore, due to the effect of coating the lower layer carbon film, it is possible to form an extremely uniform and chemically stable organic polymer film using the sputtering method, which enables highly reliable magnetic recording with excellent friction and wear resistance and corrosion resistance. A medium is obtained.
実施例
第１図は本発明の一実施例における磁気記録媒体を示す
部分断面図である。第１図において、１はアルミニウノ
２、合金からなる基板、２は基板１上に形成された膜厚
２０１．ｔｍのＮ１−Ｐ合金層、３は２の合金層上に形
成されたＣｒ下地層をもつｃｏ−Ｎｉ磁性層、４は保護
層を構成する膜５１０ｎｍの下層カーボン膜、５は保護
層を構成する膜厚２ｎｍのポリテトラフルオロエチレン
中間膜、６は保護層を構成する膜厚２０ｎｍの上層カー
ボン膜である。ポリテトラフルオロエチレン中間膜は、
−（ＣＦ、ＣＦよ）−構造を持ち下層カーボン膜形成に
続いて、アルゴン圧１０ｍＴｏｒｒの雰囲気中で高周波
スパッタリング法により形成した。Embodiment FIG. 1 is a partial sectional view showing a magnetic recording medium in an embodiment of the present invention. In FIG. 1, 1 is an aluminum UNO 2, a substrate made of an alloy, and 2 is a film thickness 201 formed on the substrate 1. tm N1-P alloy layer, 3 is a co-Ni magnetic layer with a Cr underlayer formed on the alloy layer 2, 4 is a 510 nm lower carbon film forming a protective layer, 5 is a protective layer 6 is a polytetrafluoroethylene intermediate film with a thickness of 2 nm, and 6 is an upper carbon film with a thickness of 20 nm constituting a protective layer. Polytetrafluoroethylene interlayer film is
-(CF, CF)- structure was formed by high frequency sputtering in an atmosphere of argon pressure of 10 mTorr following formation of the lower carbon film.
比較例１
実施例と同様にして、但し保Ｎ層を膜厚５０ｎｍのポリ
テトラフルオロエチレン膜だけとした磁気記録媒体を作
成した。Comparative Example 1 A magnetic recording medium was produced in the same manner as in the example except that the N layer was made of only a polytetrafluoroethylene film with a thickness of 50 nm.
比較例２
実施例と同様にして、但し保護層を膜厚１０ｎｍの下層
カーボン膜と膜厚２ｎｍの上層ポリテトラフルオロエチ
レン膜だけの２層膜とした磁気記録媒体を作成した。Comparative Example 2 A magnetic recording medium was produced in the same manner as in Example, except that the protective layer was a two-layer film consisting of a lower carbon film with a thickness of 10 nm and an upper polytetrafluoroethylene film with a thickness of 2 nm.
比較例３
実施例と同様にして、但し保護層を膜厚２０ｎｍの下層
Ｃｒ膜と膜厚２０ｎｍの上層カーボン膜とした磁気記録
媒体を作成した。Comparative Example 3 A magnetic recording medium was produced in the same manner as in Example except that the protective layers were a 20 nm thick lower Cr film and a 20 nm thick upper carbon film.
上記のように作成した磁気記録媒体について、それぞれ
のｆｌｉｔ摩擦摩耗性・耐食性を調べた。The magnetic recording media produced as described above were examined for their flit friction and wear resistance and corrosion resistance.
第２図は磁気記録媒体の耐摩耗性を示す特性図である。FIG. 2 is a characteristic diagram showing the wear resistance of a magnetic recording medium.
第２図において横軸は磁気ヘッドの摺動回数、縦軸は摩
耗量である。In FIG. 2, the horizontal axis represents the number of times the magnetic head slides, and the vertical axis represents the amount of wear.
第３図は磁気記録媒体の摩擦係数変化を示す特性図であ
る。第３図において横軸は磁気ヘッドの摺動回数、縦軸
は摩擦係数である。FIG. 3 is a characteristic diagram showing changes in the coefficient of friction of a magnetic recording medium. In FIG. 3, the horizontal axis represents the number of times the magnetic head slides, and the vertical axis represents the coefficient of friction.
第４図は磁気記録媒体の耐食性を示す特性図であり第４
図において縦軸はＣｏ−Ｎｉ磁性層の腐食損失量である
。ここで磁気記録媒体は腐食促進環境として濃度１ ｍ
ｏ ｌ ／ Ｌの塩水に１５時間侵潰した。Figure 4 is a characteristic diagram showing the corrosion resistance of magnetic recording media.
In the figure, the vertical axis represents the amount of corrosion loss of the Co--Ni magnetic layer. Here, the magnetic recording medium has a concentration of 1 m as a corrosion promoting environment.
Soaked in ol/L saline for 15 hours.
実施例の磁気記録媒体は、優れた耐摩耗性・低摩擦性並
びに耐食性を示した。一方、比較例ではこれらの特性を
すべて満足するものは得られなかった。The magnetic recording media of Examples exhibited excellent wear resistance, low friction properties, and corrosion resistance. On the other hand, in the comparative example, no material satisfying all of these characteristics was obtained.
以上のように本実施例によれば、膜厚がそれぞれ下層カ
ーボンＩＩ１１０ｎｍ、中間層ポリテトラフルオロエチ
レン膜２ ｎ ｍ ％上層カーボン膜２０ｎｍ１合計３
２ｎｍの薄膜形態でありながら、従来に無い優だ保護性
能を持ち、これにより磁気記録媒体の信頼性を飛躍的に
向上することができた。As described above, according to this example, the film thicknesses are lower layer carbon II 110 nm, middle layer polytetrafluoroethylene film 2 nm%, upper layer carbon film 20 nm1 total 3
Although it is in the form of a 2 nm thin film, it has unprecedented protection performance, and as a result, the reliability of magnetic recording media has been dramatically improved.
発明の効果
本発明は、分子構造として化学的に極めて安定な−（Ｃ
ＦユＣＦｚ）ｎ−からなり、水分や無機塩類を効果的に
遮蔽し磁性体の腐食を防ぐが機械強度が脆弱なフッ素系
重合体ポリテトラエチレン薄膜と、磁気ヘッドの接触・
摺動からこのポリテトラエチレン薄膜と磁性層の摩擦摩
耗を低減する上層カーボン膜の相乗効果により、磁性層
に対し優れた保護効果を持つ保護膜が得られる。また、
防食性を高めるのに必要な均一な薄膜の形成が困難であ
ったポリテトラフルオロエチレンを、磁性体表面をカー
ボンｎλで被覆した後スパッタリング法で形成する工程
としたことで、ポリテトラフルオロエチレン膜厚が数ｎ
ｍの超薄膜でも均一性のよい薄膜が得られ、これらの効
果により極めて信頼性の高い磁気記録媒体を実現できる
ものである。Effects of the Invention The present invention provides -(C
The contact between the magnetic head and the fluorine-based polymer polytetraethylene thin film, which effectively shields moisture and inorganic salts and prevents corrosion of magnetic materials, but has weak mechanical strength, is made of
Due to the synergistic effect of this polytetraethylene thin film and the upper layer carbon film that reduces frictional wear of the magnetic layer due to sliding, a protective film having an excellent protective effect on the magnetic layer can be obtained. Also,
It was difficult to form a uniform thin film of polytetrafluoroethylene, which is necessary to improve corrosion resistance, but by coating the surface of the magnetic material with carbon nλ and then forming it using a sputtering method, polytetrafluoroethylene film can be made. Thickness is several n
A thin film with good uniformity can be obtained even with an ultra-thin film of m, and these effects make it possible to realize an extremely reliable magnetic recording medium.
第１図は本発明の一実施例における磁気記録媒体の部分
断面図、第２図は実施例と比較例１、比較例２、比較例
３の磁気記録媒体について、磁気ヘッドの摺動回数と摩
耗量の関係を表す特性図、第３図は実施例と比較例１、
比較例２、比較例３の磁気記録媒体について、磁気ヘッ
ドの摺動回数き摩擦係数の関係を表す特性図、第４図は
同様の磁気記録媒体について、腐食促進環境における磁
性体の損失量を表す特性図である。
１・・・アルミニウム合金からなる基板２・・・Ｎ１−
Ｐ合金層
３・・・Ｃｒ下地をもつＣ０−Ｎｉ磁性体４・・・保護
層を構成する下層カーボン１ｊ々５・・・保護層を構成
するポリテトラエチレン膜６・・・保護層を構成する上
層カーボン膜栗野重孝
代理人の氏名 弁理士 ≠ｍ ほか１名第
図
第
図
謂勤回衣
第
図
摺動目枚
第
図FIG. 1 is a partial cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 shows the number of times the magnetic head slides and the magnetic recording media of the embodiment, comparative example 1, comparative example 2, and comparative example 3. A characteristic diagram showing the relationship between wear amount, Figure 3 shows the example and comparative example 1,
For the magnetic recording media of Comparative Examples 2 and 3, a characteristic diagram showing the relationship between the number of sliding movements of the magnetic head and the coefficient of friction. Figure 4 shows the amount of loss of magnetic material in a corrosion-promoting environment for similar magnetic recording media. FIG. 1... Substrate made of aluminum alloy 2... N1-
P alloy layer 3...C0-Ni magnetic material with Cr base 4...Lower carbon layer 1j forming a protective layer 5...Polytetraethylene film 6 forming a protective layer...Constituting a protective layer Upper layer carbon membrane Shigetaka Kurino Name of agent Patent attorney ≠m and 1 other person
Claims (2)
ボン膜の上に設けられる有機ポリマー膜と、前記有機ポ
リマー膜の上に設けられるカーボン膜とを有することを
特徴とする磁気記録媒体。(1) A magnetic recording medium comprising a carbon film provided on a magnetic material, an organic polymer film provided on the carbon film, and a carbon film provided on the organic polymer film.
ー膜をスパッタリング法で形成し、その上にカーボン被
膜を被覆することを特徴とする磁気記録媒体の製造方法
。(2) A method for producing a magnetic recording medium, which comprises coating a magnetic material with a carbon film, then forming an organic polymer film by sputtering, and then coating the carbon film thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16614488A JPH0215417A (en) | 1988-07-04 | 1988-07-04 | Magnetic recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16614488A JPH0215417A (en) | 1988-07-04 | 1988-07-04 | Magnetic recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215417A true JPH0215417A (en) | 1990-01-19 |
Family
ID=15825864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16614488A Pending JPH0215417A (en) | 1988-07-04 | 1988-07-04 | Magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215417A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11737632B2 (en) | 2005-12-02 | 2023-08-29 | Irobot Corporation | Modular robot |
-
1988
- 1988-07-04 JP JP16614488A patent/JPH0215417A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11737632B2 (en) | 2005-12-02 | 2023-08-29 | Irobot Corporation | Modular robot |
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