JPH02148548A - 電磁型対物レンズ及び漏洩磁束消滅方法 - Google Patents

電磁型対物レンズ及び漏洩磁束消滅方法

Info

Publication number
JPH02148548A
JPH02148548A JP63256647A JP25664788A JPH02148548A JP H02148548 A JPH02148548 A JP H02148548A JP 63256647 A JP63256647 A JP 63256647A JP 25664788 A JP25664788 A JP 25664788A JP H02148548 A JPH02148548 A JP H02148548A
Authority
JP
Japan
Prior art keywords
magnetic flux
coil current
leakage magnetic
coil
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63256647A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587934B2 (enrdf_load_stackoverflow
Inventor
Yoshiro Shiokawa
善郎 塩川
Yoichi Ino
伊野　洋一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP63256647A priority Critical patent/JPH02148548A/ja
Publication of JPH02148548A publication Critical patent/JPH02148548A/ja
Publication of JPH0587934B2 publication Critical patent/JPH0587934B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP63256647A 1988-10-12 1988-10-12 電磁型対物レンズ及び漏洩磁束消滅方法 Granted JPH02148548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63256647A JPH02148548A (ja) 1988-10-12 1988-10-12 電磁型対物レンズ及び漏洩磁束消滅方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63256647A JPH02148548A (ja) 1988-10-12 1988-10-12 電磁型対物レンズ及び漏洩磁束消滅方法

Publications (2)

Publication Number Publication Date
JPH02148548A true JPH02148548A (ja) 1990-06-07
JPH0587934B2 JPH0587934B2 (enrdf_load_stackoverflow) 1993-12-20

Family

ID=17295515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63256647A Granted JPH02148548A (ja) 1988-10-12 1988-10-12 電磁型対物レンズ及び漏洩磁束消滅方法

Country Status (1)

Country Link
JP (1) JPH02148548A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613009A (ja) * 1993-04-26 1994-01-21 Hitachi Ltd 走査形電子顕微鏡
JP2015149203A (ja) * 2014-02-07 2015-08-20 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613009A (ja) * 1993-04-26 1994-01-21 Hitachi Ltd 走査形電子顕微鏡
JP2015149203A (ja) * 2014-02-07 2015-08-20 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH0587934B2 (enrdf_load_stackoverflow) 1993-12-20

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