JPH02147966A - Vacuum-suction type rotary index structure of apparatus for measuring chip part characteristics - Google Patents

Vacuum-suction type rotary index structure of apparatus for measuring chip part characteristics

Info

Publication number
JPH02147966A
JPH02147966A JP63302568A JP30256888A JPH02147966A JP H02147966 A JPH02147966 A JP H02147966A JP 63302568 A JP63302568 A JP 63302568A JP 30256888 A JP30256888 A JP 30256888A JP H02147966 A JPH02147966 A JP H02147966A
Authority
JP
Japan
Prior art keywords
vacuum
index table
rotary index
transmission
index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63302568A
Other languages
Japanese (ja)
Other versions
JPH0687072B2 (en
Inventor
Toru Mizuno
亨 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP63302568A priority Critical patent/JPH0687072B2/en
Publication of JPH02147966A publication Critical patent/JPH02147966A/en
Publication of JPH0687072B2 publication Critical patent/JPH0687072B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Relating To Insulation (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

PURPOSE:To realize secure vacuum transmission without vacuum leakage by a method wherein an index table and a vacuum transmission part on a fixed side are constituted in pressed facial contact and a labyrinth seal groove is formed on this contact face. CONSTITUTION:Even if an index table 10 performs index operation, a vacuum path 38 of the table 10 moves along a circular or arc vacuum transmission groove 36 of a vacuum transmission circular member 33. Therefore, the vacuum path 38 of the index table 10 is always applied with negative pressure via the circular member 33 and a vacuum suction hose 50 thereby vacuum-sucking a chip capacitor at the upper end of a carrier 40. The index table 10 and the circular member 33 are press-contacted with facial contact, and in addition since a labyrinth seal groove is formed on this contact face, vacuum leakage can be prevented to have chip parts securely vacuum-sucked.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、積層セラミックチップコンデンザ等のチップ
状電子部品の電気容量等の特性測定に用いられるチップ
部品特性測定装置に関し、特にチップ状電子部品をロー
タリーインデックステーブル上に真空吸引で保持し、そ
の間欠回転動作で複数のステーションへ送って各種特性
の自動測定を行うのに適用される真空吸引形ロータリー
インデックス構造に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a chip component characteristic measuring device used for measuring characteristics such as capacitance of chip-shaped electronic components such as multilayer ceramic chip capacitors, and more particularly, This invention relates to a vacuum suction type rotary index structure that is applied to automatically measure various characteristics by holding parts on a rotary index table by vacuum suction and sending them to multiple stations through intermittent rotational operations.

(従来技術) この種のCチップやLチップ等の電子部品の自動特性測
定・選別装置として、従来から間欠回転動作するロータ
リーインデックステーブルの外周部に複数個の真空吸着
ヘッドを設け、この吸着ヘッドにチップ部品を吸着保持
し、テーブルの間欠回転の途中でチップ部品を一対の測
定端子で挟圧して特性測定を行う構造のものが知られて
いる。
(Prior art) As an automatic characteristic measurement and sorting device for electronic components such as C chips and L chips, a plurality of vacuum suction heads are conventionally installed on the outer periphery of a rotary index table that rotates intermittently. A structure is known in which a chip component is held by suction at the table, and characteristics are measured by pinching the chip component between a pair of measurement terminals during intermittent rotation of the table.

この場合、真空発生源(真空ポンプ)からインデックス
テーブル上の真空吸着ヘッドに娶る真空伝達手段として
は、インデックステーブルに組み込んだ回転側支持軸の
真空通路と真空ポンプ側つまり固定側の真空通路(配管
、中空軸、その他固定部材の挿通溝)との間にロータリ
ーシールを介在させたり、あるいは固定側と回転側の摺
動連結部分に0リング等を組み込んで真空伝達を行って
いた。
In this case, the vacuum transmission means from the vacuum source (vacuum pump) to the vacuum suction head on the index table includes the vacuum passage of the rotating side support shaft built into the index table and the vacuum passage (piping) on the vacuum pump side, that is, the stationary side. , hollow shafts, and other fixed member insertion grooves), or by incorporating an O-ring or the like into the sliding connection between the fixed side and the rotating side to perform vacuum transmission.

(発明が解決しようとする課題) 従来のロータリーインデックステーブルの外側部に真空
吸着ヘッドを取り付けた構造は、複数個の真空吸着ヘッ
ドをそれぞれロータリーシールによって真空発生源に連
通させているので構造が複雑となり、途中で真空漏れが
生じ易く、チップ部品が吸着ヘッドから脱落するおそれ
があった。またロータリーインデックステーブルの安定
も悪く、測定精度を上げることが難しかった。さらに測
定対象のチップ部品の寸法に応して真空吸着ヘッドをイ
ンデックステーブルに簡単に付は換えることができず、
全体として複雑かつ高価になるという問題があった。
(Problem to be Solved by the Invention) The conventional structure in which vacuum suction heads are attached to the outside of a rotary index table is complicated because a plurality of vacuum suction heads are each connected to a vacuum source through a rotary seal. Therefore, vacuum leakage was likely to occur during the process, and there was a risk that the chip components would fall off from the suction head. Furthermore, the stability of the rotary index table was poor, making it difficult to improve measurement accuracy. Furthermore, the vacuum suction head cannot be easily attached to the index table depending on the dimensions of the chip component to be measured.
The overall problem was that it was complicated and expensive.

本発明は回転側と固定側の連結部を面接触としかつこの
面接触部位に真空伝達手段を形成し、これによって真空
漏れを防止し、簡単かつコンパクトな構造で、しかもイ
ンデックステーブル外周に多数のチップ部品の保持部を
取り付は得るチ・71部品特性測定装置の真空吸引形ロ
ータリーインデックス構造を提供することにある。
The present invention has a surface contact between the rotating side and the stationary side connecting portion, and forms a vacuum transmission means in this surface contact area. This prevents vacuum leakage, has a simple and compact structure, and has a large number of It is an object of the present invention to provide a vacuum suction type rotary index structure for a J.71 component characteristic measuring device to which a holding portion of a chip component can be attached.

(課題を解決するための手段) 本発明における真空吸引形ロータリーインデックス構造
は、インデックス出力軸に連結されかつ内部に真空通路
が形成されたロータリーインデックステーブルと、前記
インデックステーブルの下面に弾性的に押し付けられる
ように装置本体側に保持されかつその押付面に周状の真
空伝達用溝およびラビリンスシール溝が形成された真空
伝達用円環部材と、前記真空伝達用円環部材を前記ロー
タリーインデックステーブルに押圧するばね手段とを有
し、前記ロータリーインデックステーブルの真空通路が
前記円環部材の真空伝達用溝からチップ部品の保持用座
面まで連通しており、真空発生源からの負圧力が装置本
体側から前記円環部材の内部を通して前記ロータリーイ
ンデックステーブルの真空通路に伝えられるようにした
ものである。
(Means for Solving the Problems) The vacuum suction type rotary index structure of the present invention includes a rotary index table connected to an index output shaft and having a vacuum passage formed inside, and a rotary index table that is elastically pressed against the lower surface of the index table. a vacuum transmission annular member held on the apparatus main body side so that the vacuum transmission ring member has a circumferential vacuum transmission groove and a labyrinth seal groove formed on its pressing surface; and the vacuum transmission ring member is attached to the rotary index table. The vacuum passage of the rotary index table communicates from the vacuum transmission groove of the annular member to the holding surface of the chip component, and the negative pressure from the vacuum source is applied to the device body. The vacuum is transmitted from the side through the inside of the annular member to the vacuum passage of the rotary index table.

(実施例) 次に、本発明を実施例について図面を参照して説明する
(Example) Next, an example of the present invention will be described with reference to the drawings.

第3図は本発明に係るロータリーインデックステーブル
を用いたC測耐圧機の側面断面図であり、第4図は第3
図の部分的な上面図である。まずこれらの図を参照して
この実施例のC測耐圧機の概要を説明すれば、間欠回転
動作するロータリーインデックステーブル(以下インデ
ックステーブルと称する)10の外周部に後述するキャ
リアを介して被測定部品のチップコンデンサが等間隔に
保持されており、インデックステーブル10の中心を貫
通して測定ユニットハウジング11が該テーブルの上面
を覆うように装置基台14側に固定されている。ハウジ
ングItの中心にボールスプライン軸12を介して測定
部の端子レバー20の開閉駆動用カム板13が上下動可
能に軸支されている。駆動用カム板13はその円板状基
部13aの外周から第4図に示す如く複数個放射状に所
定の測定ステーションへ伸長している。装置基台14の
内部には装置駆動用のカム群が配置され、この装置駆動
用カムによりカムフロアおよび伝達リンク16、レバー
17等を介して端子レバー駆動用カム板13が上下動さ
れるが、前記装置駆動用カム群は本発明に係るインデッ
クステーブル10の支持軸即しインデックス出力軸18
にも連結され、これによって端子レバー駆動用カム板1
3とインデックステーブル10とは連動した動作を行う
ようになっている。
FIG. 3 is a side sectional view of a C pressure measuring machine using a rotary index table according to the present invention, and FIG.
FIG. 3 is a partial top view of the figure; First, the outline of the C pressure measuring machine of this embodiment will be explained with reference to these figures. Chip capacitors as components are held at equal intervals, and a measurement unit housing 11 is fixed to the device base 14 side so as to pass through the center of the index table 10 and cover the top surface of the table. A cam plate 13 for opening and closing a terminal lever 20 of the measuring section is pivotally supported in the center of the housing It via a ball spline shaft 12 so as to be movable up and down. As shown in FIG. 4, a plurality of drive cam plates 13 extend radially from the outer periphery of the disc-shaped base 13a to predetermined measurement stations. A group of cams for driving the device are arranged inside the device base 14, and the cam plate 13 for driving the terminal lever is moved up and down by the cam for driving the device via the cam floor, the transmission link 16, the lever 17, etc. The device driving cam group is the support shaft of the index table 10 according to the present invention, which is the index output shaft 18.
is also connected to the terminal lever driving cam plate 1.
3 and the index table 10 operate in conjunction with each other.

端子レバー駆動用カム板13に対応して該カムFi13
の下方に端子レバー支持板19がユニットハウジング1
1に放射状に複数個、かつインデンラステーブル10外
周のチップコンデンサの上方位置までのびて取り付けら
れている。一対の同形の端子レバー20がその中途部で
各端子レバー支持板19にナイフェツジ支持されている
。各端子レバー20の下端にはL形を成した薄板端子2
2が固着され、また端子レバー20のナイフェツジ支点
より下方で該レバー20と支持板19との間に圧縮ばね
27が装着されている。端子レバー駆動用カム板13の
上昇位置で一対の端子レバー20は前記圧縮ばね27の
作用で前記ナイフェツジ支点を中心としてその下端が互
いに接近、つまり閉成してテーブル外周のキャリア40
に保持されたチップコンデンサの両端をL形薄板端子2
2で挾み付け、これによっていわゆる対向接触方式で容
量測定が行われる。端子レバー駆動用カム板13の下降
動作で端子レバー20の上端が該カム板13のテーパ形
カム面に押圧され、これによってそのナイフェツジ支点
を中心に端子レバー20の下端が開成し薄板端子22と
チップコンデンサとの接触が解除される。この状態で、
後述するインデックステーブル10が回転動作し、次の
測定ステージ5ンヘチツプコンデンサが送られる。なお
L形薄板端子としては、例えば実願昭63−65576
号に特性測定用電極として詳述されたものが有効に採用
される。
The cam Fi13 corresponds to the terminal lever driving cam plate 13.
A terminal lever support plate 19 is located below the unit housing 1.
A plurality of capacitors are attached to the indenrus table 10 in a radial manner, extending to a position above the chip capacitors on the outer periphery of the indenrus table 10. A pair of terminal levers 20 of the same shape are knife-supported by each terminal lever support plate 19 at their midpoints. At the lower end of each terminal lever 20 is an L-shaped thin plate terminal 2.
A compression spring 27 is mounted between the terminal lever 20 and the support plate 19 below the knife fulcrum of the terminal lever 20. When the terminal lever drive cam plate 13 is in the raised position, the lower ends of the pair of terminal levers 20 approach each other around the knife fulcrum due to the action of the compression spring 27, that is, they are closed, and the carrier 40 on the outer periphery of the table is moved.
Both ends of the chip capacitor held in the L-shaped thin plate terminals 2
2, thereby performing a capacitance measurement in a so-called opposed contact method. As the terminal lever driving cam plate 13 moves downward, the upper end of the terminal lever 20 is pressed against the tapered cam surface of the cam plate 13, and as a result, the lower end of the terminal lever 20 opens around the knife fulcrum and connects the thin plate terminal 22. Contact with the chip capacitor is broken. In this state,
An index table 10, which will be described later, rotates, and the chip capacitor is sent to the next measuring stage, 5 inches. In addition, as an L-shaped thin plate terminal, for example, Utility Application No. 63-65576
The electrodes detailed in this issue can be effectively employed as electrodes for measuring characteristics.

第1図は本発明の実施例に係るロータリーインデックス
構造の部分的な側面断面図、第2図は第1図の実施例に
おける真空伝達用円環部材の斜視図である。第3図にも
示したようにインデンクスユニント30のインデックス
出力軸18にはすり鉢形のインデックス出力フランジ3
1が固着され、該フランジ31の上端にインデックステ
ーブル10の下面が固着されている。インデックス出力
フランジ31の外側には、ポリアセタール樹脂等の真空
伝達用円環部材33が装置本体部14とインデックステ
ーブル10との間に上下動可能に保持されている0円環
部材33と装置本体部の間には回転防止用スプリングピ
ン34が挿入され、さらに加圧スプリング35が両者の
間に介在されており、これによって円環部材33の上面
は常時インデックステーブルlOの下面に一定の押圧力
で押し付けられている。
FIG. 1 is a partial side sectional view of a rotary index structure according to an embodiment of the present invention, and FIG. 2 is a perspective view of a vacuum transmitting annular member in the embodiment of FIG. As shown in FIG. 3, the index output shaft 18 of the index unit 30 has a mortar-shaped index output flange 3.
1 is fixed, and the lower surface of the index table 10 is fixed to the upper end of the flange 31. On the outside of the index output flange 31, a vacuum transmission annular member 33 made of polyacetal resin or the like is held between the device main body 14 and the index table 10 so as to be movable up and down. A rotation prevention spring pin 34 is inserted between the two, and a pressure spring 35 is interposed between the two, so that the upper surface of the annular member 33 is always pressed against the lower surface of the index table IO with a constant pressure. Being forced.

円環部材33の上面には、第2図に示すように、環状又
は円弧状の真空伝達用溝36が形成され、またこの真空
伝達用溝36に連通ずるように複数個の真空通路37が
該円環部材を貫通して形成されている。この円環部材側
の真空通路37は真空吸引ホース50を介して図示しな
い真空発生源に接続される。インデックステーブル10
には前記真空伝達用溝36に連通ずる真空通路38が形
成されている。このテーブル側真空通路38の外端は、
チップコンデンサを保持するキャリア40に形成された
真空吸着孔41に連通している。さらに円環部材33の
上面のテーブル押付面にはラビリンスシール溝該が形成
されている。キャリア40は第1図に示すように全体と
してコ字状の外形を成し、インデックステーブル10の
周側部をそのコ字状部ではさむように該テーブルと面接
触で嵌合するキャリア本体部42と、前記本体部42の
上面に形成されたチップ部品収容凹部43とを有し、前
記真空吸着孔41が凹部43の底面即ちチップ部品保持
用の座面に開口している。キャリア40の凹部43には
測定端子の挿入逃げ溝が形成されている。なお、このキ
ャリアについては例えば特願昭6:3−186267号
に開示されたような特性測定用キャリアが有効に採用さ
れ得る。
As shown in FIG. 2, an annular or arcuate vacuum transmission groove 36 is formed on the upper surface of the annular member 33, and a plurality of vacuum passages 37 are formed in communication with the vacuum transmission groove 36. It is formed to penetrate the annular member. The vacuum passage 37 on the annular member side is connected to a vacuum generation source (not shown) via a vacuum suction hose 50. index table 10
A vacuum passage 38 communicating with the vacuum transmission groove 36 is formed in the vacuum passage 38 . The outer end of this table side vacuum passage 38 is
It communicates with a vacuum suction hole 41 formed in a carrier 40 that holds a chip capacitor. Furthermore, a labyrinth seal groove is formed on the table pressing surface of the upper surface of the annular member 33. As shown in FIG. 1, the carrier 40 has a generally U-shaped outer shape, and includes a carrier main body portion 42 that fits into surface contact with the index table 10 so that the peripheral side portion of the index table 10 is sandwiched between the U-shaped portions. and a chip component accommodating recess 43 formed on the upper surface of the main body portion 42, and the vacuum suction hole 41 opens at the bottom surface of the recess 43, that is, the seat surface for holding the chip component. The recess 43 of the carrier 40 is formed with an insertion groove for the measurement terminal. As for this carrier, for example, a carrier for measuring characteristics as disclosed in Japanese Patent Application No. 6:3-186267 can be effectively employed.

インデックステーブル10がインデックス動作しても該
テーブル10の真空通路38は真空伝達用円環部材33
の環状ないし円弧状の真空伝達用溝36に沿って移動す
るので、インデックステーブル10の真空通路38には
常に円環部材33および真空吸引ホース50を介して負
圧力がもたらされ、これによってキャリア40上端のチ
ップコンデンサが真空吸着される。インデックステーブ
ル10と円環部材33は面接触で押圧接触し、しかもこ
の接触面にラビリンスシール溝が形成されているので真
空漏れが防止され、チップ部品の確実な真空吸着がなさ
れる。
Even if the index table 10 performs an indexing operation, the vacuum passage 38 of the table 10 is connected to the vacuum transmission ring member 33.
Since the carrier moves along the annular or arcuate vacuum transmission groove 36, a negative pressure is always applied to the vacuum passage 38 of the index table 10 via the annular member 33 and the vacuum suction hose 50, and thereby the carrier The chip capacitor at the upper end of 40 is vacuum-adsorbed. The index table 10 and the annular member 33 are in surface contact with each other, and since a labyrinth seal groove is formed on this contact surface, vacuum leakage is prevented and the chip components are surely vacuum-adsorbed.

(発明の効果) 以上説明したように本発明によれば、インデノクステー
ブルと固定側の真空伝達部を押圧された面接触で構成し
、この接触面にラビリンスシール溝を形成したので真空
漏れのない確実な真空伝達がなされる。従来のように軸
にロータリーシールを用いたものと異なり、接触面にお
ける周状の溝で真空伝達を行うので構造が簡単で、しか
もテーブル外周に多数のチップ部品の保持部を設けるこ
とができるなどの効果がある。
(Effects of the Invention) As explained above, according to the present invention, the Indenox table and the fixed side vacuum transmission part are configured to have a pressed surface contact, and a labyrinth seal groove is formed on this contact surface, so that vacuum leakage is prevented. There is no reliable vacuum transmission. Unlike conventional models that use a rotary seal on the shaft, the vacuum is transmitted through a circumferential groove on the contact surface, so the structure is simple, and moreover, it is possible to provide a holding section for a large number of chip components around the outer periphery of the table. There is an effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例に係るロータリーインデックス
構造の部分的な側面断面図、第2図は第1図に示す真空
伝達用円環部材の斜視図、第3図は本発明に係るロータ
リーインデックス構造を用いたC測耐圧機の部分的な側
面断面図、第4図は第3図の部分的な上面図である。 10・・・インデックステーブル、 18・・・インデックス出力軸、 36・・・真空伝達用溝円環部材、 35・・・加圧スプリング、 36・・・真空伝達用溝、37.38・・・真空通路、 該・・・ 40・・・ 50・・・
FIG. 1 is a partial side cross-sectional view of a rotary index structure according to an embodiment of the present invention, FIG. 2 is a perspective view of the vacuum transmission annular member shown in FIG. 1, and FIG. 3 is a rotary index structure according to an embodiment of the present invention. FIG. 4 is a partial side sectional view of a C pressure measuring device using an index structure, and FIG. 4 is a partial top view of FIG. 3. DESCRIPTION OF SYMBOLS 10... Index table, 18... Index output shaft, 36... Vacuum transmission groove annular member, 35... Pressure spring, 36... Vacuum transmission groove, 37.38... Vacuum passage, applicable... 40... 50...

Claims (1)

【特許請求の範囲】[Claims] ロータリーインデックステーブルの外周部に保持された
チップ部品を該テーブルの周囲に配置した複数のステー
ションへテーブルインデックス動作で送って特性測定を
行うチップ部品特性測定装置において、インデックス出
力軸に連結されかつ内部に真空通路が形成されたロータ
リーインデックステーブルと、前記インデックステーブ
ルの下面に弾性的に押し付けられるように装置本体側に
保持されかつその押付面に周状の真空伝達用溝が形成さ
れた真空伝達用円環部材と、前記真空伝達用円環部材を
前記ロータリーインデックステーブルに押圧するばね手
段とを有し、前記ロータリーインデックステーブルの真
空通路が前記円環部材の真空伝達用溝からチップ部品の
保持用座面まで連通しており、真空発生源からの負圧力
が装置本体側から前記円環部材の内部を通して前記ロー
タリーインデックステーブルの真空通路に伝えられるこ
とを特徴とする真空吸引形ロータリーインデックス構造
In a chip component characteristic measuring device that measures characteristics by sending chip components held on the outer periphery of a rotary index table to multiple stations arranged around the table by table indexing operation, A rotary index table in which a vacuum passage is formed, and a vacuum transmission circle held on the apparatus main body side so as to be elastically pressed against the lower surface of the index table, and in which a circumferential vacuum transmission groove is formed in the pressing surface. a ring member; and a spring means for pressing the vacuum transmission ring member against the rotary index table, and the vacuum passage of the rotary index table extends from the vacuum transmission groove of the ring member to the chip component holding seat. A vacuum suction type rotary index structure, characterized in that the negative pressure from the vacuum source is transmitted from the device main body side to the vacuum passage of the rotary index table through the inside of the annular member.
JP63302568A 1988-11-30 1988-11-30 Vacuum suction type rotary index structure of chip component characteristic measuring device Expired - Fee Related JPH0687072B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63302568A JPH0687072B2 (en) 1988-11-30 1988-11-30 Vacuum suction type rotary index structure of chip component characteristic measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63302568A JPH0687072B2 (en) 1988-11-30 1988-11-30 Vacuum suction type rotary index structure of chip component characteristic measuring device

Publications (2)

Publication Number Publication Date
JPH02147966A true JPH02147966A (en) 1990-06-06
JPH0687072B2 JPH0687072B2 (en) 1994-11-02

Family

ID=17910547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63302568A Expired - Fee Related JPH0687072B2 (en) 1988-11-30 1988-11-30 Vacuum suction type rotary index structure of chip component characteristic measuring device

Country Status (1)

Country Link
JP (1) JPH0687072B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010133716A (en) * 2008-12-02 2010-06-17 Ueno Seiki Kk Temperature raising/lowering device, and test handler including the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010133716A (en) * 2008-12-02 2010-06-17 Ueno Seiki Kk Temperature raising/lowering device, and test handler including the same

Also Published As

Publication number Publication date
JPH0687072B2 (en) 1994-11-02

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