JPH02142534U - - Google Patents

Info

Publication number
JPH02142534U
JPH02142534U JP1033589U JP1033589U JPH02142534U JP H02142534 U JPH02142534 U JP H02142534U JP 1033589 U JP1033589 U JP 1033589U JP 1033589 U JP1033589 U JP 1033589U JP H02142534 U JPH02142534 U JP H02142534U
Authority
JP
Japan
Prior art keywords
pellet
wafer
heater rail
rail
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1033589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729635Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989010335U priority Critical patent/JPH0729635Y2/ja
Publication of JPH02142534U publication Critical patent/JPH02142534U/ja
Application granted granted Critical
Publication of JPH0729635Y2 publication Critical patent/JPH0729635Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP1989010335U 1989-01-30 1989-01-30 ダイボンダ Expired - Lifetime JPH0729635Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989010335U JPH0729635Y2 (ja) 1989-01-30 1989-01-30 ダイボンダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989010335U JPH0729635Y2 (ja) 1989-01-30 1989-01-30 ダイボンダ

Publications (2)

Publication Number Publication Date
JPH02142534U true JPH02142534U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-04
JPH0729635Y2 JPH0729635Y2 (ja) 1995-07-05

Family

ID=31513908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989010335U Expired - Lifetime JPH0729635Y2 (ja) 1989-01-30 1989-01-30 ダイボンダ

Country Status (1)

Country Link
JP (1) JPH0729635Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512746A (en) * 1978-07-12 1980-01-29 Matsushita Electronics Corp Semiconductor base plate joining device
JPS60211853A (ja) * 1984-04-05 1985-10-24 Nec Kansai Ltd 半導体ペレツトマウント装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512746A (en) * 1978-07-12 1980-01-29 Matsushita Electronics Corp Semiconductor base plate joining device
JPS60211853A (ja) * 1984-04-05 1985-10-24 Nec Kansai Ltd 半導体ペレツトマウント装置

Also Published As

Publication number Publication date
JPH0729635Y2 (ja) 1995-07-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term