JPH02142527U - - Google Patents
Info
- Publication number
- JPH02142527U JPH02142527U JP5112789U JP5112789U JPH02142527U JP H02142527 U JPH02142527 U JP H02142527U JP 5112789 U JP5112789 U JP 5112789U JP 5112789 U JP5112789 U JP 5112789U JP H02142527 U JPH02142527 U JP H02142527U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ultra
- fine fiber
- cleaning machine
- scrubber cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 229920001410 Microfiber Polymers 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989051127U JPH0617283Y2 (ja) | 1989-04-29 | 1989-04-29 | スクラバー洗浄機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989051127U JPH0617283Y2 (ja) | 1989-04-29 | 1989-04-29 | スクラバー洗浄機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02142527U true JPH02142527U (US06566495-20030520-M00011.png) | 1990-12-04 |
| JPH0617283Y2 JPH0617283Y2 (ja) | 1994-05-02 |
Family
ID=31570283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989051127U Expired - Lifetime JPH0617283Y2 (ja) | 1989-04-29 | 1989-04-29 | スクラバー洗浄機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617283Y2 (US06566495-20030520-M00011.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハのブラシ洗浄装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9748090B2 (en) | 2015-01-22 | 2017-08-29 | Toshiba Memory Corporation | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5612734A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Wafer polishing method |
| JPS57143831A (en) * | 1981-03-03 | 1982-09-06 | Toshiba Corp | Process of semiconductor wafer |
-
1989
- 1989-04-29 JP JP1989051127U patent/JPH0617283Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5612734A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Wafer polishing method |
| JPS57143831A (en) * | 1981-03-03 | 1982-09-06 | Toshiba Corp | Process of semiconductor wafer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0547724A (ja) * | 1991-08-13 | 1993-02-26 | Shin Etsu Handotai Co Ltd | ウエーハのブラシ洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617283Y2 (ja) | 1994-05-02 |
