JPH02138429U - - Google Patents
Info
- Publication number
- JPH02138429U JPH02138429U JP4710589U JP4710589U JPH02138429U JP H02138429 U JPH02138429 U JP H02138429U JP 4710589 U JP4710589 U JP 4710589U JP 4710589 U JP4710589 U JP 4710589U JP H02138429 U JPH02138429 U JP H02138429U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- wiring
- polycrystalline silicon
- lead
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 239000011229 interlayer Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4710589U JP2505003Y2 (ja) | 1989-04-20 | 1989-04-20 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4710589U JP2505003Y2 (ja) | 1989-04-20 | 1989-04-20 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02138429U true JPH02138429U ( ) | 1990-11-19 |
JP2505003Y2 JP2505003Y2 (ja) | 1996-07-24 |
Family
ID=31562749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4710589U Expired - Lifetime JP2505003Y2 (ja) | 1989-04-20 | 1989-04-20 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2505003Y2 ( ) |
-
1989
- 1989-04-20 JP JP4710589U patent/JP2505003Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2505003Y2 (ja) | 1996-07-24 |