JPH02138427U - - Google Patents
Info
- Publication number
- JPH02138427U JPH02138427U JP4685489U JP4685489U JPH02138427U JP H02138427 U JPH02138427 U JP H02138427U JP 4685489 U JP4685489 U JP 4685489U JP 4685489 U JP4685489 U JP 4685489U JP H02138427 U JPH02138427 U JP H02138427U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- storage tank
- branch pipes
- liquid storage
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 21
- 238000007599 discharging Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4685489U JPH02138427U (US20100056889A1-20100304-C00004.png) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4685489U JPH02138427U (US20100056889A1-20100304-C00004.png) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138427U true JPH02138427U (US20100056889A1-20100304-C00004.png) | 1990-11-19 |
Family
ID=31562284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4685489U Pending JPH02138427U (US20100056889A1-20100304-C00004.png) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138427U (US20100056889A1-20100304-C00004.png) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100539187B1 (ko) * | 1996-12-24 | 2006-03-20 | 동경 엘렉트론 주식회사 | 처리액공급기구및처리액공급방법 |
| JP2008527689A (ja) * | 2004-12-31 | 2008-07-24 | セメス・カンパニー・リミテッド | 集積回路の製造設備の流体供給システム |
| JP2011035135A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置、液処理方法、プログラムおよびプログラム記録媒体 |
| JP2011035128A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置、液処理方法、プログラムおよびプログラム記録媒体 |
| JP2011035133A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
| JP2012172760A (ja) * | 2011-02-21 | 2012-09-10 | Ckd Corp | 流量制御ユニット |
| JP2012178512A (ja) * | 2011-02-28 | 2012-09-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| US8950414B2 (en) | 2009-07-31 | 2015-02-10 | Tokyo Electron Limited | Liquid processing apparatus, liquid processing method, and storage medium |
| CN109712910A (zh) * | 2017-10-26 | 2019-05-03 | 株式会社斯库林集团 | 处理液供给装置、基板处理装置以及处理液供给方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62114228A (ja) * | 1985-11-13 | 1987-05-26 | Nec Kansai Ltd | 半導体製造装置 |
-
1989
- 1989-04-24 JP JP4685489U patent/JPH02138427U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62114228A (ja) * | 1985-11-13 | 1987-05-26 | Nec Kansai Ltd | 半導体製造装置 |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100539187B1 (ko) * | 1996-12-24 | 2006-03-20 | 동경 엘렉트론 주식회사 | 처리액공급기구및처리액공급방법 |
| JP2008527689A (ja) * | 2004-12-31 | 2008-07-24 | セメス・カンパニー・リミテッド | 集積回路の製造設備の流体供給システム |
| JP2011035135A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置、液処理方法、プログラムおよびプログラム記録媒体 |
| JP2011035128A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置、液処理方法、プログラムおよびプログラム記録媒体 |
| JP2011035133A (ja) * | 2009-07-31 | 2011-02-17 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
| US8950414B2 (en) | 2009-07-31 | 2015-02-10 | Tokyo Electron Limited | Liquid processing apparatus, liquid processing method, and storage medium |
| TWI571313B (zh) * | 2009-07-31 | 2017-02-21 | 東京威力科創股份有限公司 | 液體處理裝置、液體處理方法及記憶媒體 |
| JP2012172760A (ja) * | 2011-02-21 | 2012-09-10 | Ckd Corp | 流量制御ユニット |
| JP2012178512A (ja) * | 2011-02-28 | 2012-09-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| CN109712910A (zh) * | 2017-10-26 | 2019-05-03 | 株式会社斯库林集团 | 处理液供给装置、基板处理装置以及处理液供给方法 |
| JP2019079995A (ja) * | 2017-10-26 | 2019-05-23 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理液供給装置、基板処理装置、および処理液供給方法 |
| CN109712910B (zh) * | 2017-10-26 | 2023-07-14 | 株式会社斯库林集团 | 处理液供给装置、基板处理装置以及处理液供给方法 |
