JPH02137033U - - Google Patents
Info
- Publication number
- JPH02137033U JPH02137033U JP4356489U JP4356489U JPH02137033U JP H02137033 U JPH02137033 U JP H02137033U JP 4356489 U JP4356489 U JP 4356489U JP 4356489 U JP4356489 U JP 4356489U JP H02137033 U JPH02137033 U JP H02137033U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- reaction tube
- gas
- introducing
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4356489U JPH02137033U (enExample) | 1989-04-13 | 1989-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4356489U JPH02137033U (enExample) | 1989-04-13 | 1989-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02137033U true JPH02137033U (enExample) | 1990-11-15 |
Family
ID=31556081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4356489U Pending JPH02137033U (enExample) | 1989-04-13 | 1989-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02137033U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252931A (ja) * | 1986-04-25 | 1987-11-04 | Toshiba Corp | 化合物半導体の気相成長装置 |
| JPH01117315A (ja) * | 1987-10-30 | 1989-05-10 | Hitachi Cable Ltd | 半導体薄膜結晶の気相成長方法 |
-
1989
- 1989-04-13 JP JP4356489U patent/JPH02137033U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252931A (ja) * | 1986-04-25 | 1987-11-04 | Toshiba Corp | 化合物半導体の気相成長装置 |
| JPH01117315A (ja) * | 1987-10-30 | 1989-05-10 | Hitachi Cable Ltd | 半導体薄膜結晶の気相成長方法 |