JPH02136325U - - Google Patents
Info
- Publication number
- JPH02136325U JPH02136325U JP4609489U JP4609489U JPH02136325U JP H02136325 U JPH02136325 U JP H02136325U JP 4609489 U JP4609489 U JP 4609489U JP 4609489 U JP4609489 U JP 4609489U JP H02136325 U JPH02136325 U JP H02136325U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- developing device
- dip
- type developing
- diagram showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4609489U JPH02136325U (enExample) | 1989-04-19 | 1989-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4609489U JPH02136325U (enExample) | 1989-04-19 | 1989-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02136325U true JPH02136325U (enExample) | 1990-11-14 |
Family
ID=31560869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4609489U Pending JPH02136325U (enExample) | 1989-04-19 | 1989-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02136325U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188846A (ja) * | 1988-01-25 | 1989-07-28 | Matsushita Electric Ind Co Ltd | パターン形成法 |
-
1989
- 1989-04-19 JP JP4609489U patent/JPH02136325U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188846A (ja) * | 1988-01-25 | 1989-07-28 | Matsushita Electric Ind Co Ltd | パターン形成法 |
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