JPH02146422U - - Google Patents
Info
- Publication number
- JPH02146422U JPH02146422U JP5541389U JP5541389U JPH02146422U JP H02146422 U JPH02146422 U JP H02146422U JP 5541389 U JP5541389 U JP 5541389U JP 5541389 U JP5541389 U JP 5541389U JP H02146422 U JPH02146422 U JP H02146422U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- developing device
- fed
- dip
- liquid level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5541389U JPH02146422U (enExample) | 1989-05-15 | 1989-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5541389U JPH02146422U (enExample) | 1989-05-15 | 1989-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146422U true JPH02146422U (enExample) | 1990-12-12 |
Family
ID=31578341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5541389U Pending JPH02146422U (enExample) | 1989-05-15 | 1989-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146422U (enExample) |
-
1989
- 1989-05-15 JP JP5541389U patent/JPH02146422U/ja active Pending