JPS6151657U - - Google Patents

Info

Publication number
JPS6151657U
JPS6151657U JP13515084U JP13515084U JPS6151657U JP S6151657 U JPS6151657 U JP S6151657U JP 13515084 U JP13515084 U JP 13515084U JP 13515084 U JP13515084 U JP 13515084U JP S6151657 U JPS6151657 U JP S6151657U
Authority
JP
Japan
Prior art keywords
film
electron beam
magnification
moving
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13515084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13515084U priority Critical patent/JPS6151657U/ja
Publication of JPS6151657U publication Critical patent/JPS6151657U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Cameras Adapted For Combination With Other Photographic Or Optical Apparatuses (AREA)
JP13515084U 1984-09-07 1984-09-07 Pending JPS6151657U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13515084U JPS6151657U (enExample) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13515084U JPS6151657U (enExample) 1984-09-07 1984-09-07

Publications (1)

Publication Number Publication Date
JPS6151657U true JPS6151657U (enExample) 1986-04-07

Family

ID=30693649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13515084U Pending JPS6151657U (enExample) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPS6151657U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5745156B2 (enExample) * 1975-02-10 1982-09-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5745156B2 (enExample) * 1975-02-10 1982-09-25

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