JPH02135823U - - Google Patents
Info
- Publication number
- JPH02135823U JPH02135823U JP4611589U JP4611589U JPH02135823U JP H02135823 U JPH02135823 U JP H02135823U JP 4611589 U JP4611589 U JP 4611589U JP 4611589 U JP4611589 U JP 4611589U JP H02135823 U JPH02135823 U JP H02135823U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- attached
- sensor chip
- block
- silicon sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4611589U JPH02135823U (es) | 1989-04-19 | 1989-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4611589U JPH02135823U (es) | 1989-04-19 | 1989-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02135823U true JPH02135823U (es) | 1990-11-13 |
Family
ID=31560907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4611589U Pending JPH02135823U (es) | 1989-04-19 | 1989-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02135823U (es) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (es) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
-
1989
- 1989-04-19 JP JP4611589U patent/JPH02135823U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (es) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
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