JPH02133311A - Production of high purity silica - Google Patents

Production of high purity silica

Info

Publication number
JPH02133311A
JPH02133311A JP28577888A JP28577888A JPH02133311A JP H02133311 A JPH02133311 A JP H02133311A JP 28577888 A JP28577888 A JP 28577888A JP 28577888 A JP28577888 A JP 28577888A JP H02133311 A JPH02133311 A JP H02133311A
Authority
JP
Japan
Prior art keywords
silica
purity silica
high purity
impurities
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28577888A
Other languages
Japanese (ja)
Other versions
JPH0755818B2 (en
Inventor
Koichi Orii
折居 晃一
Iwao Oshima
大島 巌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Chemical Industry Co Ltd
Original Assignee
Nitto Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Chemical Industry Co Ltd filed Critical Nitto Chemical Industry Co Ltd
Priority to JP28577888A priority Critical patent/JPH0755818B2/en
Publication of JPH02133311A publication Critical patent/JPH02133311A/en
Publication of JPH0755818B2 publication Critical patent/JPH0755818B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/126Preparation of silica of undetermined type
    • C01B33/128Preparation of silica of undetermined type by acidic treatment of aqueous silicate solutions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

PURPOSE:To obtain high purity silica especially having a very low Ti content by adding ammonium persulfate as an extracting aid when Ti, etc., as impurities are removed from an aq. soln. of an alkali silicate as starting material. CONSTITUTION:An aq. soln. of an alkali silicate represented by a general formula M2O.nSiO2 (where M is an alkali metal and n is 0.5-5) is prepd. and allowed to react with a mineral acid to produce silica. This silica is treated with a mineral acid to extract and remove impurities. At this time, the silica production reaction and/or the extraction of the impurities is performed in the presence of ammonium persulfate. High purity silica especially having a very low Ti content is obtd.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、高純度シリカの製造方法に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for producing high-purity silica.

詳しくは、アルカリけい酸塩水溶液から、アルカリ金属
、塩素、ウランなど放射性を有する不純物のほか、特に
チタンの含有率が極めて低い高純度シリカを製造する方
法に関する。
Specifically, the present invention relates to a method for producing high-purity silica containing extremely low content of radioactive impurities such as alkali metals, chlorine, and uranium, as well as particularly titanium, from an aqueous alkali silicate solution.

本発明の方法により得られる高純度シリカは、電子部品
封止用樹脂組成物の充填剤、分散剤などとして、また、
特殊セラミックスの原料として好適に用いられるほか、
透明石英ガラスの原料としての用途が期待される。
The high-purity silica obtained by the method of the present invention can be used as a filler, dispersant, etc. in resin compositions for encapsulating electronic components, and
In addition to being suitably used as a raw material for special ceramics,
It is expected to be used as a raw material for transparent quartz glass.

従来より、透明石英ガラスの原料としては天然水晶が用
いられている。しかし、半導体分野において電子部品素
子の集積度が高まるのに伴って、使用する原材料に対す
る高純度化の要求が厳しくなるのに対して、良質の天然
水晶は枯渇しつつある。そのため、天然水晶を合成高純
度シリカで代替しようとする検討が行われている。
Conventionally, natural quartz has been used as a raw material for transparent quartz glass. However, as the degree of integration of electronic component elements increases in the semiconductor field, demands for higher purity of the raw materials used become stricter, and high-quality natural crystals are running out. Therefore, studies are being conducted to replace natural quartz with synthetic high-purity silica.

本発明は、このような要望に対応できる高純度シリカを
製造する方法を提供することを目的とするものである。
An object of the present invention is to provide a method for producing high-purity silica that can meet such demands.

〔従来の技術] 天然水晶に代わる合成高純度シリカを得る方法の一つと
して、アルカリけい酸塩水溶液を原料とする高純度シリ
カの製法としては; 1) けい酸アルカリ水溶液を酸で処理することによっ
て精製する方法: (特開昭59−54632号、特開昭60−19101
6号など)。
[Prior Art] One of the methods for obtaining synthetic high-purity silica to replace natural quartz crystal is to produce high-purity silica using an alkali silicate aqueous solution as a raw material: 1) Treating an alkali silicate aqueous solution with an acid. Method of purification by: (JP-A-59-54632, JP-A-60-19101)
No. 6, etc.).

2) −ヒ記の処理に際して、11 tO,の存在下で
行う方法 (特開昭61−286212号など)などが
提案されている。
2) - When processing the above, a method has been proposed in which the treatment is carried out in the presence of 11 tO (Japanese Patent Laid-Open No. 61-286212, etc.).

(発明が解決しようとする問題点〕 これらの方法によって、純度のかなり高いシリカを製造
することはできる。しかし、1)の方法には、Tiの除
去が困難であるという難点がある。
(Problems to be Solved by the Invention) Silica of considerably high purity can be produced by these methods.However, method 1) has a drawback in that it is difficult to remove Ti.

Tiは、石英ガラスの紫外部における透過率を低ドさせ
るので、石英ガラスの原料からは除去しなければならな
い不純物の代表的なものである。
Ti is a typical impurity that must be removed from the raw material of silica glass because it lowers the transmittance of silica glass in the ultraviolet region.

−Cに、T1の鉱酸への溶解度は小さいので原料中に含
まれるTiを所要の濃度レベルまで抽出除去するには多
段階の酸洗浄処理を要し、コスト高になる。実際面で、
けい酸アルカリ水溶液を原料として、Ti含有率が59
11Mを下回るシリカを得ることは困難であった。
-C, since the solubility of T1 in mineral acids is low, multi-stage acid cleaning treatment is required to extract and remove Ti contained in the raw material to a desired concentration level, resulting in high costs. In practical terms,
Using an aqueous alkali silicate solution as a raw material, the Ti content is 59
It was difficult to obtain silica below 11M.

また、2)の方法は、H20□を用いてTiを鉱酸への
溶解度の大きい錯体に変換することによって抽出除去を
容易にしようとするものである。微量のTiを抽出除去
するのに1(20□を用いることは有効であるが、Hi
ntは熱分解によって猛毒性を有するオゾンを生成する
という難点を有し、また、Tiの抽出処理の際に発泡す
るなど実用面において取扱いの点で問題がある。
Furthermore, method 2) attempts to facilitate extraction and removal by converting Ti into a complex with high solubility in mineral acids using H20□. It is effective to use 1 (20□) to extract and remove trace amounts of Ti, but Hi
nt has the disadvantage that it generates highly toxic ozone upon thermal decomposition, and also has problems in practical handling, such as foaming during the Ti extraction process.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者らは、従来の方法における前記の問題点を改善
するための研究を行い、アルカリけい酸塩水?g ’e
、を原料として、微量のTiを除去する際の抽出助剤と
して過硫酸アンモニウム (以下、A P Sという)
が好適であることを見出し、本発明を完成した。
The present inventors conducted research to improve the above-mentioned problems in the conventional method, and found that alkaline silicate water? g 'e
Ammonium persulfate (hereinafter referred to as APS) is used as an extraction aid when removing trace amounts of Ti using , as a raw material.
They found that this is suitable and completed the present invention.

すなわち本発明は、[一般式:M20・n5io□(た
だし、Mはアルカリ金属元素、nはSiO□のモル故で
0.5〜5を示す)で表されるアルカリけい酸塩の水溶
液を鉱酸と反応させ、得られたシリカを鉱酸で処理して
不純物を抽出除去し高純度シリカを製造する方法におい
て、前記の反応および/または不純物抽出を過硫酸アン
モニウムの存在下で行うことを特徴とする高純度シリカ
の製造方法」を要旨とする。
That is, the present invention provides an aqueous solution of an alkali silicate represented by the general formula: M20·n5io□ (where M is an alkali metal element and n is 0.5 to 5 because it is a mole of SiO□). A method for producing high-purity silica by reacting with an acid and treating the obtained silica with a mineral acid to extract and remove impurities, characterized in that the reaction and/or impurity extraction is performed in the presence of ammonium persulfate. The summary is ``A method for producing high-purity silica.''

本発明の方法で原料のアルカリけい酸塩水溶液としては
、けい酸のナトリウム塩、カリウム塩。
In the method of the present invention, the raw alkali silicate aqueous solution includes sodium salts and potassium salts of silicic acid.

J千つム塩などの水18液を用いることができる。A water 18 solution such as J.S.T.M. salt can be used.

また、反+1t、おまび不純物抽出の各工程で用いられ
るili: i讃としては、硫酸、も)14酸、塩酸な
どが挙げられ、実用上、硫酸を用いるのが好ましい。
In addition, examples of ili used in each step of extracting impurities include sulfuric acid, 14 acid, and hydrochloric acid, and it is preferable to use sulfuric acid in practice.

Ti抽出助剤としての^psの添加方法は、i′+?■
記鉱酸の水)8液にAPSを溶解させてもよいし、また
、予め調製されたAI”S水溶液を前記鉱酸と混合して
もよい。
How to add ^ps as a Ti extraction aid is i′+? ■
APS may be dissolved in the mineral acid water (8) solution, or a previously prepared AI''S aqueous solution may be mixed with the mineral acid.

APSの使用墳は、存在するTiに対して等モル以−ヒ
、好ましくは10〜100倍モルに相当する量とするの
がよい。
The amount of APS to be used is preferably equivalent to an equimolar amount or more, preferably 10 to 100 times the molar amount of Ti present.

Ti抽出処理は、温度20°C以上、好ましくは50〜
140’cの1・n囲で行うのがよい。
The Ti extraction process is performed at a temperature of 20°C or higher, preferably 50°C or higher.
It is best to perform this in the 1·n range of 140'c.

常圧における処理液の沸点よりも高い温度で加(F下で
処理すると、Ti抽出処理の所要時間を短縮することが
できる。加圧抽出の際の温度は、高い程好ましいが酸に
よる装置の腐食やエネルギーコストを考慮すると、11
0〜+40’Cの範囲が実JT)的である。
If the treatment is carried out at a temperature higher than the boiling point of the treated solution at normal pressure (F), the time required for the Ti extraction process can be shortened. Considering corrosion and energy costs, 11
The range from 0 to +40'C is typical for actual JT.

Ti抽出処理の時間は、回分式の場合には5分から5時
間程度、また、連続式の場合には30秒から30分程度
、好ましくは1〜10分程度程度る。
The time for the Ti extraction process is about 5 minutes to 5 hours in the case of a batch method, and about 30 seconds to 30 minutes in the case of a continuous method, preferably about 1 to 10 minutes.

酸処理を施して得られたシリカは、次いで+IT意の温
度の水を用いて渋滞し、必要によりろ過操作を組みさせ
て脱酸脱水処理する。
The silica obtained by acid treatment is then filtered using water at a temperature of +IT, followed by a filtration operation if necessary, and subjected to deoxidation and dehydration treatment.

なお、本発明で使用する酸は精製または、U子グレード
と称される高純変品を、また原料や使用する酸の希釈ま
たはシリカの洗αなどに用いる水は不純物の少ない純水
を用いることが好ましい。
In addition, the acid used in the present invention is purified or a highly pure modified product called Uzu grade, and the water used for diluting the raw material and the acid used or for washing the silica is pure water with few impurities. It is preferable.

なお、アルカリ金属の過硫酸塩もT1抽出助剤としての
機能を有するが、本発明で目的とするシリカはアルカリ
金属についてもその含有率が低いことが望ましいので、
本発明の方法において用いられるTi抽出助剤としての
過硫酸塩化合物はアンモニウム塩であることが好ましい
Note that alkali metal persulfates also have a function as a T1 extraction aid, but it is desirable that the silica targeted by the present invention has a low content of alkali metals.
The persulfate compound used as a Ti extraction aid in the method of the present invention is preferably an ammonium salt.

〔発明の効果) 本発明の方法によれば、アルカリけい酸塩六溶液を原料
として、不純物含有率としてアルカリ金属: 10pp
m以下、塩素:3ppm以下、ウランなど放射性元素=
 3ρpb以下、更に、チタン:5pp+m以下である
、不純物音を率が極めて低い高純度のシリカ粒子を得る
ことができる。
[Effects of the Invention] According to the method of the present invention, using an alkali silicate hex solution as a raw material, the impurity content is alkali metal: 10 pp
m or less, chlorine: 3 ppm or less, radioactive elements such as uranium =
It is possible to obtain highly pure silica particles with an extremely low impurity noise rate of 3 ρ pb or less, and titanium: 5 pp+m or less.

本発明の方法で用いられる^psは、入手が容易であり
、安全性が高く取板いやすいのでシリカの製造工程で問
題なく使用することができる。
The ^ps used in the method of the present invention is easily available, highly safe, and easy to remove, so it can be used in the silica manufacturing process without any problems.

本発明の方法で得られたシリカ粒子は従来技術による場
合に比較して、不純物含有率が極めて低いので、特に高
集積回路封止用樹脂組成物の充填剤として用いられ、ま
た、透明石英ガラスや特殊セラミックスなどの原料とし
ての用途が期待される。
The silica particles obtained by the method of the present invention have an extremely low impurity content compared to those obtained by the conventional technique, so they are particularly used as a filler for resin compositions for encapsulating highly integrated circuits, and are also used for transparent quartz glass. It is expected to be used as a raw material for products such as ceramics and special ceramics.

〔実施例〕〔Example〕

以下、本発明の方法を実施例および比較例により具体的
に説明する。
The method of the present invention will be specifically explained below using Examples and Comparative Examples.

実施例−1゜ けい酸ソーダ13号CJIS [1408,3号相当品
Example-1 Sodium silicate No. 13 CJIS [equivalent to No. 1408, 3].

SiJ: 2B%+ Na z O:  9%、 Ti
:60ppm)  6 kgを減圧下で50°Cに加温
して脱水濃縮し、5iOz: 32%の繊維化用原液を
得た。本原液の粘度は30°Cで約100ボイズであり
、曳糸性も良好であった。
SiJ: 2B%+ NazO: 9%, Ti
: 60 ppm) 6 kg was heated to 50° C. under reduced pressure and dehydrated and concentrated to obtain a stock solution for fiberization of 5 iOz: 32%. The viscosity of this stock solution was about 100 voids at 30°C, and the stringability was also good.

この原液をろ過後、押し出し機を用い孔径0.2mmφ
、孔数200個の金−白金合金製ノズルを通して6m/
分の速度で、50°Cに保持した反応浴−子めAPS:
 17.1gを溶解させた、硫酸13重量%水溶液2O
N中へ押し出した。
After filtering this stock solution, use an extruder to make a pore size of 0.2 mmφ.
, through a gold-platinum alloy nozzle with 200 holes.
Reaction bath held at 50 °C at a rate of 1 min. APS:
13% by weight aqueous solution of sulfuric acid 2O in which 17.1g was dissolved
I pushed him into N.

押し出された原液はNa 20が酸と反応し中和されて
凝固し、透明な繊維状ゲルに変化した。
The extruded stock solution was neutralized by Na 20 reacting with acid and solidified, turning into a transparent fibrous gel.

反応浴からの繊維状ゲルの取り出しは、ベルトコンベア
ーにより、コンヘアーの速度は1m/分で、繊維状ゲル
の反応浴での浸漬時間は約1分であった。
The fibrous gel was taken out from the reaction bath using a belt conveyor at a speed of 1 m/min, and the immersion time of the fibrous gel in the reaction bath was about 1 minute.

得られた繊維状ゲルの40gを、予めAPS O,41
gを溶解させた、硫酸13重量%硫酸水?8液: 50
0 mfl中に浸漬し、撹拌しなから100“Cで30
分間処理した。繊維状ゲルはこまかく開裂し、長さ2〜
5脇の短繊維状シリカとなった。
40g of the obtained fibrous gel was preliminarily treated with APS O,41
13% by weight sulfuric acid water in which g is dissolved? 8 liquid: 50
0 mfl and heated at 100"C for 30 minutes without stirring.
Processed for minutes. The fibrous gel is cleaved finely and has a length of 2~
It became short fibrous silica with 5 sides.

次いで、得られた短繊維状シリカを脱イオン水500 
dの中に入れて10分間撹拌した後、ヌソチェを用いて
脱水した。
Next, the obtained short fibrous silica was soaked in deionized water at 500%
d and stirred for 10 minutes, then dehydrated using a Nusoche.

この酸による抽出処理−水洗の操作を3回繰り返し、更
に水による渋滞を5回繰り返した後のシリカ中の硫酸根
濃度は1ppI11以下であった。
After repeating this extraction process with acid and washing with water three times, and further repeating the congestion with water five times, the concentration of sulfate groups in the silica was 1 ppI11 or less.

得られたシリカを150”Cで1夜乾燥後、1200°
Cで1時間加熱処理した。
The obtained silica was dried at 150"C overnight and then heated to 1200°C.
It was heat-treated at C for 1 hour.

得られたシリカ中の不純物含有率は、表−1に示される
ように、いづれも1 ppm以下であった。
As shown in Table 1, the impurity content in the obtained silica was 1 ppm or less in all cases.

実施例−2゜ APS使用量を表−2に示すように変えたほかは、実施
例−1と同様の方法によって処理し、シリカを得た。得
られたシリカ中の不純物含有率は表−1に併記した通り
で、Ti含有率はいづれも5 pl)lf1未満であっ
た。
Example 2 Silica was obtained by processing in the same manner as in Example 1, except that the amount of APS used was changed as shown in Table 2. The impurity content in the obtained silica is as shown in Table 1, and the Ti content was less than 5 pl)lf1 in all cases.

比較例−1゜ APSを使用しないほかは、実施例−1と同様の方法に
よって処理し、シリカを得た。
Comparative Example-1 Silica was obtained in the same manner as in Example-1 except that APS was not used.

得られたシリカ中の不純物含有率は、表−1に併記した
通りで、Tiは5.0ppm+であった。
The impurity content in the obtained silica was as shown in Table 1, and Ti was 5.0 ppm+.

表−1゜ シリカ中の不純物含有率: 表−2゜ 日東化学工業株式会社Table-1゜ Impurity content in silica: Table-2゜ Nitto Chemical Industry Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 1)一般式:M_2O・nSiO_2(ただし、Mはア
ルカリ金属元素、nはSiO_2のモル数で0.5〜5
を示す)で表されるアルカリけい酸塩の水溶液を鉱酸と
反応させ、得られたシリカを鉱酸で処理して不純物を抽
出除去し高純度シリカを製造する方法において、前記の
反応および/または不純物抽出を過硫酸アンモニウムの
存在下で行うことを特徴とする高純度シリカの製造方法
1) General formula: M_2O・nSiO_2 (where M is an alkali metal element, n is the number of moles of SiO_2, 0.5 to 5
In a method for producing high-purity silica by reacting an aqueous solution of an alkali silicate represented by ) with a mineral acid and treating the obtained silica with the mineral acid to extract and remove impurities, the reaction and/or Alternatively, a method for producing high-purity silica, characterized in that impurity extraction is performed in the presence of ammonium persulfate.
JP28577888A 1988-11-14 1988-11-14 Method for producing high-purity silica Expired - Fee Related JPH0755818B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28577888A JPH0755818B2 (en) 1988-11-14 1988-11-14 Method for producing high-purity silica

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28577888A JPH0755818B2 (en) 1988-11-14 1988-11-14 Method for producing high-purity silica

Publications (2)

Publication Number Publication Date
JPH02133311A true JPH02133311A (en) 1990-05-22
JPH0755818B2 JPH0755818B2 (en) 1995-06-14

Family

ID=17695945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28577888A Expired - Fee Related JPH0755818B2 (en) 1988-11-14 1988-11-14 Method for producing high-purity silica

Country Status (1)

Country Link
JP (1) JPH0755818B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018118865A (en) * 2017-01-24 2018-08-02 太平洋セメント株式会社 Process for producing purified silica
JP2020007164A (en) * 2018-07-02 2020-01-16 株式会社アドマテックス Fibrous filler-containing slurry composition and method for producing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018118865A (en) * 2017-01-24 2018-08-02 太平洋セメント株式会社 Process for producing purified silica
JP2020007164A (en) * 2018-07-02 2020-01-16 株式会社アドマテックス Fibrous filler-containing slurry composition and method for producing the same

Also Published As

Publication number Publication date
JPH0755818B2 (en) 1995-06-14

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