JPH0213244B2 - - Google Patents
Info
- Publication number
- JPH0213244B2 JPH0213244B2 JP9236679A JP9236679A JPH0213244B2 JP H0213244 B2 JPH0213244 B2 JP H0213244B2 JP 9236679 A JP9236679 A JP 9236679A JP 9236679 A JP9236679 A JP 9236679A JP H0213244 B2 JPH0213244 B2 JP H0213244B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetized body
- magnetic field
- magnetic
- magnetized
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 39
- 238000000206 photolithography Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9236679A JPS5616801A (en) | 1979-07-19 | 1979-07-19 | Magnetic scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9236679A JPS5616801A (en) | 1979-07-19 | 1979-07-19 | Magnetic scale |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5616801A JPS5616801A (en) | 1981-02-18 |
| JPH0213244B2 true JPH0213244B2 (en:Method) | 1990-04-03 |
Family
ID=14052410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9236679A Granted JPS5616801A (en) | 1979-07-19 | 1979-07-19 | Magnetic scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5616801A (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57189010A (en) | 1981-05-15 | 1982-11-20 | Fuji Heavy Ind Ltd | Position detecting mechanism |
| JPS60170702A (ja) * | 1984-02-16 | 1985-09-04 | S G:Kk | 直線位置検出装置及び該装置におけるロツド部の製造方法 |
| DE3447325A1 (de) * | 1984-12-24 | 1986-06-26 | Standard Elektrik Lorenz Ag | Positionsgeber |
| JP2781526B2 (ja) * | 1994-11-28 | 1998-07-30 | シーケーディ株式会社 | エアーオペレートバルブ |
| DE102007049741B4 (de) * | 2007-10-16 | 2011-07-28 | Micromotion GmbH, 55124 | Magnetischer Maßstabträger |
-
1979
- 1979-07-19 JP JP9236679A patent/JPS5616801A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5616801A (en) | 1981-02-18 |
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