JPH02131549U - - Google Patents
Info
- Publication number
- JPH02131549U JPH02131549U JP3759089U JP3759089U JPH02131549U JP H02131549 U JPH02131549 U JP H02131549U JP 3759089 U JP3759089 U JP 3759089U JP 3759089 U JP3759089 U JP 3759089U JP H02131549 U JPH02131549 U JP H02131549U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- cover part
- reaction chamber
- contacting
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3759089U JPH02131549U (ru) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3759089U JPH02131549U (ru) | 1989-03-31 | 1989-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02131549U true JPH02131549U (ru) | 1990-11-01 |
Family
ID=31544844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3759089U Pending JPH02131549U (ru) | 1989-03-31 | 1989-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02131549U (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0555543U (ja) * | 1991-12-25 | 1993-07-23 | 国際電気株式会社 | 縦型減圧cvd装置用ボート |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59169038A (ja) * | 1983-03-16 | 1984-09-22 | Hitachi Ltd | ガス放電表示パネル |
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1989
- 1989-03-31 JP JP3759089U patent/JPH02131549U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59169038A (ja) * | 1983-03-16 | 1984-09-22 | Hitachi Ltd | ガス放電表示パネル |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0555543U (ja) * | 1991-12-25 | 1993-07-23 | 国際電気株式会社 | 縦型減圧cvd装置用ボート |