JPH02131549U - - Google Patents
Info
- Publication number
- JPH02131549U JPH02131549U JP3759089U JP3759089U JPH02131549U JP H02131549 U JPH02131549 U JP H02131549U JP 3759089 U JP3759089 U JP 3759089U JP 3759089 U JP3759089 U JP 3759089U JP H02131549 U JPH02131549 U JP H02131549U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- cover part
- reaction chamber
- contacting
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案縦形ＣＶＤボートの一実施例の
構成を示す説明用斜視図、第２図は従来ボートの
一例の構成を示す説明用斜視図である。
３……ボート本体、３ａ……上端、３ｂ……下
板、３ｃ……側方端、４……ボートカバー部、４
ａ……上方フランジ部、４ｂ……下方フランジ部
、４ｃ……側方端、５……インナーチユーブ、６
……位置決めピン、７……位置決めスリツト、８
……ウエーハ、９……ウエーハ保持溝。
FIG. 1 is an explanatory perspective view showing the structure of an embodiment of the vertical CVD boat of the present invention, and FIG. 2 is an explanatory perspective view showing the structure of an example of a conventional boat. 3...Boat body, 3a...Top end, 3b...Lower plate, 3c...Side end, 4...Boat cover part, 4
a...Upper flange portion, 4b...Lower flange portion, 4c...Side end, 5...Inner tube, 6
...Positioning pin, 7...Positioning slit, 8
...Wafer, 9...Wafer holding groove.
Claims (1)
トカバー部と非接触でボート本体を反応室内に挿
入、取出し可能にならしめてなる縦形ＣＶＤボー
ト。 A vertical CVD boat in which a boat cover part is supported in a reaction chamber, and the boat body can be inserted into and taken out from the reaction chamber without contacting the boat cover part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3759089U JPH02131549U (en) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3759089U JPH02131549U (en) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131549U true JPH02131549U (en) | 1990-11-01 |
Family
ID=31544844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3759089U Pending JPH02131549U (en) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131549U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555543U (en) * | 1991-12-25 | 1993-07-23 | 国際電気株式会社 | Boat for vertical low pressure CVD equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59169038A (en) * | 1983-03-16 | 1984-09-22 | Hitachi Ltd | Gas electric-discharge display panel |
-
1989
- 1989-03-31 JP JP3759089U patent/JPH02131549U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59169038A (en) * | 1983-03-16 | 1984-09-22 | Hitachi Ltd | Gas electric-discharge display panel |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555543U (en) * | 1991-12-25 | 1993-07-23 | 国際電気株式会社 | Boat for vertical low pressure CVD equipment |