JPH02131195U - - Google Patents

Info

Publication number
JPH02131195U
JPH02131195U JP3986189U JP3986189U JPH02131195U JP H02131195 U JPH02131195 U JP H02131195U JP 3986189 U JP3986189 U JP 3986189U JP 3986189 U JP3986189 U JP 3986189U JP H02131195 U JPH02131195 U JP H02131195U
Authority
JP
Japan
Prior art keywords
tank
container
heating
heating means
ventilation passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3986189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0636476Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3986189U priority Critical patent/JPH0636476Y2/ja
Publication of JPH02131195U publication Critical patent/JPH02131195U/ja
Application granted granted Critical
Publication of JPH0636476Y2 publication Critical patent/JPH0636476Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
  • Furnace Details (AREA)
JP3986189U 1989-04-03 1989-04-03 有機金属供給用恒温槽 Expired - Fee Related JPH0636476Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3986189U JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3986189U JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Publications (2)

Publication Number Publication Date
JPH02131195U true JPH02131195U (enrdf_load_stackoverflow) 1990-10-31
JPH0636476Y2 JPH0636476Y2 (ja) 1994-09-21

Family

ID=31549139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3986189U Expired - Fee Related JPH0636476Y2 (ja) 1989-04-03 1989-04-03 有機金属供給用恒温槽

Country Status (1)

Country Link
JP (1) JPH0636476Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013219388A (ja) * 1997-07-11 2013-10-24 Advanced Technology Materials Inc バルク化学物質供給システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013219388A (ja) * 1997-07-11 2013-10-24 Advanced Technology Materials Inc バルク化学物質供給システム

Also Published As

Publication number Publication date
JPH0636476Y2 (ja) 1994-09-21

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees