JPH02131195U - - Google Patents
Info
- Publication number
- JPH02131195U JPH02131195U JP3986189U JP3986189U JPH02131195U JP H02131195 U JPH02131195 U JP H02131195U JP 3986189 U JP3986189 U JP 3986189U JP 3986189 U JP3986189 U JP 3986189U JP H02131195 U JPH02131195 U JP H02131195U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- container
- heating
- heating means
- ventilation passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 6
- 238000009423 ventilation Methods 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 238000010992 reflux Methods 0.000 claims 3
- 239000011810 insulating material Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
- Furnace Details (AREA)
Description
第１図はこの考案の一実施例の斜視図、第２図
はその縦断面図である。
１……槽下部、２……容器、４……バンドヒー
タ、５……槽上部、６……仕切り板、７，９……
配管、８……流量調節計、１０……ダクト、１１
……フアン、１２……ヒータ。
FIG. 1 is a perspective view of an embodiment of this invention, and FIG. 2 is a longitudinal sectional view thereof. 1... Bottom of the tank, 2... Container, 4... Band heater, 5... Upper part of the tank, 6... Partition plate, 7, 9...
Piping, 8...Flow rate controller, 10...Duct, 11
... Juan, 12... Heater.
Claims (1)
記槽下部内に有機金属を収容する容器およびこの
容器を加熱するための加熱手段を配設し、上記槽
上部内に上記容器から延設され容器内の有機金属
を反応室に供給する配管およびその配管に設けら
れた流量制御系を配設し、上記槽上部の下部側か
ら外部に通気路を延設してその先端を槽上部の上
部側に連結し、この通気路内にフアンおよび加熱
手段を設け、槽上部内の空気を、槽上部の下部側
から通気路内に吸引し、さらに通気路内から槽上
部の上部側に送り戻すような還流にするとともに
、その還流空気を加熱し加熱還流空気で上記流量
制御系を加熱保持するようにしたことを特徴とす
る有機金属供給用恒温槽。 The inside of the tank is partitioned into a lower part and an upper part by a heat insulating material, a container for storing the organic metal and a heating means for heating this container are arranged in the lower part of the tank, and a heating means for heating the container is provided in the upper part of the tank. A flow control system is installed in the pipe to supply the organic metal in the container to the reaction chamber, and a ventilation path is extended from the lower side of the upper part of the tank to the outside, and its tip is connected to the upper part of the tank. A fan and a heating means are installed in this ventilation passage, and air in the upper part of the tank is sucked into the ventilation passage from the lower side of the upper part of the tank, and then from inside the ventilation passage to the upper side of the upper part of the tank. 1. A constant temperature bath for supplying organic metals, characterized in that the flow rate control system is heated and maintained by the heated reflux air by heating the reflux air as well as sending back the reflux air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986189U JPH0636476Y2 (en) | 1989-04-03 | 1989-04-03 | Constant temperature bath for supplying metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986189U JPH0636476Y2 (en) | 1989-04-03 | 1989-04-03 | Constant temperature bath for supplying metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131195U true JPH02131195U (en) | 1990-10-31 |
| JPH0636476Y2 JPH0636476Y2 (en) | 1994-09-21 |
Family
ID=31549139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3986189U Expired - Fee Related JPH0636476Y2 (en) | 1989-04-03 | 1989-04-03 | Constant temperature bath for supplying metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636476Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013219388A (en) * | 1997-07-11 | 2013-10-24 | Advanced Technology Materials Inc | Bulk chemical delivery system |
-
1989
- 1989-04-03 JP JP3986189U patent/JPH0636476Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013219388A (en) * | 1997-07-11 | 2013-10-24 | Advanced Technology Materials Inc | Bulk chemical delivery system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636476Y2 (en) | 1994-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |