JPH02130748U - - Google Patents

Info

Publication number
JPH02130748U
JPH02130748U JP1989037186U JP3718689U JPH02130748U JP H02130748 U JPH02130748 U JP H02130748U JP 1989037186 U JP1989037186 U JP 1989037186U JP 3718689 U JP3718689 U JP 3718689U JP H02130748 U JPH02130748 U JP H02130748U
Authority
JP
Japan
Prior art keywords
former
double
carrier
polishing machine
sided polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989037186U
Other languages
English (en)
Other versions
JPH08128Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989037186U priority Critical patent/JPH08128Y2/ja
Publication of JPH02130748U publication Critical patent/JPH02130748U/ja
Application granted granted Critical
Publication of JPH08128Y2 publication Critical patent/JPH08128Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す要部断面図、
第２図は本考案の他の実施例を示す要部断面図、
第３図は本考案および従来の両面研磨機の研磨部
慨要断面図、第４図はＺ部の従来例の要部断面図
である。 １…上定盤、２…下定盤、３…被加工物、、４
…太陽歯車、５…内歯車、６…キヤリア、１８…
軸、１９…ローラ、２１、２５…シール部材、２
２…シール部。

Claims (1)

    【実用新案登録請求の範囲】
  1. キヤリアに装填した被加工物の上下面を上・下
    定盤で挟圧し、歯をローラと軸で形成した太陽歯
    車および内歯車によつて前期キヤリアに自転公転
    を与えて研磨加工を行う両面研磨機において、前
    期ローラと軸との間の隙間への研磨剤の侵入を押
    えるため少なくとも前期ローラ上端部にシール部
    を設けたことを特徴とする両面研磨機。
JP1989037186U 1989-03-30 1989-03-30 両面研磨機 Expired - Lifetime JPH08128Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989037186U JPH08128Y2 (ja) 1989-03-30 1989-03-30 両面研磨機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989037186U JPH08128Y2 (ja) 1989-03-30 1989-03-30 両面研磨機

Publications (2)

Publication Number Publication Date
JPH02130748U true JPH02130748U (ja) 1990-10-29
JPH08128Y2 JPH08128Y2 (ja) 1996-01-10

Family

ID=31544071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989037186U Expired - Lifetime JPH08128Y2 (ja) 1989-03-30 1989-03-30 両面研磨機

Country Status (1)

Country Link
JP (1) JPH08128Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006043815A (ja) * 2004-08-04 2006-02-16 Fujikoshi Mach Corp 研磨装置
JP2006212740A (ja) * 2005-02-04 2006-08-17 Fujikoshi Mach Corp 研磨装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997855U (ja) * 1982-12-21 1984-07-03 住友電気工業株式会社 両面同時ラツプ研磨機
JPS6376457U (ja) * 1986-11-06 1988-05-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997855U (ja) * 1982-12-21 1984-07-03 住友電気工業株式会社 両面同時ラツプ研磨機
JPS6376457U (ja) * 1986-11-06 1988-05-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006043815A (ja) * 2004-08-04 2006-02-16 Fujikoshi Mach Corp 研磨装置
JP4663270B2 (ja) * 2004-08-04 2011-04-06 不二越機械工業株式会社 研磨装置
JP2006212740A (ja) * 2005-02-04 2006-08-17 Fujikoshi Mach Corp 研磨装置
JP4510659B2 (ja) * 2005-02-04 2010-07-28 不二越機械工業株式会社 研磨装置

Also Published As

Publication number Publication date
JPH08128Y2 (ja) 1996-01-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term