JPH02129724U - - Google Patents
Info
- Publication number
- JPH02129724U JPH02129724U JP3838989U JP3838989U JPH02129724U JP H02129724 U JPH02129724 U JP H02129724U JP 3838989 U JP3838989 U JP 3838989U JP 3838989 U JP3838989 U JP 3838989U JP H02129724 U JPH02129724 U JP H02129724U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- orientation flat
- flat
- indicates
- concave portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
Landscapes
- Photovoltaic Devices (AREA)
Description
第１図は本考案の半導体基板の一実施例を示す
平面図、第２図ａ，ｂは第１図のＡ部及びＢ部拡
大図、第３図は従来の半導体基板の平面図である
。
１：基板、２：主フラツト、３：副フラツト、
４：メサ方向、５：段差部。
Fig. 1 is a plan view showing an embodiment of the semiconductor substrate of the present invention, Fig. 2 a and b are enlarged views of parts A and B of Fig. 1, and Fig. 3 is a plan view of a conventional semiconductor substrate. . 1: Board, 2: Main flat, 3: Sub-flat,
4: Mesa direction, 5: Step part.
Claims (1)
板において、該半導体基板に形成された前記オリ
エンテーシヨンフラツトの端末部の一方に凹部を
備えて前記半導体基板の表裏及びメサ方向を表示
する非対称フラツトを設けたことを特徴とする半
導体基板。 In a semiconductor substrate having an orientation flat, one of the terminal portions of the orientation flat formed on the semiconductor substrate is provided with a concave portion to provide an asymmetric flat that indicates the front and back sides and mesa direction of the semiconductor substrate. A semiconductor substrate characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3838989U JPH02129724U (en) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3838989U JPH02129724U (en) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129724U true JPH02129724U (en) | 1990-10-25 |
Family
ID=31546349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3838989U Pending JPH02129724U (en) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129724U (en) |
-
1989
- 1989-03-31 JP JP3838989U patent/JPH02129724U/ja active Pending