JPH02129342U - - Google Patents
Info
- Publication number
- JPH02129342U JPH02129342U JP3827989U JP3827989U JPH02129342U JP H02129342 U JPH02129342 U JP H02129342U JP 3827989 U JP3827989 U JP 3827989U JP 3827989 U JP3827989 U JP 3827989U JP H02129342 U JPH02129342 U JP H02129342U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport path
- cassette
- board
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 230000003139 buffering effect Effects 0.000 claims 2
- 238000011084 recovery Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Conveyance By Endless Belt Conveyors (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038279U JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989038279U JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02129342U true JPH02129342U (US20020095090A1-20020718-M00002.png) | 1990-10-25 |
| JP2507416Y2 JP2507416Y2 (ja) | 1996-08-14 |
Family
ID=31546140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989038279U Expired - Lifetime JP2507416Y2 (ja) | 1989-03-31 | 1989-03-31 | 基板のバツフア装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507416Y2 (US20020095090A1-20020718-M00002.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009001358A (ja) * | 2007-06-20 | 2009-01-08 | Shinko Electric Co Ltd | 搬送システム |
| JP2010538939A (ja) * | 2007-09-14 | 2010-12-16 | フレックスリンク コンポーネンツ アーベー | コンベアシステムのための持ち上げ装置、コンベアシステムおよび方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224936A (ja) * | 1985-07-19 | 1987-02-02 | Canon Inc | 物品等の自動供給装置 |
| JPS6292224U (US20020095090A1-20020718-M00002.png) * | 1985-11-30 | 1987-06-12 | ||
| JPS62262438A (ja) * | 1986-05-09 | 1987-11-14 | Canon Inc | ウエハ処理装置 |
| JPS63282007A (ja) * | 1987-05-14 | 1988-11-18 | Sanyo Electric Co Ltd | バッファ装置 |
-
1989
- 1989-03-31 JP JP1989038279U patent/JP2507416Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224936A (ja) * | 1985-07-19 | 1987-02-02 | Canon Inc | 物品等の自動供給装置 |
| JPS6292224U (US20020095090A1-20020718-M00002.png) * | 1985-11-30 | 1987-06-12 | ||
| JPS62262438A (ja) * | 1986-05-09 | 1987-11-14 | Canon Inc | ウエハ処理装置 |
| JPS63282007A (ja) * | 1987-05-14 | 1988-11-18 | Sanyo Electric Co Ltd | バッファ装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009001358A (ja) * | 2007-06-20 | 2009-01-08 | Shinko Electric Co Ltd | 搬送システム |
| JP2010538939A (ja) * | 2007-09-14 | 2010-12-16 | フレックスリンク コンポーネンツ アーベー | コンベアシステムのための持ち上げ装置、コンベアシステムおよび方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2507416Y2 (ja) | 1996-08-14 |
