JPH02128151U - - Google Patents
Info
- Publication number
- JPH02128151U JPH02128151U JP3780089U JP3780089U JPH02128151U JP H02128151 U JPH02128151 U JP H02128151U JP 3780089 U JP3780089 U JP 3780089U JP 3780089 U JP3780089 U JP 3780089U JP H02128151 U JPH02128151 U JP H02128151U
- Authority
- JP
- Japan
- Prior art keywords
- transferred
- pattern area
- mask
- pattern
- mask substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000013256 coordination polymer Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3780089U JPH02128151U (no) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3780089U JPH02128151U (no) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02128151U true JPH02128151U (no) | 1990-10-23 |
Family
ID=31545238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3780089U Pending JPH02128151U (no) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02128151U (no) |
-
1989
- 1989-03-31 JP JP3780089U patent/JPH02128151U/ja active Pending
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