JPH02124655U - - Google Patents

Info

Publication number
JPH02124655U
JPH02124655U JP3382189U JP3382189U JPH02124655U JP H02124655 U JPH02124655 U JP H02124655U JP 3382189 U JP3382189 U JP 3382189U JP 3382189 U JP3382189 U JP 3382189U JP H02124655 U JPH02124655 U JP H02124655U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
implantation
rays generated
impurities
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3382189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3382189U priority Critical patent/JPH02124655U/ja
Publication of JPH02124655U publication Critical patent/JPH02124655U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3382189U 1989-03-24 1989-03-24 Pending JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3382189U JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-24 1989-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3382189U JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-24 1989-03-24

Publications (1)

Publication Number Publication Date
JPH02124655U true JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-15

Family

ID=31537773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3382189U Pending JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-24 1989-03-24

Country Status (1)

Country Link
JP (1) JPH02124655U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09110359A (ja) * 1995-10-12 1997-04-28 Hitachi Building Syst Co Ltd 漏洩感知ｘ線探傷装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09110359A (ja) * 1995-10-12 1997-04-28 Hitachi Building Syst Co Ltd 漏洩感知ｘ線探傷装置

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