JPH02123057U - - Google Patents
Info
- Publication number
- JPH02123057U JPH02123057U JP3084589U JP3084589U JPH02123057U JP H02123057 U JPH02123057 U JP H02123057U JP 3084589 U JP3084589 U JP 3084589U JP 3084589 U JP3084589 U JP 3084589U JP H02123057 U JPH02123057 U JP H02123057U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cylinder
- holding rod
- cylindrical body
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000013016 damping Methods 0.000 description 1
Description
第１図は本案の一実施例を示す横断面図を示す
。
１……試料室、２……受金具、３……傾斜体、
４…試料ステージ、５……試料保持棒、６……受
、７……球体、８……凹球面、９……Ｏリング、
１０……試料、１１……ガイド、１２……押棒、
１３……ホルダー、１４……オシバネ、１５……
微動ツマミ、１６……Ｏリング、１７……カバー
、１８……ダンピングシート。
FIG. 1 shows a cross-sectional view showing an embodiment of the present invention. 1... Sample chamber, 2... Bracket, 3... Inclined body,
4...Sample stage, 5...Sample holding rod, 6...Receiver, 7...Sphere, 8...Concave spherical surface, 9...O-ring,
10...sample, 11...guide, 12...push rod,
13...Holder, 14...Oshibane, 15...
Fine adjustment knob, 16...O-ring, 17...cover, 18...damping sheet.
Claims (1)
点を中心として回転首振り運動可能に直角方向か
ら挿入された第１の筒体と、試料を上記電子光学
軸に位置づけるように上記第１の筒体に通された
試料保持棒と、上記第１の筒体と回転可能に係合
して上記鏡体に取り付けられた第２の筒体とで構
成された試料移動装置において、上記第１の筒体
と、試料保持棒と、第２の筒体を外気から遮蔽す
るようにカバーを取り付けたことを特徴とする電
子顕微鏡に於ける試料移動装置。 ２ 上記カバーに防振、防音、断熱の手段を設け
た請求の範囲第１項に記載された電子顕微鏡に於
ける試料移動装置。 ３ 上記カバーが上記第１の筒体と、試料保持棒
と、第２の筒体の回転と一体となつて回転するよ
うにした請求の範囲第１項に記載された電子顕微
鏡に於ける試料移動装置。[Claims for Utility Model Registration] 1. A first cylindrical body inserted from a perpendicular direction to the electron beam optical axis of the mirror so as to be able to rotate around a predetermined point, and a sample as described above. a sample holding rod passed through the first cylinder so as to be positioned on the electron optical axis; and a second cylinder rotatably engaged with the first cylinder and attached to the mirror body. A sample moving device for an electron microscope, characterized in that a cover is attached to the first cylinder, the sample holding rod, and the second cylinder so as to shield them from the outside air. . 2. A sample moving device in an electron microscope as set forth in claim 1, wherein the cover is provided with means for vibration proofing, sound proofing, and heat insulation. 3. A sample in an electron microscope according to claim 1, wherein the cover rotates in unison with the rotation of the first cylindrical body, the sample holding rod, and the second cylindrical body. Mobile device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3084589U JPH02123057U (en) | 1989-03-20 | 1989-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3084589U JPH02123057U (en) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02123057U true JPH02123057U (en) | 1990-10-09 |
Family
ID=31256261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3084589U Pending JPH02123057U (en) | 1989-03-20 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02123057U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0582065A (en) * | 1991-09-19 | 1993-04-02 | Hitachi Ltd | Specimen moving device of electron microscope |
| JP2014044842A (en) * | 2012-08-27 | 2014-03-13 | Melbil Co Ltd | Specimen holder |
| JP2014112471A (en) * | 2012-12-05 | 2014-06-19 | Hitachi High-Technologies Corp | Electron microscope |
| JP2015222656A (en) * | 2014-05-23 | 2015-12-10 | 株式会社日立ハイテクノロジーズ | Electron microscope |
-
1989
- 1989-03-20 JP JP3084589U patent/JPH02123057U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0582065A (en) * | 1991-09-19 | 1993-04-02 | Hitachi Ltd | Specimen moving device of electron microscope |
| JP2014044842A (en) * | 2012-08-27 | 2014-03-13 | Melbil Co Ltd | Specimen holder |
| JP2014112471A (en) * | 2012-12-05 | 2014-06-19 | Hitachi High-Technologies Corp | Electron microscope |
| JP2015222656A (en) * | 2014-05-23 | 2015-12-10 | 株式会社日立ハイテクノロジーズ | Electron microscope |
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