JPH02120851U - - Google Patents
Info
- Publication number
- JPH02120851U JPH02120851U JP2964589U JP2964589U JPH02120851U JP H02120851 U JPH02120851 U JP H02120851U JP 2964589 U JP2964589 U JP 2964589U JP 2964589 U JP2964589 U JP 2964589U JP H02120851 U JPH02120851 U JP H02120851U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- strain
- generating portion
- pressure
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2964589U JPH02120851U (no) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2964589U JPH02120851U (no) | 1989-03-15 | 1989-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120851U true JPH02120851U (no) | 1990-09-28 |
Family
ID=31254033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2964589U Pending JPH02120851U (no) | 1989-03-15 | 1989-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120851U (no) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6062164A (ja) * | 1983-09-16 | 1985-04-10 | Mitsubishi Electric Corp | 半導体圧力センサの製造方法 |
| JPS6247150B2 (no) * | 1983-03-04 | 1987-10-06 | Masanori Kunieda |
-
1989
- 1989-03-15 JP JP2964589U patent/JPH02120851U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6247150B2 (no) * | 1983-03-04 | 1987-10-06 | Masanori Kunieda | |
| JPS6062164A (ja) * | 1983-09-16 | 1985-04-10 | Mitsubishi Electric Corp | 半導体圧力センサの製造方法 |