JPH02120839U - - Google Patents
Info
- Publication number
- JPH02120839U JPH02120839U JP3063589U JP3063589U JPH02120839U JP H02120839 U JPH02120839 U JP H02120839U JP 3063589 U JP3063589 U JP 3063589U JP 3063589 U JP3063589 U JP 3063589U JP H02120839 U JPH02120839 U JP H02120839U
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- integrated circuit
- microwave integrated
- monolithic microwave
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Junction Field-Effect Transistors (AREA)
- Waveguides (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989030635U JPH0749810Y2 (ja) | 1989-03-16 | 1989-03-16 | モノリシックマイクロ波集積回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989030635U JPH0749810Y2 (ja) | 1989-03-16 | 1989-03-16 | モノリシックマイクロ波集積回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02120839U true JPH02120839U (de) | 1990-09-28 |
| JPH0749810Y2 JPH0749810Y2 (ja) | 1995-11-13 |
Family
ID=31255869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989030635U Expired - Lifetime JPH0749810Y2 (ja) | 1989-03-16 | 1989-03-16 | モノリシックマイクロ波集積回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749810Y2 (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6053089A (ja) * | 1983-09-02 | 1985-03-26 | Nec Corp | 半導体装置 |
| JPS62294303A (ja) * | 1986-06-13 | 1987-12-21 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPS6459942A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Formation of multilayer interconnection |
-
1989
- 1989-03-16 JP JP1989030635U patent/JPH0749810Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6053089A (ja) * | 1983-09-02 | 1985-03-26 | Nec Corp | 半導体装置 |
| JPS62294303A (ja) * | 1986-06-13 | 1987-12-21 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPS6459942A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Formation of multilayer interconnection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749810Y2 (ja) | 1995-11-13 |