JPH02120635A - リークデテクタ - Google Patents

リークデテクタ

Info

Publication number
JPH02120635A
JPH02120635A JP27419088A JP27419088A JPH02120635A JP H02120635 A JPH02120635 A JP H02120635A JP 27419088 A JP27419088 A JP 27419088A JP 27419088 A JP27419088 A JP 27419088A JP H02120635 A JPH02120635 A JP H02120635A
Authority
JP
Japan
Prior art keywords
display
amount
leak
detector
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27419088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587770B2 (enrdf_load_stackoverflow
Inventor
Kimiharu Arita
有田　公治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP27419088A priority Critical patent/JPH02120635A/ja
Publication of JPH02120635A publication Critical patent/JPH02120635A/ja
Publication of JPH0587770B2 publication Critical patent/JPH0587770B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP27419088A 1988-10-28 1988-10-28 リークデテクタ Granted JPH02120635A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27419088A JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27419088A JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Publications (2)

Publication Number Publication Date
JPH02120635A true JPH02120635A (ja) 1990-05-08
JPH0587770B2 JPH0587770B2 (enrdf_load_stackoverflow) 1993-12-17

Family

ID=17538289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27419088A Granted JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Country Status (1)

Country Link
JP (1) JPH02120635A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517257A (ja) * 2004-10-16 2008-05-22 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 漏洩検知の方法
JP2008275360A (ja) * 2007-04-26 2008-11-13 Fuji Electric Systems Co Ltd 真空系統の空気漏れ検出方法
US20130317765A1 (en) * 2010-07-30 2013-11-28 Resmed Limited Methods and devices with leak detection
CN105403365A (zh) * 2014-09-10 2016-03-16 岛津Emit株式会社 氦气检漏仪
DE102016205381A1 (de) * 2016-03-31 2017-10-05 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung
EP3405763B1 (fr) 2016-01-21 2019-12-04 Pfeiffer Vacuum Dispositif d'aspersion et module de détection de fuites

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517257A (ja) * 2004-10-16 2008-05-22 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 漏洩検知の方法
JP2008275360A (ja) * 2007-04-26 2008-11-13 Fuji Electric Systems Co Ltd 真空系統の空気漏れ検出方法
US10328219B2 (en) * 2010-07-30 2019-06-25 RedMed Pty Ltd Methods and devices with leak detection
US20130317765A1 (en) * 2010-07-30 2013-11-28 Resmed Limited Methods and devices with leak detection
US12102756B2 (en) 2010-07-30 2024-10-01 ResMed Pty Ltd Methods and devices with leak detection
US11213640B2 (en) 2010-07-30 2022-01-04 ResMed Pty Ltd Methods and devices with leak detection
CN105403365A (zh) * 2014-09-10 2016-03-16 岛津Emit株式会社 氦气检漏仪
JP2016057202A (ja) * 2014-09-10 2016-04-21 島津エミット株式会社 ヘリウムリークディテクタ
EP3405763B1 (fr) 2016-01-21 2019-12-04 Pfeiffer Vacuum Dispositif d'aspersion et module de détection de fuites
JP2019510228A (ja) * 2016-03-31 2019-04-11 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングＩｎｆｉｃｏｎ ＧｍｂＨ 試験ガス噴霧装置を用いたガス漏洩検査
EP3436793A1 (de) * 2016-03-31 2019-02-06 Inficon GmbH Gaslecksuche mit einer testgassprühvorrichtung
RU2728802C2 (ru) * 2016-03-31 2020-07-31 Инфикон Гмбх Поиск течи газа с помощью распылительного устройства тестового газа
US10837857B2 (en) 2016-03-31 2020-11-17 Inficon Gmbh Gas leak search using a test gas spray device
EP3742148A1 (de) * 2016-03-31 2020-11-25 Inficon GmbH Gaslecksuche mit einer testgassprühvorrichtung
CN109073495A (zh) * 2016-03-31 2018-12-21 英福康有限责任公司 使用测试气体喷射装置的气体泄漏搜索
DE102016205381B4 (de) 2016-03-31 2023-11-30 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung
DE102016205381A1 (de) * 2016-03-31 2017-10-05 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung

Also Published As

Publication number Publication date
JPH0587770B2 (enrdf_load_stackoverflow) 1993-12-17

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