JPH02120026U - - Google Patents

Info

Publication number
JPH02120026U
JPH02120026U JP1989132140U JP13214089U JPH02120026U JP H02120026 U JPH02120026 U JP H02120026U JP 1989132140 U JP1989132140 U JP 1989132140U JP 13214089 U JP13214089 U JP 13214089U JP H02120026 U JPH02120026 U JP H02120026U
Authority
JP
Japan
Prior art keywords
measuring
resistor
utility
temperature
sheets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989132140U
Other languages
English (en)
Other versions
JPH0339691Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPH02120026U publication Critical patent/JPH02120026U/ja
Application granted granted Critical
Publication of JPH0339691Y2 publication Critical patent/JPH0339691Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Description

【図面の簡単な説明】 第１図は本考案による測定ゾンデの断面図であ
り、第２図は第１図に示す測定ゾンデの平面図で
あり、かつ第３図は本考案による測定ゾンデを媒
体によつて流通されている管路内に配置した際の
略示図である。 １，２……プラスチツクシート、３……膜系、
４……温度依存性抵抗、５……温度依存性でない
抵抗、６……接触位置、７，８，１４，１５……
保持部材、９……空間、１０……接続素子、１１
……流動媒体、１６…導体路。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ プラスチツクからなるキヤリアが抵抗によつ
    て占められている範囲以外で測定抵抗に導かれて
    いる導体路を接続する接触位置のための自由空間
    ９を留めておきながら機械的な自己支持性保持部
    材７，８，１４，１５中に、流動する媒体１１が
    抵抗によつて占められている範囲へ支障なく流入
    しうるように嵌込まれている、プラスチツクから
    なるキヤリア上の膜系として媒体流中に配置され
    た温度依存性測定抵抗少なくとも１個を有する、
    流動する媒体の質量および／または温度を測定す
    るための、殊に内燃機関の吸込み空気質量および
    ／または燃料質量を測定するための測定ゾンデに
    おいて、キヤリアが１２〜１００μｍの厚さを有
    する温度安定性プラスチツクシート１１として構
    成されており、かつ抵抗膜を有する片面で抵抗の
    ための接続接触位置６の空間の保持下に抵抗４，
    ５および導体路１６によつて被覆されていない全
    範囲で第２の温度安定性の厚さ１２〜１００μｍ
    のプラスチツクシート２と緊密に堅固に結合され
    ていることを特徴とする、流動する媒体の質量お
    よび／または温度を測定するための測定ゾンデ。 ２ 膜系３の膜の１つが本質的にニツケルから成
    り、この膜系が本質的にタンタルから成る薄膜で
    裏打ちされている、実用新案登録請求の範囲第１
    項記載の測定ゾンデ。 ３ プラスチツクシート１，２がポリイミドシー
    トである、実用新案登録請求の範囲第１項記載の
    測定ゾンデ。 ４ シート１，２が抵抗および導体路によつて占
    められていない全範囲で相互に溶接されておりお
    よび／または化学的に結合している、実用新案登
    録請求の範囲第１項から第３項までのいずれか１
    項に記載の測定ゾンデ。 ５ シート１，２の外側表面がヘキサメチルジシ
    ロキサン、ヘキサフルオルプロピレン等の形の出
    発ポリマーを有している、誘電性で耐食性のピン
    ホール不含保護層の形の疎水性被覆を有している
    、実用新案登録請求の範囲第１項から第４項まで
    のいずれか１項に記載の測定ゾンデ。 ６ 被覆が４μｍを下回る厚さ、特に０．５μｍ
    の厚さである、実用新案登録請求の範囲第５項記
    載の測定ゾンデ。
JP1989132140U 1979-05-15 1989-11-15 Expired JPH0339691Y2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792919433 DE2919433A1 (de) 1979-05-15 1979-05-15 Messonde zur messung der masse und/oder temperatur eines stroemenden mediums und verfahren zu ihrer herstellung

Publications (2)

Publication Number Publication Date
JPH02120026U true JPH02120026U (ja) 1990-09-27
JPH0339691Y2 JPH0339691Y2 (ja) 1991-08-21

Family

ID=6070713

Family Applications (2)

Application Number Title Priority Date Filing Date
JP6289980A Pending JPS564014A (en) 1979-05-15 1980-05-14 Probe for measuring mass and*or temperature of flowing medium and manufacturing method of said probe
JP1989132140U Expired JPH0339691Y2 (ja) 1979-05-15 1989-11-15

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP6289980A Pending JPS564014A (en) 1979-05-15 1980-05-14 Probe for measuring mass and*or temperature of flowing medium and manufacturing method of said probe

Country Status (4)

Country Link
US (1) US4345465A (ja)
EP (1) EP0019135B1 (ja)
JP (2) JPS564014A (ja)
DE (2) DE2919433A1 (ja)

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DE3111948A1 (de) * 1981-03-26 1982-10-07 Robert Bosch Gmbh, 7000 Stuttgart Schneller temperatursensor fuer eine brennkraftmaschine
DE3115654A1 (de) * 1981-04-18 1982-11-04 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur messung der masse eines stroemenden mediums, insbesondere zur messung der brennkraftmaschinen zugefuehrten kraftstoffmasse
DE3127081C2 (de) * 1981-07-09 1985-01-24 Degussa Ag, 6000 Frankfurt Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen und Flüssigkeiten
DE3138910A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Mengendurchflussmesser
DE3279831D1 (en) * 1981-10-09 1989-08-24 Honeywell Inc Integrated semiconductor device and method of fabricating said device
DE3208096A1 (de) * 1982-03-06 1983-09-15 Robert Bosch Gmbh, 7000 Stuttgart Messsonde zur bestimmung der masse und/oder temperatur eines stroemenden mediums
DE3208145C2 (de) * 1982-03-06 1986-10-09 Viscotherm AG, Hinteregg, Zürich Sender- bzw. Empfängerelement für eine nach dem Wärmeimpfverfahren arbeitende Durchfluß-Meßvorrichtung und unter Verwendung dieser Elemente gebaute Vorrichtung
DE3231345C3 (de) * 1982-08-24 1994-11-17 Bosch Gmbh Robert Verfahren zur Herstellung von Sonden zur Messung der Masse und/oder Temperatur eines strömenden Mediums
DE3328852A1 (de) * 1983-08-10 1985-02-28 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur messung der masse eines stroemenden mediums
GB2145229B (en) * 1983-08-19 1987-01-14 Emi Ltd Heat detecting arrangement
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
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US4633578A (en) * 1983-12-01 1987-01-06 Aine Harry E Miniature thermal fluid flow sensors and batch methods of making same
US4790181A (en) * 1983-12-01 1988-12-13 Aine Harry E Thermal mass flow meter and method of making same
US4691566A (en) * 1984-12-07 1987-09-08 Aine Harry E Immersed thermal fluid flow sensor
JPS60236024A (ja) * 1984-05-09 1985-11-22 Nippon Soken Inc 直熱型空気流量センサ
DE3417305A1 (de) * 1984-05-10 1985-11-14 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur messung der masse eines stroemenden mediums
DE3422690A1 (de) * 1984-06-19 1985-12-19 Wolfgang Dipl.-Ing. 1000 Berlin Merkel Thermischer durchflussmesser
US4576050A (en) * 1984-08-29 1986-03-18 General Motors Corporation Thermal diffusion fluid flow sensor
DE3504082A1 (de) * 1985-02-07 1986-08-07 Robert Bosch Gmbh, 7000 Stuttgart Verfahren und vorrichtung zur messung der masse eines stroemenden mediums
DE3604202C2 (de) * 1985-02-14 1997-01-09 Nippon Denso Co Direkt beheizte Strömungsmeßvorrichtung
JPS61188901A (ja) * 1985-02-16 1986-08-22 株式会社日本自動車部品総合研究所 流量センサ用膜式抵抗
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
SE447318B (sv) * 1985-05-21 1986-11-03 Nils Goran Stemme Integrerad halvledarkrets med fog av termiskt isolerande fogemne, sett att framstella kretsen samt dess anvendning i en flodesmetare
JPS61274222A (ja) * 1985-05-30 1986-12-04 Sharp Corp 流量センサ
US4776214A (en) * 1985-08-09 1988-10-11 Motorola, Inc. Mass air flow sensor
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
US4771271A (en) * 1987-03-11 1988-09-13 Ford Motor Company Silicon based low level liquid sensor having a fast response time
US4854167A (en) * 1987-09-09 1989-08-08 Motorola Inc. Mass fluid flow sensor
DE3829195A1 (de) * 1988-08-29 1990-03-08 Bosch Gmbh Robert Temperaturfuehler
DE3833967A1 (de) * 1988-10-06 1990-04-12 Hiss Eckart Messgehaeuse
DE4009833C2 (de) * 1989-03-31 1996-09-26 Aisan Ind Luftmengenmeßeinrichtung für Ansaugluft
DE4025715C1 (ja) * 1990-08-14 1992-04-02 Robert Bosch Gmbh, 7000 Stuttgart, De
JPH05215583A (ja) * 1992-02-04 1993-08-24 Mitsubishi Electric Corp 感熱式流量センサ
JP2908942B2 (ja) * 1992-08-28 1999-06-23 三菱電機株式会社 感熱式流量センサ
KR100223504B1 (ko) * 1992-08-28 1999-10-15 다카노 야스아키 혼성 집적 회로 장치
JP3196395B2 (ja) * 1993-02-18 2001-08-06 株式会社村田製作所 抵抗温度センサ
US5576488A (en) * 1994-11-21 1996-11-19 The United States Of America As Represented By The United States National Aeronautics And Space Administration Micro-sensor thin-film anemometer
DE19504572C2 (de) * 1995-02-11 1999-02-04 Hella Kg Hueck & Co Temperaturfühleranordnung
DE19719010C2 (de) * 1996-05-24 2003-04-30 Ifm Electronic Gmbh Wärmeübergangskontroll- und/oder -meßgerät
DE19621000C2 (de) * 1996-05-24 1999-01-28 Heraeus Sensor Nite Gmbh Temperatur-Sensor mit einem Meßwiderstand
DE19904419B4 (de) * 1998-02-08 2008-06-26 Paul Rüster & Co. Inhaber Uwe Nowak GmbH Nutenwiderstandsthermometer
SE511682C2 (sv) * 1998-03-05 1999-11-08 Etchtech Sweden Ab Motstånd i elektriska ledare på eller i mönsterkort, substrat och halvledarbrickor
DE19847303B4 (de) * 1998-10-14 2006-11-30 Robert Bosch Gmbh Sensorelement mit antiadhäsiver Oberflächenbeschichtung
DE19905384A1 (de) * 1999-02-10 2000-08-17 Holzschuh Gmbh & Co Kg Sensor und Verfahren zu dessen Herstellung
DE19957991C2 (de) * 1999-12-02 2002-01-31 Daimler Chrysler Ag Anordnung einer Heizschicht für einen Hochtemperaturgassensor
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
DE10124964B4 (de) * 2001-05-21 2004-02-05 Forschungszentrum Karlsruhe Gmbh Sensor zur Messung von Strömungsgeschwindigkeiten und Verfahren zu dessen Betrieb
DE102006022290B4 (de) * 2006-05-11 2009-07-23 Heraeus Sensor Technology Gmbh Heizer mit integriertem Temperatursensor auf Träger
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JPS49103686A (ja) * 1973-02-02 1974-10-01
JPS5189135U (ja) * 1975-01-09 1976-07-16

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Also Published As

Publication number Publication date
DE3066137D1 (en) 1984-02-23
DE2919433C2 (ja) 1987-01-22
EP0019135B1 (de) 1984-01-18
DE2919433A1 (de) 1980-12-04
EP0019135A2 (de) 1980-11-26
JPS564014A (en) 1981-01-16
US4345465A (en) 1982-08-24
EP0019135A3 (en) 1981-01-14
JPH0339691Y2 (ja) 1991-08-21

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