JPH0211767A - Continuous dry plating apparatus for long material - Google Patents

Abstract

PURPOSE:To enable cooling to the prescribed temp. while maintaining shape of a long material to flat by cooling the long material after dry plating, with cooling means substantially surrounding this under non-contacting condition. CONSTITUTION:The long material 1 uncoiled from a pay-off reel 10 is passed through inlet side differential pressure chambers 2a-2d providing seal rolls 3a-3e and connecting with each vacuum pump 12-15 in order, and after evaporating an evacuating material from crucibles 4, 7 in an evaporating chamber, the long material 1 is taken out through outlet side differential pressure chambers 8d-8a and coiled to a tension reel 11. In the above continuous dry plating apparatus, the cooling means 21, 22 substantially surrounding the long material 1 under non-contacting condition, are arranged in a connecting chamber 24 continuing to the evaporating chamber. The temp raised long material 1 is cooled by the evaporation with the cooling means 21, 22 to maintain this to the prescribed temp. By this method, extreme heat strain is not developed to the long material 1 and abnormal deformation can be prevented.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to an apparatus for continuously dry plating long objects such as metal strips, and particularly relates to a cooling device for long objects after plating. be.

<Prior Art> Techniques for forming thin films on various materials by so-called dry plating such as vacuum evaporation and ion plating to modify their surfaces have been extremely widely used in recent years. Examples include coating a glass surface with another type of ceramic, coating a drill or tool with TiN or TiC, or depositing zinc on a steel plate. These techniques mainly improve the adhesion with the coating by heating the substrate to a predetermined temperature in a vacuum before plating.

In particular, recently, the technology of continuously plating long objects such as metal strips in a vacuum has been improved and has come into use.

Although it is not impossible to plate the front and back sides of a long object at the same time, it is generally a one-sided plating process since it requires a large equipment and technical burden. Therefore, an apparatus for plating one side at a time will be described below.

When plating one side at a time, the first plating is performed after heating the long object to a predetermined temperature, but the temperature of the long object increases significantly after the coating is formed. Therefore, during the subsequent plating of the opposite side, cooling to a predetermined temperature is usually necessary. As a cooling method, there is a conventional method of bringing the material into contact with a cooling roll as disclosed in, for example, Japanese Patent Application Laid-open No. 103366/1983. However, this method cannot be used in all cases because the cooling rate is high and metal strips may be deformed into waves.

<Problems to be Solved by the Invention> Based on the above-mentioned background, the object of the present invention is to provide a continuous drying method for a long object, which has a cooling means capable of cooling the long object to a predetermined temperature while maintaining the shape of the long object flat. This paper proposes a rating device.

<Means for Solving the Problems> The present invention provides a continuous 1' live rating apparatus for long objects, which is characterized by being provided with a cooling means that substantially surrounds the long objects in a non-contact state. This is a continuous dry plating device for objects.

<For production> The present invention will be explained based on the drawings.

FIG. 4 schematically shows a conventional sequential single-sided continuous plating apparatus. A long object 1 such as a metal strip is passed from a payoff reel 10 through differential pressure chambers 2a to 2d on the entrance side of the long object whose pressure is gradually lowered, and then transferred to the first plating means, in this case the position of the crucible 4. is deposited on one side with
Rolls 5 and 6 change the direction of the strip by 180°
After the direction change, the long object is plated on the other side at the position of the second plating means, that is, the crucible 7, and then passed through the differential pressure chambers 8d to 8a on the exit side of the long object, and then wound on the tension reel 11 in the atmosphere. taken. Each differential pressure chamber has seal roll group 3.
A to 3e and 9e to 9a restrict the flow of gas to the adjacent room to a minimum. Each differential pressure chamber and plating chamber is evacuated by vacuum pumps 12-16. The long object 1 is preheated by a preheating device (not shown) so that it reaches a predetermined pre-plating temperature before reaching the first crucible 4 . Common methods include electron beams and infrared rays. The long object 1, whose temperature has further increased due to the latent heat of vapor solidification and the kinetic energy of vapor particles during plating, is used as a deflector.
Although the elongated object 1 contacts the roll 5 and is cooled, the elongated object 1 undergoes wavy deformation due to the temperature difference between the two. Therefore, it is necessary to efficiently cool the long object before it reaches the roll 5.

The points that the present inventors focused on are the space from the first Lupo 4 to the roll 5, the space between the rolls 5 and 6, and the space from the roll 6 to the second Lupo 7.

Conventionally, these spaces were recognized as mere passage areas for the long object 1, but by providing a cooling body here, it was possible to achieve a good shape for the long object.

FIG. 1 shows an embodiment of the present invention. 1st crucible 4
The vacuum chamber from the to the second Lupo 7 is separated by a partition plate 20.
It is divided at 23 to form a connection chamber 24. Cooling means 21.22 are arranged inside it.

Although the partition plates 20 and 23 are not necessarily required, the crucible 4
．． It is preferable to provide this from the viewpoint of preventing a decrease in cooling efficiency due to the radiant heat from 7. The elongated object 1, which has been plated on one side on the first ruppo 4 and whose temperature has increased, passes through the cooling means 21 in the connection chamber 24, and after cooling down to a predetermined temperature, rolls 5. After passing through the cooling means 22, the direction is changed by the roll 6 and plating is applied to the other side. In order to raise the temperature of the elongated object 1 again to the required pre-plating temperature after passing through the cooling means 22, the roll 6 should be of a structure that can be heated to that temperature, or the preheating device should be installed in the second crucible 7. It should be installed before.

In this embodiment, two cooling means 21 and 22 are provided, but either one may be used.

For example, if there is only one cooling means 22, there is a possibility that the long object on the deflector roll 5 will be deformed due to thermal distortion. All you have to do is create a way to do it.

In any case, the temperature of the long object that has arrived at the second plating apparatus has been adjusted to the optimum temperature for plating. Next, by providing the cooling means of the present invention between the second plating means and the seal roll 9e of the differential pressure chamber 8d, the length of the entire device can be shortened.

Next, FIG. 2 is a detailed view showing an example of the cooling means of the present invention.

Openings 18 for inserting the elongated object 1 are provided in two opposing faces 17b of the rectangular parallelepiped 17. By cooling the wall of this rectangular parallelepiped 17, the wall surface is kept at a temperature lower than room temperature. Cooling can be achieved by having a double wall structure and passing a refrigerant through the wall, or by providing cooling piping on the wall surface. Figure 2 (
(a) is a plan view, (b) is a sketch, and (C) is a view seen from the direction in which a long object travels. In addition, if the long object is a steel strip, etc.,
The cooling means may be a plate-like body which is stacked vertically with a copper strip in between.

FIG. 3 shows another example of the cooling body of the present invention in which a cooling pipe 19 is wound around the elongated object 1. Figure 3 (a) is a plan view, (b)
) is a side view, and (C) is a view seen from the direction in which the long object 1 is inserted.

Since the cooling means of the present invention surrounds the long object in a non-contact manner as described above, extreme thermal distortion does not occur in the long object, and abnormal deformation of the long object can be avoided.

Another advantage of the apparatus of the present invention is that in an apparatus that sequentially plates one side at a time, it is possible to maintain the cleanliness of the unplated surfaces. When plating, it is common to remove impurities attached or adsorbed to the surface of a long object by preheating before plating. It is necessary to keep the unplated surface clean. There is no problem when the degree of vacuum is extremely good, but under normal operating pressures, contamination due to adsorption of residual gas components is inevitable to some extent, and this tends to cause poor adhesion of the coating. By introducing a low-temperature substance such as liquid nitrogen into the cooling means according to the present invention, it is possible to trap residual gas in the vacuum chamber, greatly improving the cleanliness of unplated surfaces and removing the plating film and substrate. The adhesion with the material is improved.

The present apparatus can be similarly used when plating both sides of a long object at the same time, or when plating only one side. In either case, by providing the present device in the space before first contacting a roll or the like after plating, a plated long object with a good shape can be obtained.

Next, an example of operation will be shown.

In a continuous vacuum evaporation apparatus using the apparatus of the present invention shown in FIG. 1, after evaporating 1 μm of zinc on one side onto a 0.3 mm thick steel plate, the temperature of the metal strip was raised to 260°C.

A time reduction of 20-30% was achieved when cooling this to a temperature of 50°C. In addition, there was no change in shape and the adhesion between the coating and the strip was good. In this way, the apparatus of the present invention enables excellent plating processing.

<Effects of the Invention> As described above, the apparatus of the present invention makes it possible to perform dry plating on long objects while maintaining their shape well. Furthermore, the adhesion of the film is good, and it is possible to shorten the operating time or the length of the equipment.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an example of the continuous dry plating apparatus of the present invention, FIG. 2 is a diagram showing a rectangular parallelepiped cooling means, and FIG.
This figure shows a tubular cooling means, and FIG. 4 shows a conventional continuous dry plating device. 1... Long object, 2a to 2d... Inlet side differential pressure chamber, 3a to 3e... Seal roll, 4... Crucible, 6... Roll, 8a to 8d... Outlet side differential Pressure chamber, 9a to 9e... Seal roll, 10... Payoff reel, 11... Tension reel, 12 to 16... Vacuum pump, 17... Cooling means, 19... Cooling pipe, 21 ... cooling means, 23 ... partition plate, 5 ... roll, 7 ... crucible, 18 ... opening, 20 ... partition plate, 22 ... cooling means, 24 ... connection room.

Claims (1)

[Claims] A continuous dry plating apparatus for long objects, characterized in that the continuous dry plating apparatus for long objects is provided with a cooling means that substantially surrounds the long objects after plating in a non-contact state.