JPH02116731U - - Google Patents
Info
- Publication number
- JPH02116731U JPH02116731U JP2637689U JP2637689U JPH02116731U JP H02116731 U JPH02116731 U JP H02116731U JP 2637689 U JP2637689 U JP 2637689U JP 2637689 U JP2637689 U JP 2637689U JP H02116731 U JPH02116731 U JP H02116731U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resist
- outer periphery
- spin
- vacuum nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本案装置の平面図、第２図は同上断面
図、第３図は従来技術の説明図である。 １……基板、２……フオトマスク、３……レジ
スト、４……マスクホルダー、５……レジストの
盛り上がり部分、６……チヤツク台、７……スピ
ンカツプ、８……真空ノズル。
図、第３図は従来技術の説明図である。 １……基板、２……フオトマスク、３……レジ
スト、４……マスクホルダー、５……レジストの
盛り上がり部分、６……チヤツク台、７……スピ
ンカツプ、８……真空ノズル。
Claims (1)
- 基板にレジストをスピン塗布する際に基板外周
部に沿つて生じるレジストの盛り上がり部分に沿
つて移動できる真空ノズルを配置してなることを
特徴とする基板外周部のレジスト除去装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2637689U JPH02116731U (ja) | 1989-03-08 | 1989-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2637689U JPH02116731U (ja) | 1989-03-08 | 1989-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02116731U true JPH02116731U (ja) | 1990-09-19 |
Family
ID=31247944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2637689U Pending JPH02116731U (ja) | 1989-03-08 | 1989-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02116731U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11382212B2 (en) | 2017-11-22 | 2022-07-05 | Alps Alpine Co., Ltd. | Input device with reinforcement plate and wider grounding wire |
-
1989
- 1989-03-08 JP JP2637689U patent/JPH02116731U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11382212B2 (en) | 2017-11-22 | 2022-07-05 | Alps Alpine Co., Ltd. | Input device with reinforcement plate and wider grounding wire |