JPH02116015A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPH02116015A JPH02116015A JP26742588A JP26742588A JPH02116015A JP H02116015 A JPH02116015 A JP H02116015A JP 26742588 A JP26742588 A JP 26742588A JP 26742588 A JP26742588 A JP 26742588A JP H02116015 A JPH02116015 A JP H02116015A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- film
- magnetic disk
- ferromagnetic metallic
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 10
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 9
- 239000010432 diamond Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000010408 film Substances 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 9
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 3
- 229910002804 graphite Inorganic materials 0.000 abstract description 2
- 239000010439 graphite Substances 0.000 abstract description 2
- 238000007737 ion beam deposition Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 229910018134 Al-Mg Inorganic materials 0.000 abstract 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 abstract 1
- 229910018467 Al—Mg Inorganic materials 0.000 abstract 1
- 230000001133 acceleration Effects 0.000 abstract 1
- 238000010923 batch production Methods 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- 150000004665 fatty acids Chemical class 0.000 description 3
- 229910021385 hard carbon Inorganic materials 0.000 description 3
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000008685 targeting Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical class 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Paints Or Removers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適する強磁性金属薄膜を磁気
記録層とする磁気ディスクに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic disk whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.
従来の技術
高密度記録を行うために、ポリ゛エチレンテレフタレー
トフィルム上にスパッタリング法でｒ Ｆ ｅ ２０
ａ薄膜を配したものや、Ｃｏ −Ｏｒ薄膜を配したも
のや、アルミ合金基板上にＧｏ−ＭＬ−１’めっき膜、
Ｃｏ−Ｎｉスパッタ膜を配した磁気ディスクの開発が盛
んで、一部は実用になっている（ Ｉ ＥＥＥＴＲＡＮ
ＳＡＣＴＩＯＮＳ ＯＮ ＭＡＧＮＥＴＩＣ８ｖｏｌ。Conventional technology In order to perform high-density recording, rFe20 is deposited on a polyethylene terephthalate film by sputtering.
A thin film, a Co-Or thin film, a Go-ML-1' plating film on an aluminum alloy substrate,
Development of magnetic disks with Co-Ni sputtered films is active, and some of them are in practical use (I EEETRAN
SACTIONS ON MAGNETIC8vol.
ＭＡＧ−２３（１９８７）２６７４）。MAG-23 (1987) 2674).
かかる媒体の実用耐久性を確保するには、Ｓｉｎ。To ensure the practical durability of such media, Sin.
５ｔＯ２，カーボン等の保護膜に各種の潤滑剤を配する
方法が多く採用されているが、より高密度化を進めてい
く上では、スペーシング損失となって目立ってくること
から、円周状に幅数ミクロン、最大粗さ１００〜１００
０Ａ の７字状の溝から成る、いわゆるテクスチャーを
形成する方法での改善が行われている〔日本応用磁気学
会、第６６回研究会資料、５ｅ−ａ（１ｅａｓ、７））
。Many methods have been adopted in which various lubricants are applied to a protective film such as 5tO2 or carbon, but as the density increases, spacing loss becomes noticeable, so circumferential width several microns, maximum roughness 100-100
Improvements have been made by a method of forming a so-called texture consisting of 0A 7-shaped grooves [Japan Society of Applied Magnetics, 66th Research Meeting Materials, 5e-a (1eas, 7)]
.
発明が解決しようとする課題
しかしながら、上記した構成では、Ｓ／Ｎ の改善度合
が十分でないといった課題があり、改善が望まれてい友
。本発明は上記した事情に鑑みなされたもので、耐久性
を確保した上でＳ／Ｎを改善した磁気ディスクを提供す
るものである。Problems to be Solved by the Invention However, the above configuration has the problem that the degree of improvement in S/N is not sufficient, and improvements are desired. The present invention was made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic disk with improved S/N while ensuring durability.
課題を解決するための手段
上記した課題を解決するため本発明の磁気ディスクは周
方向に沿ってテクスチャーを配した上にダイヤモンド薄
膜、強磁性金属薄膜を積層したものである。Means for Solving the Problems In order to solve the above problems, the magnetic disk of the present invention has a texture arranged along the circumferential direction, and a diamond thin film and a ferromagnetic metal thin film are laminated thereon.
作 用
本発明の磁気ディスクは上記した構成により、瞬間に応
力を受けても変形が殆んど起らないので、コンタクトス
タート、ストップをくり返しても、摩擦係数を良好に保
てると共に、強磁性金属薄膜の成長に対し、ダイヤモン
ド薄膜が真空度の影響の中で、ゆらぎの最大の原因とな
る水に対しての影響を減少させるのでパッチ生産での均
一性も改善されることになる。Operation Due to the above-described configuration, the magnetic disk of the present invention hardly deforms even when subjected to instantaneous stress, so even if contact starts and stops are repeated, it can maintain a good coefficient of friction, and also Uniformity in patch production is also improved because the diamond thin film reduces the influence of water, which is the biggest cause of fluctuations among the influences of the degree of vacuum, on thin film growth.
実施例
以下、図面を参照しながら本発明の一実施例について説
明する。図は本発明の一実施例の磁気ディスクの拡大断
面図である。図で１はＡ′ｌ−Ｍｑ。Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The figure is an enlarged sectional view of a magnetic disk according to an embodiment of the present invention. In the figure, 1 is A'l-Mq.
Ａｌ−８１合金等の非磁性基板で表面の平滑性を高める
次めに従来行われていたメツキ処理との組み合わせを用
いてもよい。この基板には周方向に沿ったテクスチャー
を配し友ものがよい。２はダイヤモンド薄膜でグラファ
イトをターゲットにしてのスパッタリング、イオンビー
ムデボジ７！ン。It is also possible to use a combination of a conventional plating process to improve the surface smoothness of a non-magnetic substrate such as Al-81 alloy. It is best to arrange a texture along the circumferential direction on this substrate. 2 is sputtering with diamond thin film targeting graphite, ion beam deposition 7! hmm.
ＣＨ４等のプラズマを加速する等の薄膜化手段により形
成した１ｏｏｏ人から６００ｏ人の薄膜で、ダイヤモン
ド薄膜の中には、いわゆるダイヤモンド状硬質炭素膜も
含まれるものとする。３はＣｏ。The diamond thin film includes a so-called diamond-like hard carbon film, which is a thin film with a thickness of 100 to 600 μm formed by a thinning method such as accelerating plasma such as CH4. 3 is Co.
Ｃｏ −Ｎ ｉ 、 Ｃｏ −Ｏｒ 、 Ｃｏ−Ｍｏ
、 Ｃｏ −Ｖ 、 Ｃｏ −Ｃｒ −Ｎｂ 。Co-Ni, Co-Or, Co-Mo
, Co-V, Co-Cr-Nb.
Ｃｏ−Ｃｒ−Ｎｉ、Ｃｏ−Ｎｉ−０，Ｃｏ−Ｎ１−Ｐ
等の強磁性性金属薄膜で、スパッタリング法、イオンビ
ームデポジシラン法、電子ビーム蒸着法等により形成し
、必要であれば、積層構成としてもよい。４は保護潤滑
剤層で、プラズマ重合膜ｔ ５１０２膜、カーボン膜、
脂肪酸、脂肪酸アミド、脂肪酸の金属塩、パーフルオロ
アルキルポリエーテル等の組み合わせで構成したもので
ある。Co-Cr-Ni, Co-Ni-0, Co-N1-P
The ferromagnetic metal thin film may be formed by a sputtering method, an ion beam deposited silane method, an electron beam evaporation method, etc., and may have a laminated structure if necessary. 4 is a protective lubricant layer, which includes a plasma polymerized film T5102 film, a carbon film,
It is composed of a combination of fatty acids, fatty acid amides, metal salts of fatty acids, perfluoroalkyl polyethers, etc.
以下更に具体的に本発明の実施例について比較例との対
比で詳しく説明する。Examples of the present invention will be described in more detail below in comparison with comparative examples.
厚み５ｎのＡＩ−Ｍｑ合金基板を表面研磨し平均粗さ４
０人、最大粗さ６０入とした後、研磨テープにより、深
さ１００人、幅５ミクロンの７字型溝から成る周方向に
沿ったテクスチャーを配し、実施例は、グラファイトを
ターゲットにして、Ａ ｒ ＋ Ｈ２＝＝ Ｏ−０９σ
ｏ ｒ ｒ） Ａｒ ：Ｈ２＝＝１ ：４ 、１３．
５６ＭＨｚ１．１ｋｗの条件でスパッタリングを行って
１０００人のダイヤモンド状硬質炭素膜を配し、その上
にＣｏ−Ｎ１−Ｃｒ（Ｃｏ：Ｎｉ ：Ｃｒ５ｍ７８：１
５ニアｗｔ ％ ）をターゲットにしてＡｒａ＋０
．０７Ｔｏｒｒ 、１３．５６ｋｌＨｚ ０．８ｋｗで
スパッタリングを行って、強磁性金属薄膜を１３００人
形成し、シクロヘキシルアミンをモノマーガスとして０
．ＩＴｏｒｒ２０ｋＨｚＯ，８ｋｗでプラズマ重合膜１
００人形成し、その上にパーフルオロポリエーテルとし
て市販のモンテフルオス社製の＋ｔ ７オンプリ／２−
２５”をスビイコート法で６０人配し６インチのディス
クを得たものを評価した。一方比較例は、ダイヤモンド
状硬質炭素膜を配さすに上記した手順で同じ構成条件と
なるように試作したものを用いた。The surface of an AI-Mq alloy substrate with a thickness of 5n was polished to an average roughness of 4.
After setting the roughness to 0 and the maximum roughness to 60, a polishing tape was used to create a circumferential texture consisting of 7-shaped grooves with a depth of 100 and a width of 5 microns. , A r + H2 == O-09σ
o r r) Ar :H2==1 :4, 13.
Sputtering was performed under the conditions of 56 MHz 1.1 kW to deposit 1000 diamond-like hard carbon films, and on top of that a Co-N1-Cr (Co:Ni:Cr5m78:1
Ara+0 targeting 5 near wt%)
．． A ferromagnetic metal thin film was formed by sputtering at 0.7 Torr, 13.56 klHz, and 0.8 kW, and cyclohexylamine was used as a monomer gas to form a ferromagnetic metal thin film.
．． Plasma polymerized film 1 at ITorr 20kHzO, 8kW
00 people, and on top of that, +t 7onpuri/2- manufactured by Montefluos, which is commercially available as perfluoropolyether.
A 6-inch disc was evaluated using the Subi-coat method using 60 discs.On the other hand, as a comparative example, a diamond-like hard carbon film was deposited using the same procedure as described above to obtain a 6-inch disc. was used.
夫々に試作を６回くシ返し、バラツキについても比較し
友。We each tested the prototype six times and compared the variations.
ウィンチエスタ−型のＮ ｉ −Ｚ ｎ フェライトヘ
ッドによりトラック幅２０ ｐ ｍ 、ビット長０．４
μｍを浮上量０．１μｍで記碌再生し、コンタクトスタ
ート・ストップをくり返した結果、摩擦係数は５ケのデ
ィスクの最小と最大値で記した。尚Ｓ／Ｎは実施例のう
ちの１枚のディスクをＯｄＨとした時の相対比較を行っ
た結果、実施例はＯ，＋０．２゜＋０．１ 、Ｏ，Ｏｄ
Ｂ テあツタが比較例は−０，３゜−０，５，−０，７
，−０，４，−０，４ｄＢ であツタ。Track width 20 pm, bit length 0.4 with winchiester type N i -Z n ferrite head
After recording and reproducing μm at a flying height of 0.1 μm and repeating contact start and stop, the friction coefficients were recorded as the minimum and maximum values of the five discs. The S/N ratio of the example was O, +0.2° +0.1, as a result of relative comparison when one disk in the example was OdH.
B The comparison example is -0,3° -0,5, -0,7
, -0,4, -0,4dB and ivy.
発明の効果
以上のように本発明によれば耐久性の良好でＳ／Ｈの優
れた磁気ディスクが得られるといったすぐれた効果があ
る。Effects of the Invention As described above, the present invention has excellent effects in that a magnetic disk with good durability and excellent S/H can be obtained.
図は本発明の一実施例に係る磁気ディスクの拡大断面図
である。
１・・・・・・非磁性基板、２・・・・・・ダイヤモン
ド薄膜、３・・・・・・強磁性金属薄膜。The figure is an enlarged sectional view of a magnetic disk according to an embodiment of the present invention. 1...Nonmagnetic substrate, 2...Diamond thin film, 3...Ferromagnetic metal thin film.
Claims (1)
薄膜、強磁性金属薄膜を積層したことを特徴とする磁気
ディスク。A magnetic disk characterized by a diamond thin film and a ferromagnetic metal thin film laminated on top of which a texture is arranged along the circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26742588A JPH02116015A (en) | 1988-10-24 | 1988-10-24 | Magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26742588A JPH02116015A (en) | 1988-10-24 | 1988-10-24 | Magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02116015A true JPH02116015A (en) | 1990-04-27 |
Family
ID=17444670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26742588A Pending JPH02116015A (en) | 1988-10-24 | 1988-10-24 | Magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02116015A (en) |
-
1988
- 1988-10-24 JP JP26742588A patent/JPH02116015A/en active Pending
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