JPH0211327U - - Google Patents
Info
- Publication number
- JPH0211327U JPH0211327U JP8919988U JP8919988U JPH0211327U JP H0211327 U JPH0211327 U JP H0211327U JP 8919988 U JP8919988 U JP 8919988U JP 8919988 U JP8919988 U JP 8919988U JP H0211327 U JPH0211327 U JP H0211327U
- Authority
- JP
- Japan
- Prior art keywords
- showing
- large number
- view
- vertical
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8919988U JPH0211327U (de) | 1988-07-04 | 1988-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8919988U JPH0211327U (de) | 1988-07-04 | 1988-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0211327U true JPH0211327U (de) | 1990-01-24 |
Family
ID=31313752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8919988U Pending JPH0211327U (de) | 1988-07-04 | 1988-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0211327U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009536267A (ja) * | 2006-05-05 | 2009-10-08 | アプライド マテリアルズ インコーポレイテッド | 誘電膜の原子層堆積のための化学物質の光励起のための方法および装置 |
-
1988
- 1988-07-04 JP JP8919988U patent/JPH0211327U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009536267A (ja) * | 2006-05-05 | 2009-10-08 | アプライド マテリアルズ インコーポレイテッド | 誘電膜の原子層堆積のための化学物質の光励起のための方法および装置 |