JPH0211326U - - Google Patents
Info
- Publication number
- JPH0211326U JPH0211326U JP8942588U JP8942588U JPH0211326U JP H0211326 U JPH0211326 U JP H0211326U JP 8942588 U JP8942588 U JP 8942588U JP 8942588 U JP8942588 U JP 8942588U JP H0211326 U JPH0211326 U JP H0211326U
- Authority
- JP
- Japan
- Prior art keywords
- carrier holder
- carrier
- chamber
- exhaust port
- nozzle head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8942588U JPH0211326U (xx) | 1988-07-05 | 1988-07-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8942588U JPH0211326U (xx) | 1988-07-05 | 1988-07-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0211326U true JPH0211326U (xx) | 1990-01-24 |
Family
ID=31313975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8942588U Pending JPH0211326U (xx) | 1988-07-05 | 1988-07-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0211326U (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5143217U (xx) * | 1974-09-27 | 1976-03-30 |
-
1988
- 1988-07-05 JP JP8942588U patent/JPH0211326U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5143217U (xx) * | 1974-09-27 | 1976-03-30 |