JPS6292641U - - Google Patents
Info
- Publication number
- JPS6292641U JPS6292641U JP18588985U JP18588985U JPS6292641U JP S6292641 U JPS6292641 U JP S6292641U JP 18588985 U JP18588985 U JP 18588985U JP 18588985 U JP18588985 U JP 18588985U JP S6292641 U JPS6292641 U JP S6292641U
- Authority
- JP
- Japan
- Prior art keywords
- ashing
- chamber
- chambers
- processing chamber
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18588985U JPS6292641U (xx) | 1985-12-02 | 1985-12-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18588985U JPS6292641U (xx) | 1985-12-02 | 1985-12-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6292641U true JPS6292641U (xx) | 1987-06-13 |
Family
ID=31134937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18588985U Pending JPS6292641U (xx) | 1985-12-02 | 1985-12-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6292641U (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01216534A (ja) * | 1988-02-25 | 1989-08-30 | Tokuda Seisakusho Ltd | ドライエッチング装置 |
-
1985
- 1985-12-02 JP JP18588985U patent/JPS6292641U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01216534A (ja) * | 1988-02-25 | 1989-08-30 | Tokuda Seisakusho Ltd | ドライエッチング装置 |