JPH02113256U - - Google Patents

Info

Publication number
JPH02113256U
JPH02113256U JP2243589U JP2243589U JPH02113256U JP H02113256 U JPH02113256 U JP H02113256U JP 2243589 U JP2243589 U JP 2243589U JP 2243589 U JP2243589 U JP 2243589U JP H02113256 U JPH02113256 U JP H02113256U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
pipe
surrounded
enlarged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2243589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2243589U priority Critical patent/JPH02113256U/ja
Publication of JPH02113256U publication Critical patent/JPH02113256U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2243589U 1989-02-27 1989-02-27 Pending JPH02113256U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2243589U JPH02113256U (enExample) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2243589U JPH02113256U (enExample) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113256U true JPH02113256U (enExample) 1990-09-11

Family

ID=31240555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2243589U Pending JPH02113256U (enExample) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113256U (enExample)

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