AT376044B - Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls - Google Patents

Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls

Info

Publication number
AT376044B
AT376044B AT162178A AT162178A AT376044B AT 376044 B AT376044 B AT 376044B AT 162178 A AT162178 A AT 162178A AT 162178 A AT162178 A AT 162178A AT 376044 B AT376044 B AT 376044B
Authority
AT
Austria
Prior art keywords
focusing
analyzing
charged body
body ray
ray
Prior art date
Application number
AT162178A
Other languages
English (en)
Other versions
ATA162178A (de
Inventor
Friedrich Dr Ruedenauer
Wolfgang Dr Steiger
Original Assignee
Oesterr Forsch Seibersdorf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Forsch Seibersdorf filed Critical Oesterr Forsch Seibersdorf
Priority to AT162178A priority Critical patent/AT376044B/de
Priority to DE7979100669T priority patent/DE2964883D1/de
Priority to EP19790100669 priority patent/EP0004065B1/de
Publication of ATA162178A publication Critical patent/ATA162178A/de
Application granted granted Critical
Publication of AT376044B publication Critical patent/AT376044B/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/067Ion lenses, apertures, skimmers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/022Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT162178A 1978-03-07 1978-03-07 Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls AT376044B (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT162178A AT376044B (de) 1978-03-07 1978-03-07 Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls
DE7979100669T DE2964883D1 (en) 1978-03-07 1979-03-06 Apparatus for focussing and analyzing a charged particle beam
EP19790100669 EP0004065B1 (de) 1978-03-07 1979-03-06 Einrichtung zur Fokussierung und Analyse eines geladenen Korpuskularstrahls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT162178A AT376044B (de) 1978-03-07 1978-03-07 Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls

Publications (2)

Publication Number Publication Date
ATA162178A ATA162178A (de) 1984-02-15
AT376044B true AT376044B (de) 1984-10-10

Family

ID=3517373

Family Applications (1)

Application Number Title Priority Date Filing Date
AT162178A AT376044B (de) 1978-03-07 1978-03-07 Einrichtung zur fokussierung und zur analyse eines geladenen korpuskularstrahls

Country Status (3)

Country Link
EP (1) EP0004065B1 (de)
AT (1) AT376044B (de)
DE (1) DE2964883D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111982945B (zh) * 2019-05-24 2023-04-28 北京纳米能源与系统研究所 基于超快透射电镜系统获取时间分辨暗场像的方法及应用

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679896A (en) * 1969-12-23 1972-07-25 Ibm Electrostatic prism
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem

Also Published As

Publication number Publication date
EP0004065B1 (de) 1983-02-23
EP0004065A2 (de) 1979-09-19
DE2964883D1 (en) 1983-03-31
EP0004065A3 (en) 1979-10-03
ATA162178A (de) 1984-02-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
REN Ceased due to non-payment of the annual fee