JPH02113109U - - Google Patents
Info
- Publication number
- JPH02113109U JPH02113109U JP2088989U JP2088989U JPH02113109U JP H02113109 U JPH02113109 U JP H02113109U JP 2088989 U JP2088989 U JP 2088989U JP 2088989 U JP2088989 U JP 2088989U JP H02113109 U JPH02113109 U JP H02113109U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- distance
- opposing surfaces
- mirrors
- displacement sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088989U JPH02113109U (es) | 1989-02-25 | 1989-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088989U JPH02113109U (es) | 1989-02-25 | 1989-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113109U true JPH02113109U (es) | 1990-09-11 |
Family
ID=31523972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2088989U Pending JPH02113109U (es) | 1989-02-25 | 1989-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113109U (es) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06117819A (ja) * | 1992-10-08 | 1994-04-28 | Kajima Corp | 光学的微小変位測定方法 |
| JP2011196899A (ja) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | 内径測定装置 |
| JP2015036169A (ja) * | 2013-08-13 | 2015-02-23 | 株式会社ディスコ | 研削装置 |
| JP2020148632A (ja) * | 2019-03-13 | 2020-09-17 | 株式会社Ｘｔｉａ | 内径測定装置 |
-
1989
- 1989-02-25 JP JP2088989U patent/JPH02113109U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06117819A (ja) * | 1992-10-08 | 1994-04-28 | Kajima Corp | 光学的微小変位測定方法 |
| JP2011196899A (ja) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | 内径測定装置 |
| JP2015036169A (ja) * | 2013-08-13 | 2015-02-23 | 株式会社ディスコ | 研削装置 |
| JP2020148632A (ja) * | 2019-03-13 | 2020-09-17 | 株式会社Ｘｔｉａ | 内径測定装置 |
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