JPH02113109U - - Google Patents
Info
- Publication number
- JPH02113109U JPH02113109U JP2088989U JP2088989U JPH02113109U JP H02113109 U JPH02113109 U JP H02113109U JP 2088989 U JP2088989 U JP 2088989U JP 2088989 U JP2088989 U JP 2088989U JP H02113109 U JPH02113109 U JP H02113109U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- distance
- opposing surfaces
- mirrors
- displacement sensors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図はこの考案の一実施例の変位測定器を示
す図である。第２図はこの考案の一実施例の電気
的構成を示す概略ブロツク図である。第３Ａ図は
、対向する２面間の距離を演算する方法を説明す
るための図である。第３Ｂ図は第３Ａ図の側面図
である。第４Ａ図はこの考案の他の実施例を示す
図である。第４Ｂ図は第４Ａ図の側面図である。
第５図はミラーによる反射光を説明するための図
である。第６Ａ図および第６Ｂ図は位置検出素子
上に生じる光点およびゴーストを説明するための
図である。第７図は三角測距法を用いた被測定物
体の変位を測定する原理を示す図である。
図において、１は変位測定器、２は取付部材、
３および４は変位センサ、５および６はミラー、
７および８は被測定対象面、２１は半導体レーザ
、２２は投光レンズ、２５は集光レンズ、２６は
位置検出素子、３０はコントローラ、３１は発振
回路、３２はドライバ、３３および３４は増幅回
路、３５は加算回路、３６は減算回路、３７は除
算回路、３８は補正回路を示す。
FIG. 1 is a diagram showing a displacement measuring device according to an embodiment of this invention. FIG. 2 is a schematic block diagram showing the electrical configuration of one embodiment of this invention. FIG. 3A is a diagram for explaining a method of calculating the distance between two opposing surfaces. FIG. 3B is a side view of FIG. 3A. FIG. 4A shows another embodiment of this invention. FIG. 4B is a side view of FIG. 4A.
FIG. 5 is a diagram for explaining light reflected by a mirror. FIGS. 6A and 6B are diagrams for explaining light spots and ghosts that occur on the position detection element. FIG. 7 is a diagram showing the principle of measuring the displacement of an object to be measured using triangulation. In the figure, 1 is a displacement measuring device, 2 is a mounting member,
3 and 4 are displacement sensors, 5 and 6 are mirrors,
7 and 8 are the surfaces to be measured, 21 is a semiconductor laser, 22 is a light projection lens, 25 is a condensing lens, 26 is a position detection element, 30 is a controller, 31 is an oscillation circuit, 32 is a driver, 33 and 34 are amplification 35 is an addition circuit, 36 is a subtraction circuit, 37 is a division circuit, and 38 is a correction circuit.
Claims (1)
が可能な変位測定器であつて、 前記対向する２面間に挿入されたとき、それぞ
れが所定の角度で前記対向する２面の各々に向き
合うように配置された１対のミラーと、 前記１対のミラーに対向するようにして、前記
１対のミラーから所定間隔を隔てて配置された１
対の変位センサとを備え、 前記１対の変位センサの各々は、 測定用光を前記１対のミラーの対応する一方に
出射するための測定用光出射手段と、 前記測定用光が前記ミラーにより前記対向する
２面の一方に入射されて当該面で反射されたとき
、その反射光を前記ミラーを介して受け得るよう
に設けられた受光手段とを含み、 前記１対の変位センサに設けられた前記各受光
手段で受光された反射光の受光位置および前記１
対の変位センサ間の距離に基づいて、前記対向す
る２面間の距離または距離の変化を測定するよう
にした、変位測定器。[Claims for Utility Model Registration] A displacement measuring device capable of measuring the distance or change in distance between two opposing surfaces, which when inserted between the two opposing surfaces, each of the two opposing surfaces has a displacement measuring device that measures the distance between the two opposing surfaces at a predetermined angle. a pair of mirrors disposed to face each of the two opposing surfaces; and a mirror disposed facing the pair of mirrors and spaced apart from the pair of mirrors by a predetermined distance.
and a pair of displacement sensors, each of the pair of displacement sensors comprising: measurement light emitting means for emitting measurement light to a corresponding one of the pair of mirrors; and a light receiving means provided in the pair of displacement sensors so as to receive the reflected light through the mirror when the light is incident on one of the two opposing surfaces and reflected by the surface, and the light receiving means is provided in the pair of displacement sensors. and the light receiving position of the reflected light received by each of the light receiving means and the above 1.
A displacement measuring instrument configured to measure a distance or a change in distance between the two opposing surfaces based on a distance between a pair of displacement sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088989U JPH02113109U (en) | 1989-02-25 | 1989-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088989U JPH02113109U (en) | 1989-02-25 | 1989-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113109U true JPH02113109U (en) | 1990-09-11 |
Family
ID=31523972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2088989U Pending JPH02113109U (en) | 1989-02-25 | 1989-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113109U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06117819A (en) * | 1992-10-08 | 1994-04-28 | Kajima Corp | Optical measuring method of minute displacement |
| JP2011196899A (en) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | Inner diameter measuring device |
| JP2015036169A (en) * | 2013-08-13 | 2015-02-23 | 株式会社ディスコ | Grinding device |
| JP2020148632A (en) * | 2019-03-13 | 2020-09-17 | 株式会社Ｘｔｉａ | Inner diameter measuring apparatus |
-
1989
- 1989-02-25 JP JP2088989U patent/JPH02113109U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06117819A (en) * | 1992-10-08 | 1994-04-28 | Kajima Corp | Optical measuring method of minute displacement |
| JP2011196899A (en) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | Inner diameter measuring device |
| JP2015036169A (en) * | 2013-08-13 | 2015-02-23 | 株式会社ディスコ | Grinding device |
| JP2020148632A (en) * | 2019-03-13 | 2020-09-17 | 株式会社Ｘｔｉａ | Inner diameter measuring apparatus |
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