JPH02112327U - - Google Patents

Info

Publication number
JPH02112327U
JPH02112327U JP1918889U JP1918889U JPH02112327U JP H02112327 U JPH02112327 U JP H02112327U JP 1918889 U JP1918889 U JP 1918889U JP 1918889 U JP1918889 U JP 1918889U JP H02112327 U JPH02112327 U JP H02112327U
Authority
JP
Japan
Prior art keywords
raw material
sealed chamber
liquid raw
chamber
extended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1918889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0725225Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989019188U priority Critical patent/JPH0725225Y2/ja
Publication of JPH02112327U publication Critical patent/JPH02112327U/ja
Application granted granted Critical
Publication of JPH0725225Y2 publication Critical patent/JPH0725225Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
JP1989019188U 1989-02-20 1989-02-20 蒸発気体定量取出装置 Expired - Lifetime JPH0725225Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989019188U JPH0725225Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989019188U JPH0725225Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Publications (2)

Publication Number Publication Date
JPH02112327U true JPH02112327U (enExample) 1990-09-07
JPH0725225Y2 JPH0725225Y2 (ja) 1995-06-07

Family

ID=31234480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989019188U Expired - Lifetime JPH0725225Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Country Status (1)

Country Link
JP (1) JPH0725225Y2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0747201A (ja) * 1993-08-06 1995-02-21 Toshiba Corp 気化装置
CN114269965A (zh) * 2019-08-27 2022-04-01 东京毅力科创株式会社 原料气体供给系统和原料气体供给方法
WO2022075111A1 (ja) * 2020-10-07 2022-04-14 東京エレクトロン株式会社 気化装置、ガス供給装置及びガス供給装置の制御方法
JP2023109092A (ja) * 2022-01-26 2023-08-07 古河電気工業株式会社 気化装置及び気化方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261864A (ja) * 1986-05-06 1987-11-14 三菱電機株式会社 ヒ−トポンプ装置
JPS63108102A (ja) * 1986-10-25 1988-05-13 バブコツク日立株式会社 脱気装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261864A (ja) * 1986-05-06 1987-11-14 三菱電機株式会社 ヒ−トポンプ装置
JPS63108102A (ja) * 1986-10-25 1988-05-13 バブコツク日立株式会社 脱気装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0747201A (ja) * 1993-08-06 1995-02-21 Toshiba Corp 気化装置
CN114269965A (zh) * 2019-08-27 2022-04-01 东京毅力科创株式会社 原料气体供给系统和原料气体供给方法
WO2022075111A1 (ja) * 2020-10-07 2022-04-14 東京エレクトロン株式会社 気化装置、ガス供給装置及びガス供給装置の制御方法
JP2022061803A (ja) * 2020-10-07 2022-04-19 東京エレクトロン株式会社 気化装置、ガス供給装置及びガス供給装置の制御方法
JP2023109092A (ja) * 2022-01-26 2023-08-07 古河電気工業株式会社 気化装置及び気化方法

Also Published As

Publication number Publication date
JPH0725225Y2 (ja) 1995-06-07

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