JPH033734U - - Google Patents
Info
- Publication number
- JPH033734U JPH033734U JP1989064670U JP6467089U JPH033734U JP H033734 U JPH033734 U JP H033734U JP 1989064670 U JP1989064670 U JP 1989064670U JP 6467089 U JP6467089 U JP 6467089U JP H033734 U JPH033734 U JP H033734U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- liquid raw
- vaporization section
- sealed chamber
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064670U JPH0742481Y2 (ja) | 1989-06-01 | 1989-06-01 | 蒸発器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989064670U JPH0742481Y2 (ja) | 1989-06-01 | 1989-06-01 | 蒸発器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH033734U true JPH033734U (enExample) | 1991-01-16 |
| JPH0742481Y2 JPH0742481Y2 (ja) | 1995-10-04 |
Family
ID=31595821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989064670U Expired - Lifetime JPH0742481Y2 (ja) | 1989-06-01 | 1989-06-01 | 蒸発器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742481Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291601A (ja) * | 1987-05-21 | 1988-11-29 | Mitsubishi Electric Corp | 液体材料制御装置 |
-
1989
- 1989-06-01 JP JP1989064670U patent/JPH0742481Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291601A (ja) * | 1987-05-21 | 1988-11-29 | Mitsubishi Electric Corp | 液体材料制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0742481Y2 (ja) | 1995-10-04 |