JPH02112303U - - Google Patents

Info

Publication number
JPH02112303U
JPH02112303U JP2669289U JP2669289U JPH02112303U JP H02112303 U JPH02112303 U JP H02112303U JP 2669289 U JP2669289 U JP 2669289U JP 2669289 U JP2669289 U JP 2669289U JP H02112303 U JPH02112303 U JP H02112303U
Authority
JP
Japan
Prior art keywords
flow path
filter
inlet side
predetermined value
circulation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2669289U
Other languages
English (en)
Other versions
JP2513375Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989026692U priority Critical patent/JP2513375Y2/ja
Publication of JPH02112303U publication Critical patent/JPH02112303U/ja
Application granted granted Critical
Publication of JP2513375Y2 publication Critical patent/JP2513375Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図及び第２図はそれぞれ本考案の１実施例
装置の構成を示す概略図、第３図は処理液の温度
と粘度の関係を例示するグラフ、第４図は従来の
処理液循環装置の構成を示す概略図である。 １……処理槽、２……ヒーター、４……ポンプ
、６……フイルタ、１１……処理槽、１２……ヒ
ーター、１４……ポンプ、１６……フイルタ、１
９……リリーフ弁、２１……オーバーフロー槽、
２２……隔壁。

Claims (1)

  1. 【実用新案登録請求の範囲】 常温で高粘度の処理液を、所定温度に昇温し、
    ポンプにより濾過用のフイルタを通る主流路に循
    環させるようにした処理液循環装置において、 フイルタの入口側もしくはポンプとフイルタの
    と入口側との間において、主流路から分岐するバ
    イパス流路を付設し、該バイパス流路の適所に、
    バイパス流路に加わる流体圧が所定値以下である
    場合には閉止し、該所定値を超えた場合に開放さ
    れるリリーフ弁を設けてなる処理液循環装置。
JP1989026692U 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置 Expired - Lifetime JP2513375Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989026692U JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP27076188 1988-10-28
JP63-270761 1988-10-28
JP1989026692U JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Publications (2)

Publication Number Publication Date
JPH02112303U true JPH02112303U (ja) 1990-09-07
JP2513375Y2 JP2513375Y2 (ja) 1996-10-02

Family

ID=31497357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989026692U Expired - Lifetime JP2513375Y2 (ja) 1988-10-28 1989-03-10 高粘度処理液による基板処理装置における処理液循環装置

Country Status (1)

Country Link
JP (1) JP2513375Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06236869A (ja) * 1993-01-22 1994-08-23 Nec Corp ウェットエッチング装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879357A (ja) * 1972-01-27 1973-10-24
JPS5347421U (ja) * 1976-09-27 1978-04-21
JPS5676013U (ja) * 1979-11-16 1981-06-20

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352737A (en) * 1977-05-16 1978-05-13 Kyushu Refractories Rutile type titanium dioxide fiber and its manufacture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4879357A (ja) * 1972-01-27 1973-10-24
JPS5347421U (ja) * 1976-09-27 1978-04-21
JPS5676013U (ja) * 1979-11-16 1981-06-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06236869A (ja) * 1993-01-22 1994-08-23 Nec Corp ウェットエッチング装置

Also Published As

Publication number Publication date
JP2513375Y2 (ja) 1996-10-02

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