JPH02110679U - - Google Patents
Info
- Publication number
- JPH02110679U JPH02110679U JP1965089U JP1965089U JPH02110679U JP H02110679 U JPH02110679 U JP H02110679U JP 1965089 U JP1965089 U JP 1965089U JP 1965089 U JP1965089 U JP 1965089U JP H02110679 U JPH02110679 U JP H02110679U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafer
- vapor phase
- attached
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1965089U JPH02110679U (en:Method) | 1989-02-23 | 1989-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1965089U JPH02110679U (en:Method) | 1989-02-23 | 1989-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110679U true JPH02110679U (en:Method) | 1990-09-04 |
Family
ID=31235347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1965089U Pending JPH02110679U (en:Method) | 1989-02-23 | 1989-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110679U (en:Method) |
-
1989
- 1989-02-23 JP JP1965089U patent/JPH02110679U/ja active Pending
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