JPH02110671U - - Google Patents
Info
- Publication number
- JPH02110671U JPH02110671U JP1905389U JP1905389U JPH02110671U JP H02110671 U JPH02110671 U JP H02110671U JP 1905389 U JP1905389 U JP 1905389U JP 1905389 U JP1905389 U JP 1905389U JP H02110671 U JPH02110671 U JP H02110671U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- electrode plate
- plasma
- bring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1905389U JPH02110671U (cs) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1905389U JPH02110671U (cs) | 1989-02-20 | 1989-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110671U true JPH02110671U (cs) | 1990-09-04 |
Family
ID=31234225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1905389U Pending JPH02110671U (cs) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110671U (cs) |
-
1989
- 1989-02-20 JP JP1905389U patent/JPH02110671U/ja active Pending
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