JPH02109941U - - Google Patents

Info

Publication number
JPH02109941U
JPH02109941U JP1807189U JP1807189U JPH02109941U JP H02109941 U JPH02109941 U JP H02109941U JP 1807189 U JP1807189 U JP 1807189U JP 1807189 U JP1807189 U JP 1807189U JP H02109941 U JPH02109941 U JP H02109941U
Authority
JP
Japan
Prior art keywords
air
air conditioner
room
forming device
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1807189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH065541Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989018071U priority Critical patent/JPH065541Y2/ja
Publication of JPH02109941U publication Critical patent/JPH02109941U/ja
Application granted granted Critical
Publication of JPH065541Y2 publication Critical patent/JPH065541Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP1989018071U 1989-02-17 1989-02-17 空気調和設備 Expired - Lifetime JPH065541Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989018071U JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989018071U JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Publications (2)

Publication Number Publication Date
JPH02109941U true JPH02109941U (pt) 1990-09-03
JPH065541Y2 JPH065541Y2 (ja) 1994-02-09

Family

ID=31232385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989018071U Expired - Lifetime JPH065541Y2 (ja) 1989-02-17 1989-02-17 空気調和設備

Country Status (1)

Country Link
JP (1) JPH065541Y2 (pt)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317048A (ja) * 2005-05-11 2006-11-24 Takenaka Komuten Co Ltd クリーンルーム
JP2012507321A (ja) * 2008-10-31 2012-03-29 エアソネット アーベー 手術室の換気装置およびその方法
WO2019176424A1 (ja) * 2018-03-15 2019-09-19 信越半導体株式会社 シリコン多結晶充填作業用のクリーンブース

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317048A (ja) * 2005-05-11 2006-11-24 Takenaka Komuten Co Ltd クリーンルーム
JP2012507321A (ja) * 2008-10-31 2012-03-29 エアソネット アーベー 手術室の換気装置およびその方法
WO2019176424A1 (ja) * 2018-03-15 2019-09-19 信越半導体株式会社 シリコン多結晶充填作業用のクリーンブース
JP2019156694A (ja) * 2018-03-15 2019-09-19 信越半導体株式会社 シリコン多結晶充填作業用のクリーンブース

Also Published As

Publication number Publication date
JPH065541Y2 (ja) 1994-02-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term