JPH02108908A - Measuring method for thickness of body to be measured with coating - Google Patents

Measuring method for thickness of body to be measured with coating

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Publication number
JPH02108908A
JPH02108908A JP26064388A JP26064388A JPH02108908A JP H02108908 A JPH02108908 A JP H02108908A JP 26064388 A JP26064388 A JP 26064388A JP 26064388 A JP26064388 A JP 26064388A JP H02108908 A JPH02108908 A JP H02108908A
Authority
JP
Japan
Prior art keywords
measured
reflected wave
thickness
signal
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26064388A
Other languages
Japanese (ja)
Other versions
JP2812688B2 (en
Inventor
Osamu Takahashi
修 高橋
Masaaki Nakada
正明 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN PUROOBU KK
Toyo Kanetsu KK
Original Assignee
JAPAN PUROOBU KK
Toyo Kanetsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN PUROOBU KK, Toyo Kanetsu KK filed Critical JAPAN PUROOBU KK
Priority to JP26064388A priority Critical patent/JP2812688B2/en
Publication of JPH02108908A publication Critical patent/JPH02108908A/en
Application granted granted Critical
Publication of JP2812688B2 publication Critical patent/JP2812688B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

PURPOSE:To securely lead out a border surface reflected wave required to measure the thickness of the body to be measured by receiving a surface reflected wave and the border surface reflected wave by a 1st transmission-side member. CONSTITUTION:An ultrasonic probe 2 is constituted by arranging a transmission member (1st member) 5 which has a transmission and reception function for ultrasonic wave pulses and a receiving member (2nd member) 6 successively in a case 4 and also arranging an acoustic partition plate 7 between the both. An ultrasonic wave pulse generator 21 generates an ultrasonic wave pulse generation signal to send ultrasonic wave pulses out of the member 5. Some of the ultrasonic wave pulses are reflected by the surface of the coating 9 first. The surface reflected wave is cut off by the partition plate 7, hardly propagated to the member 6, and received mainly by the member 5. Some of ultrasonic wave pulses passed through the coating 9 are reflected by the border surface between the coating 9 and body 10 to be measured and the majority of them are received by the member 5 as well as the surface reflected wave. Consequently, the reception level of the border surface reflected wave is large and the signal can securely be extracted.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、コーティングが施された被測定物の真の厚さ
をコーティング上から測定するための厚さ測定方法に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a thickness measuring method for measuring the true thickness of a coated object from above the coating.

[従来の技術] コーティングが施された鋼板等の被測定物の厚さを測定
する場合、コーティングを剥がした後に適当な厚さ測定
装置を用いて測定するのが一般的な方法である。しかし
ながら、コーティングの除去及び再塗装は非常に手間の
かかる作業であるために、被測定物をコーティング付き
のままで測定できる手段が従来から色々と考えられてい
る。
[Prior Art] When measuring the thickness of a coated object such as a steel plate, the general method is to peel off the coating and then measure using an appropriate thickness measuring device. However, since removing the coating and repainting it is a very time-consuming task, various means have been considered in the past that can measure the object to be measured with the coating still attached.

例えば第5図に示す厚さ測定装置は超音波パルスの反射
を利用して被測定物の厚さを測定するものであり、コー
ティング付被測定物1に密着される超音波探触子2と、
超音波探触子2がらの信号により厚さを測定する厚さ測
定器3とがら成っている−0この装置に用いられる超音
波探触子2はいわゆる分割形と呼ばれるものであり、円
筒形のケース4内に互いに並設された超音波パルスの送
信部材5と受信部材6を有している。送信部材5と受信
部材6との間には、送信部材5から超音波パルスが受信
部材6に直接伝播しないように、音響仕切板7が設けら
れており、これはケース4の開口面まで延びている。ま
た、ケース4内には遅延材8が充填されている。このよ
うな超音波探触子2は、その端面をコーティング付被測
定物1の表面に密着させることにより用いられ、送信部
材5から超音波パルスを発すると、該パルスはコーティ
ングつと被測定物10との境界面、及び被測定物10の
底面にて反射され、これらの反射波が受信部材6により
受信され、その受信信号が厚さ測定器3に送られる。そ
して、この境界面反射波及び底面反射波の信号を利用し
て厚さ測定器3内でこれらの受信時刻の差により板厚を
算出しようとするものである。
For example, the thickness measuring device shown in FIG. 5 measures the thickness of the object to be measured using the reflection of ultrasonic pulses, and includes an ultrasonic probe 2 that is brought into close contact with the coated object 1, and ,
The ultrasonic probe 2 used in this device is a so-called split type, and is a cylindrical type. A case 4 includes an ultrasonic pulse transmitting member 5 and a receiving member 6 arranged in parallel with each other. An acoustic partition plate 7 is provided between the transmitting member 5 and the receiving member 6 to prevent the ultrasonic pulses from directly propagating from the transmitting member 5 to the receiving member 6, and this partition plate 7 extends to the opening surface of the case 4. ing. Further, the case 4 is filled with a delay material 8. Such an ultrasonic probe 2 is used by bringing its end face into close contact with the surface of the coated object to be measured 1, and when an ultrasonic pulse is emitted from the transmitting member 5, the pulse is transmitted to the coated object to be measured 10. These reflected waves are received by the receiving member 6, and the received signal is sent to the thickness measuring device 3. Then, using the signals of the boundary surface reflected wave and the bottom surface reflected wave, the thickness of the plate is calculated in the thickness measuring device 3 from the difference in reception time.

また、別の方法としては、底面反射波の多重反射波を利
用するいわゆるB、−82方式がある。このB、−82
方式は、第6図に示すように、最初に被測定物10の底
面で反射された底面反射波(第1底面反射波)と、第1
底面反射波の一部がコーティングつと被測定物10との
境界面を透過せずに反射され再び被測定物10の底面で
反射された底面反射波(第2底面反射波)との受信部材
6による受信時刻の差を測定することにより板厚を求め
る方法でである。
Further, as another method, there is a so-called B, -82 method that utilizes multiple reflected waves of bottom surface reflected waves. This B, -82
The method, as shown in FIG.
A part of the bottom surface reflected wave is reflected without passing through the interface between the coating and the object to be measured 10 and is reflected again at the bottom surface of the object to be measured 10 (second bottom surface reflected wave). This method calculates the plate thickness by measuring the difference in reception times.

[発明が解決しようとする問題点] しかしながら、前述した従来の厚さ測定方法には以下に
示す問題点がある。
[Problems to be Solved by the Invention] However, the conventional thickness measuring method described above has the following problems.

まず、境界面及び底面の反射波を利用する方法は、超音
波探触子2の音響仕切板7がコーティング付被測定物1
の表面に接するので、境界面反射波の受信レベルが低く
、測定誤差が生じやすいという問題点がある。即ち、境
界面反射波による信号を取り出すためには大幅な増幅が
必要とされ、増幅による誤差を無視できなくなる場合が
あり、同時に測定誤差の原因となる雑音(境界面反射波
のコーティング9内での多重反射波、表面反射波等を含
む)も拾い易くなるのである。従って、特にコーティン
グが薄い場合、境界面反射波による信号を選択して確実
に取り出すことは難しく、被測定物10の真の板厚を正
確に求めることは困難であった。
First, in a method using reflected waves from the boundary surface and the bottom surface, the acoustic partition plate 7 of the ultrasonic probe 2 is
Since the interface is in contact with the surface of the interface, there is a problem that the reception level of the interface reflected wave is low and measurement errors are likely to occur. In other words, significant amplification is required to extract the signal due to the boundary surface reflected wave, and the error caused by the amplification may not be negligible. (including multiple reflected waves, surface reflected waves, etc.) is also easier to pick up. Therefore, especially when the coating is thin, it is difficult to select and reliably extract signals due to interface reflected waves, and it is difficult to accurately determine the true thickness of the object to be measured 10.

他方、B、−B2方式では、上述した如き境界面反射波
の取出しに伴う問題は生じないが、第7図のようにコー
ティング付被測定物1の底面に腐食部11が存在する場
合には、条件によっては受信部材6から出力される信号
に腐食部11の反射波による信号f2、その多重反射波
f2、及び底面反射波信号B、が混在し、これらを区別
することができず、被測定物10の厚さを正確に測定す
ることが不可能となる。
On the other hand, in the B and -B2 methods, the above-mentioned problems associated with extracting the interface reflected waves do not occur, but when there is a corroded part 11 on the bottom surface of the coated object 1 as shown in FIG. Depending on the conditions, the signal f2 due to the reflected wave from the corroded part 11, its multiple reflected wave f2, and the bottom surface reflected wave signal B are mixed in the signal output from the receiving member 6, and it is not possible to distinguish between them. It becomes impossible to accurately measure the thickness of the measurement object 10.

従って、本発明の目的はかかる問題点を解決することに
ある。
Therefore, an object of the present invention is to solve such problems.

[課題を解決するための手段] 前記目的を達成するために、本発明は、超音波パルスの
送信及び受信が可能な第1の部材と、少なくとも超音波
パルスの受信が可能な第2の部材とが音響仕切板を隔て
て並設されている分割形の超音波探触子を用い、コーテ
ィング付被測定物の被測定物のみの厚さを測定する厚さ
測定方法であって、前記超音波探触子の前記第1の部材
から超音波パルスを発すると共に、コーティング表面に
よる表面反射波、及びコーティングと被測定物との間の
境界面による境界面反射波を前記第1の部材により受信
し、前記第1の部材により受信された信号から前記境界
面反射波の信号のみを取り出して計時スタート信号とし
、他方、前記超音波探触子の前記第2の部材により被測
定物の底面による底面反射波を受信して計時ストップ信
号とし、前記計時スタート信号と前記計時ストップ信号
とから被測定物の厚さを算出することを特徴としている
[Means for Solving the Problems] In order to achieve the above object, the present invention provides a first member capable of transmitting and receiving ultrasonic pulses, and a second member capable of receiving at least ultrasonic pulses. A thickness measuring method in which the thickness of only the coated object to be measured is measured using split-type ultrasonic probes arranged in parallel with an acoustic partition plate in between. The first member of the sonic probe emits an ultrasonic pulse, and the first member receives a surface reflected wave from the coating surface and an interface reflected wave from the interface between the coating and the object to be measured. Then, only the signal of the boundary surface reflected wave is extracted from the signal received by the first member and used as a timing start signal, and on the other hand, the second member of the ultrasonic probe detects the signal from the bottom surface of the object to be measured. It is characterized in that the bottom reflected wave is received as a clock stop signal, and the thickness of the object to be measured is calculated from the clock start signal and the clock stop signal.

[作用〕 本発明によれば、表面反射波及び境界面反射波を送信側
の第1の部材により受信させることにより、これらの反
射波の受信レベルが高レベルとなり、被測定物の厚さ測
定に必要な境界面反射波を確実に収り出すことができる
[Function] According to the present invention, by receiving the surface reflected waves and the boundary surface reflected waves by the first member on the transmitting side, the reception level of these reflected waves becomes high, and it is possible to measure the thickness of the object to be measured. It is possible to reliably collect the necessary boundary surface reflected waves.

[実施例] 以下、図面と共に本発明の好適な実施例について詳細に
説明するが、図中、同−又は相当部分には同一符号を用
いることとする。
[Embodiments] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings, in which the same reference numerals are used for the same or corresponding parts.

図面の第1図は本発明の測定方法を実施するための装置
の一例を示している。符号2は従来一般に用いられてい
る分割形の超音波探触子であり、超音波パルスを発する
送信部材(第1の部材)5と、受信を行う受信部材(第
2の部材)6とがケース4内に並設され、両者間には音
響仕切板7が配置されている0通常、これらの部材5.
6は振動子と呼ばれるものから成り、送信及び受信の両
方の機能を有している。本発明では、送信部材5におい
て超音波パルスの送信と受信を行うように回路構成がな
されている6尚、以下の説明では、送信部材を送受信部
材と称する。また、符号20は超音波探触子2に接続さ
れた厚さ測定器である。
FIG. 1 of the drawings shows an example of an apparatus for carrying out the measuring method of the present invention. Reference numeral 2 designates a conventionally commonly used split-type ultrasonic probe, which consists of a transmitting member (first member) 5 that emits ultrasonic pulses and a receiving member (second member) 6 that receives the ultrasonic pulses. Normally, these members 5.
6 consists of what is called a vibrator, and has both transmitting and receiving functions. In the present invention, the circuit configuration is such that the transmitting member 5 transmits and receives ultrasonic pulses.6 In the following description, the transmitting member will be referred to as a transmitting/receiving member. Further, reference numeral 20 is a thickness measuring device connected to the ultrasonic probe 2.

かかる装置を用いてコーティング付被測定物1の厚さを
測定する場合、まず、コーティング9の表面にグリセリ
ン等の接触媒質を塗布し超音波探触子2の開口面を密着
させる。
When measuring the thickness of the coated object to be measured 1 using such an apparatus, first, a couplant such as glycerin is applied to the surface of the coating 9, and the opening surface of the ultrasonic probe 2 is brought into close contact with the surface of the coating 9.

超音波探触子2の送受信部材5は厚さ測定器20の超音
波パルス発生器21に接続されており、この超音波パル
ス発生器21は原発振器22からの一定周期の矩形パル
スを受けることにより超音波パルス発生信号を発し、送
受信部材5から一定の周期で超音波パルスを送信させる
。送受信部材5から発せられた超音波パルスの一部は、
まず、コーティング9の表面で反射される。この表面反
射波は、音響仕切板7により遮られ受信部材6には殆ど
伝播されず、主に送受信部材5により受信される。
The transmitting/receiving member 5 of the ultrasonic probe 2 is connected to the ultrasonic pulse generator 21 of the thickness measuring device 20, and this ultrasonic pulse generator 21 receives rectangular pulses of a constant period from the original oscillator 22. An ultrasonic pulse generation signal is generated, and the ultrasonic pulse is transmitted from the transmitting/receiving member 5 at a constant period. A part of the ultrasonic pulse emitted from the transmitting/receiving member 5 is
First, it is reflected by the surface of the coating 9. This surface reflected wave is blocked by the acoustic partition plate 7, hardly propagates to the receiving member 6, and is mainly received by the transmitting/receiving member 5.

また、コーティング9を通過した超音波パルスの一部は
、コーティング9と被測定物10との境界面で反射され
、この境界面反射波の大部分が表面反射波と同様に送受
信部材5で受信される0表面反q(波及び境界面反射波
を受信した送受信部材5からの信号■は厚さ測定器20
の表面反射波アンプ23に送られる(第2図■)8表面
反射波アンプ23において、オートゲインコントロール
24によりオートゲインコントロール電圧(本実施例で
は負の一定電圧)が信号■に加えられ、第2図■に示す
ように適当なレベルに調整される0次いで、この調整さ
れた信号■は境界面反射波セレクタ25に入力される。
Further, a part of the ultrasonic pulse that has passed through the coating 9 is reflected at the interface between the coating 9 and the object to be measured 10, and most of the waves reflected from the interface are received by the transmitting/receiving member 5 like the surface reflected waves. The signal ■ from the transmitting/receiving member 5 which received the 0 surface reflection q (wave and the boundary surface reflected wave) is sent to the thickness measuring device 20.
(Fig. 2) 8 In the surface reflected wave amplifier 23, an auto gain control voltage (a constant negative voltage in this embodiment) is added to the signal (2) by the auto gain control 24. The signal 0 is adjusted to an appropriate level as shown in FIG.

境界面反射波セレクタ25では、コーティング9の厚さ
に応じて第2図■の如く予め設定されたゲート信号■を
セレクタゲート回路26から受け、表面反射波及び境界
面反射波に対応する信号■が出力される(第2図■)、
そして、レベル設定回路27で、レベル設定値(第2図
■)を越える信号、即ち境界面反射波に対応する信号■
のみが取り出され、この信号■に基づいて板厚測定のた
めの計時スタート信号■がスター1へ信号発生回路28
で形成される(第2図■1■)。
The boundary surface reflected wave selector 25 receives a gate signal 2 preset as shown in FIG. is output (Fig. 2 ■),
Then, in the level setting circuit 27, a signal exceeding the level setting value (Fig. 2), that is, a signal ■ corresponding to the boundary surface reflected wave.
Based on this signal ■, a timing start signal ■ for plate thickness measurement is sent to the signal generating circuit 28 to star 1.
It is formed by (Fig. 2 ■1 ■).

また、送受信部材5から発せられた超音波パルスの他の
部分は、コーティング9及び被測定物10を伝播して被
測定物10の底面で反射し、その底面反射波は受信部材
6により受信される。この受信信号[F]は厚さ測定器
ZOの底面反射波アンプ29を通り、オートゲインコン
トロール30により調整された後、底面反射波セレクタ
31に入力される (第2図■、■)0次いで、信号■
は、底面反射波セレクタ31においてセレクタゲート回
路32からのゲート信号[株]により信号0に変換され
(第2図[相]、■)、レベル設定回路33にてレベル
設定値(第2図0)に基づき底面反射波に対応する信号
[相]が取り出される(第21”J@)、この後、信号
■はストップ信号発生回路34で計時ストップ信号■と
して出力される(第2図■)。
The other part of the ultrasonic pulse emitted from the transmitting/receiving member 5 propagates through the coating 9 and the object to be measured 10 and is reflected at the bottom surface of the object to be measured 10, and the bottom reflected wave is received by the receiving member 6. Ru. This received signal [F] passes through the bottom reflected wave amplifier 29 of the thickness measuring instrument ZO, is adjusted by the auto gain control 30, and is then input to the bottom reflected wave selector 31 (Fig. 2 ■, ■). , signal■
is converted into a signal 0 by the gate signal [share] from the selector gate circuit 32 in the bottom reflected wave selector 31 (Fig. 2 [phase], ■), and the level setting circuit 33 converts it into a signal 0 (Fig. 2 [phase], ■). ), the signal [phase] corresponding to the bottom surface reflected wave is extracted (No. 21"J@). After this, the signal ■ is output as the timing stop signal ■ by the stop signal generation circuit 34 (Fig. 2 ■) .

計時スタート信号■と計時ストップ信号■はフリップフ
ロップ回路35に入力され、フリ117071回路35
7J′−らは、第2図■から理解されるように境界面反
射波の受信時刻から底面反射波の受信時刻までの時間に
相当する信号■が出力される。
The timing start signal ■ and the timing stop signal ■ are input to the flip-flop circuit 35, and the flip-flop circuit 35
7J' and the like output a signal (2) corresponding to the time from the reception time of the boundary surface reflected wave to the reception time of the bottom surface reflection wave, as understood from FIG. 2 (2).

これを計時・演算回路36で計時すると共に、被測定物
10中の超音波の伝播速度に基づいて演算処理すること
で、被測定物10の真の厚さが算出され、その値が測定
値表示部37に表示される。
The true thickness of the object to be measured 10 is calculated by counting this in the timing/arithmetic circuit 36 and performing arithmetic processing based on the propagation velocity of the ultrasonic wave in the object to be measured 10, and that value is used as the measured value. It is displayed on the display section 37.

第3図は広帯域特性を有する超音波探触子を用いて本発
明による厚さ測定を行った場合における送受信部材5で
の受信信号と受信部材6での受信信号の波形を示すオシ
ロスコープの写真である。
FIG. 3 is an oscilloscope photograph showing the waveforms of the received signal at the transmitting/receiving member 5 and the receiving signal at the receiving member 6 when thickness measurement according to the present invention is performed using an ultrasonic probe having broadband characteristics. be.

ここで、広帯域超音波探触子とは、反射波のピーク数が
4程度までのもので、反射波の周波数スペクトルの帯域
幅が広い探触子をいう、また、第4図は、第3図と同条
件で狭帯域超音波探触子を用いた場合のオシロスコープ
の写真である。第3図及び第4図を比較して分かるよう
に、前者は表面反射波と境界面反射波の分解能は良いが
、底面反射波の応答出力の電圧が小さく、大きな増幅を
必要としているのに対し、後者の狭帯域超音波探触子は
表面反射波と境界面反射波の分解能が悪く、底面反射波
の応答出力が大きいという特性がある。
Here, the broadband ultrasonic probe refers to a probe with a reflected wave peak number of up to about 4 and a wide bandwidth of the frequency spectrum of the reflected wave. This is an oscilloscope photograph taken using a narrowband ultrasound probe under the same conditions as in the figure. As can be seen by comparing Figures 3 and 4, the former has good resolution of the surface reflected wave and the boundary surface reflected wave, but the voltage of the response output of the bottom reflected wave is small and requires large amplification. On the other hand, the latter narrow-band ultrasonic probe has a characteristic that the resolution of the surface reflected wave and the boundary surface reflected wave is poor, and the response output of the bottom surface reflected wave is large.

いずれの超音波探触子を用いても本発明は実施可能であ
るが、それぞれ一長一短があるので、境界面反射波と表
面反射波の分解能が良好で且つ底面反射波の大幅な増幅
を不要とするためには、超音波探触子2は、送受信部材
5とその背面側のダンパー40は広帯域特性を有するも
のとし、受信部材6とその背面側のダンパー41は狭帯
域特性を有するものとするのが好適である。
Although the present invention can be carried out using any of the ultrasonic probes, each has its advantages and disadvantages. In order to do this, in the ultrasonic probe 2, the transmitting/receiving member 5 and the damper 40 on the back side thereof shall have broadband characteristics, and the receiving member 6 and the damper 41 on the back side thereof shall have narrow band characteristics. is preferable.

[発明の効果] 以上のように、本発明によれば、分割形超音波探触子の
送信側の部材により境界面反射波を受信することとした
ので、境界面反射波の受信レベルは大きく、その信号を
確実に取り出すことができる。従って、境界面反射波と
底面反射波とから、コーティングを含まない被測定物の
真の板厚を正確に測定することが可能となる。また、B
+B−方式でみられるような被測定物の腐食による測定
誤差も生じ得ない、更に、従来においては、受信部材で
受信される各種反射波の信号を分離して取り出すために
、コーティング、被測定物及び遅延材の厚さや、それぞ
れの超音波伝播速度等に応じて超音波探触子の種類を選
ぶ必要があったが、本発明では、表面反射波及び境界面
反射波と、底面反射波とを別個に受信することとしたの
で、信号の取出しが容易化され、1種類の超音波探触子
で多種の被測定物に対応することが可能となった。
[Effects of the Invention] As described above, according to the present invention, since the boundary surface reflected waves are received by the transmitting side member of the segmented ultrasonic probe, the reception level of the boundary surface reflected waves can be increased. , the signal can be reliably extracted. Therefore, it is possible to accurately measure the true thickness of the object to be measured without coating from the boundary surface reflected wave and the bottom surface reflected wave. Also, B
There is no measurement error due to corrosion of the measured object as seen in the +B- method.Furthermore, in the past, in order to separate and extract the signals of various reflected waves received by the receiving member, coating, measuring It was necessary to select the type of ultrasonic probe depending on the thickness of the object and the delay material, the ultrasonic propagation velocity of each, etc., but in the present invention, the type of ultrasonic probe can be selected depending on the thickness of the object and the delay material, the ultrasonic propagation velocity of each, etc., but in the present invention, the type of ultrasonic probe Since the signals are received separately, the signal can be easily extracted, and one type of ultrasonic probe can be used for various types of objects to be measured.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による厚さ測定方法を実施するための厚
さ測定装置の一例を示す概略説明図、第2図は第1図に
おける各出力信号の波形を示す波形説明図、第3図は広
帯域特性を有する超音波探触子を用いた場合における送
受信部材と受信部材での受信信号の波形を示すオシロス
コープの写真、第4図は狭帯域特性を有する超音波探触
子を用いた場合における送受信部材と受信部材での受信
信号の波形を示すオシロスコープの写真、第5図は従来
一般の厚さ測定装置を示す概略説明図、第6図及び第7
図はB、−82方式による厚さ測定を示す概略説明図で
ある0図中、 1・・・コーティング付被測定物 2・・・超音波探触子  3.20・・・厚さ測定器5
・・・送受信部材(第1の部材) 6・・・受信部材(第2の部材) 9・・・コーティング  10・・・被測定物特許出願
人  トーヨーカネツ株式会社同 上   ジャパンプ
ローブ株式会社第 1図 箆 図(yCの1) 児3図 馬4図 も 第 2区H量の2) 第 図 根
FIG. 1 is a schematic explanatory diagram showing an example of a thickness measuring device for carrying out the thickness measuring method according to the present invention, FIG. 2 is a waveform explanatory diagram showing the waveforms of each output signal in FIG. 1, and FIG. Figure 4 is an oscilloscope photograph showing the waveform of the received signal at the transmitting/receiving member and the receiving member when an ultrasonic probe with broadband characteristics is used, and Figure 4 is an image when an ultrasonic probe with narrowband characteristics is used. A photograph of an oscilloscope showing the waveform of the received signal at the transmitting/receiving member and the receiving member, FIG. 5 is a schematic explanatory diagram showing a conventional general thickness measuring device, and FIGS.
Figure B is a schematic explanatory diagram showing thickness measurement using the -82 method. 5
... Transmitting/receiving member (first member) 6... Receiving member (second member) 9... Coating 10... Measured object patent applicant Toyo Kanetsu Co., Ltd. Same as above Japan Probe Co., Ltd. Figure 1 Broom diagram (YC 1) Child 3 Figure Horse 4 Figure also 2nd section H quantity 2) Figure root

Claims (1)

【特許請求の範囲】[Claims] 超音波パルスの送信及び受信が可能な第1の部材と、少
なくとも超音波パルスの受信が可能な第2の部材とが音
響仕切板を隔てて並設されている分割形の超音波探触子
を用い、コーティング付被測定物の被測定物のみの厚さ
を測定する厚さ測定方法であって、前記超音波探触子の
前記第1の部材から超音波パルスを発すると共に、コー
ティング表面による表面反射波、及びコーティングと被
測定物との間の境界面による境界面反射波を前記第1の
部材により受信し、前記第1の部材により受信された信
号から前記境界面反射波の信号のみを取り出して計時ス
タート信号とし、他方、前記超音波探触子の前記第2の
部材により被測定物の底面による底面反射波を受信して
計時ストップ信号とし、前記計時スタート信号と前記計
時ストップ信号とから被測定物の厚さを算出することを
特徴とするコーティング付被測定物の厚さ測定方法。
A split-type ultrasonic probe in which a first member capable of transmitting and receiving ultrasonic pulses and a second member capable of receiving at least ultrasonic pulses are arranged in parallel across an acoustic partition plate. A thickness measuring method for measuring the thickness of only the coated object to be measured using a method, in which an ultrasonic pulse is emitted from the first member of the ultrasonic probe, and the thickness of the coated object is measured by A surface reflected wave and an interface reflected wave from the interface between the coating and the object to be measured are received by the first member, and only the signal of the interface reflected wave is selected from the signals received by the first member. is taken out as a timing start signal, and on the other hand, the second member of the ultrasonic probe receives a bottom surface reflected wave from the bottom surface of the object to be measured as a timing stop signal, and the timing start signal and the timing stop signal are obtained. A method for measuring the thickness of a coated object to be measured, characterized in that the thickness of the object to be measured is calculated from .
JP26064388A 1988-10-18 1988-10-18 Measuring method of thickness of coated object Expired - Lifetime JP2812688B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26064388A JP2812688B2 (en) 1988-10-18 1988-10-18 Measuring method of thickness of coated object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26064388A JP2812688B2 (en) 1988-10-18 1988-10-18 Measuring method of thickness of coated object

Publications (2)

Publication Number Publication Date
JPH02108908A true JPH02108908A (en) 1990-04-20
JP2812688B2 JP2812688B2 (en) 1998-10-22

Family

ID=17350768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26064388A Expired - Lifetime JP2812688B2 (en) 1988-10-18 1988-10-18 Measuring method of thickness of coated object

Country Status (1)

Country Link
JP (1) JP2812688B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5271274A (en) * 1991-08-14 1993-12-21 The Board Of Trustees Of The Leland Stanford Junior University Thin film process monitoring techniques using acoustic waves

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5271274A (en) * 1991-08-14 1993-12-21 The Board Of Trustees Of The Leland Stanford Junior University Thin film process monitoring techniques using acoustic waves

Also Published As

Publication number Publication date
JP2812688B2 (en) 1998-10-22

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