JPH02106830U - - Google Patents

Info

Publication number
JPH02106830U
JPH02106830U JP1359689U JP1359689U JPH02106830U JP H02106830 U JPH02106830 U JP H02106830U JP 1359689 U JP1359689 U JP 1359689U JP 1359689 U JP1359689 U JP 1359689U JP H02106830 U JPH02106830 U JP H02106830U
Authority
JP
Japan
Prior art keywords
wafer
wafer carrier
receiver
light emitter
photoelectric switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1359689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1359689U priority Critical patent/JPH02106830U/ja
Publication of JPH02106830U publication Critical patent/JPH02106830U/ja
Pending legal-status Critical Current

Links

JP1359689U 1989-02-09 1989-02-09 Pending JPH02106830U (US08197722-20120612-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1359689U JPH02106830U (US08197722-20120612-C00042.png) 1989-02-09 1989-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1359689U JPH02106830U (US08197722-20120612-C00042.png) 1989-02-09 1989-02-09

Publications (1)

Publication Number Publication Date
JPH02106830U true JPH02106830U (US08197722-20120612-C00042.png) 1990-08-24

Family

ID=31224038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1359689U Pending JPH02106830U (US08197722-20120612-C00042.png) 1989-02-09 1989-02-09

Country Status (1)

Country Link
JP (1) JPH02106830U (US08197722-20120612-C00042.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156740A (ja) * 2004-11-30 2006-06-15 Eibisu:Kk 半導体ウエハ収納容器の検査装置
JP2018509751A (ja) * 2015-01-22 2018-04-05 エスケー シルトロン カンパニー リミテッド ウエハー移送装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63188951A (ja) * 1987-01-30 1988-08-04 Kokusai Electric Co Ltd カセツトのウエ−ハ取出し・収納装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63188951A (ja) * 1987-01-30 1988-08-04 Kokusai Electric Co Ltd カセツトのウエ−ハ取出し・収納装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156740A (ja) * 2004-11-30 2006-06-15 Eibisu:Kk 半導体ウエハ収納容器の検査装置
JP2018509751A (ja) * 2015-01-22 2018-04-05 エスケー シルトロン カンパニー リミテッド ウエハー移送装置

Similar Documents

Publication Publication Date Title
JPH02106830U (US08197722-20120612-C00042.png)
JPH0175817U (US08197722-20120612-C00042.png)
JPS6165540U (US08197722-20120612-C00042.png)
JPH025055U (US08197722-20120612-C00042.png)
JPH0336985U (US08197722-20120612-C00042.png)
JPS6337058U (US08197722-20120612-C00042.png)
JPS6427289A (en) Semiconductor device
JPS62101119U (US08197722-20120612-C00042.png)
JPS63139642U (US08197722-20120612-C00042.png)
JPS6362710U (US08197722-20120612-C00042.png)
JPS6257832U (US08197722-20120612-C00042.png)
JPS58117550U (ja) ウエ−ハ枚数計数器
JPH0433166U (US08197722-20120612-C00042.png)
JPH0237395U (US08197722-20120612-C00042.png)
JPH01158912U (US08197722-20120612-C00042.png)
JPS585710U (ja) ベニヤ単板の切断装置
JPS6341933U (US08197722-20120612-C00042.png)
JPS63145157U (US08197722-20120612-C00042.png)
JPH03100214U (US08197722-20120612-C00042.png)
JPH0396060U (US08197722-20120612-C00042.png)
JPS6418310U (US08197722-20120612-C00042.png)
JPS62175348U (US08197722-20120612-C00042.png)
JPS6333416U (US08197722-20120612-C00042.png)
JPH0341345U (US08197722-20120612-C00042.png)
JPH0390006U (US08197722-20120612-C00042.png)