JPH02104627U - - Google Patents

Info

Publication number
JPH02104627U
JPH02104627U JP1230789U JP1230789U JPH02104627U JP H02104627 U JPH02104627 U JP H02104627U JP 1230789 U JP1230789 U JP 1230789U JP 1230789 U JP1230789 U JP 1230789U JP H02104627 U JPH02104627 U JP H02104627U
Authority
JP
Japan
Prior art keywords
photosensitive resin
flat belt
resin liquid
bottomed cup
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1230789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1230789U priority Critical patent/JPH02104627U/ja
Publication of JPH02104627U publication Critical patent/JPH02104627U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1230789U 1989-02-03 1989-02-03 Pending JPH02104627U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1230789U JPH02104627U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1230789U JPH02104627U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Publications (1)

Publication Number Publication Date
JPH02104627U true JPH02104627U (enrdf_load_stackoverflow) 1990-08-20

Family

ID=31221635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1230789U Pending JPH02104627U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Country Status (1)

Country Link
JP (1) JPH02104627U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH02104627U (enrdf_load_stackoverflow)
US20050189242A1 (en) Soap holding device
KR970020214A (ko) 회전컵식 액체공급장치
JPH0425105Y2 (enrdf_load_stackoverflow)
JPS6344989Y2 (enrdf_load_stackoverflow)
KR100389509B1 (ko) 웨이퍼 코팅장치
JPH0215722U (enrdf_load_stackoverflow)
GB2348807A (en) Foot washing aid
JPS6151732U (enrdf_load_stackoverflow)
JPH03109328U (enrdf_load_stackoverflow)
JPS6351435U (enrdf_load_stackoverflow)
JP2593465B2 (ja) 半導体ウエーハの液処理装置
JPS639130U (enrdf_load_stackoverflow)
JPH0245337Y2 (enrdf_load_stackoverflow)
JPH01164034A (ja) ウェハース周辺部膜厚均一化機構
JPH0349634Y2 (enrdf_load_stackoverflow)
JPH033732U (enrdf_load_stackoverflow)
JPH01100435U (enrdf_load_stackoverflow)
TWD220286S (zh) 半導體製造用清洗治具之部分
JPH04133415A (ja) 半導体基板現像装置
JPH04192514A (ja) レジスト現像装置
JPH0321846U (enrdf_load_stackoverflow)
JPS59176457U (ja) 靴底洗い装置
JPH0395634U (enrdf_load_stackoverflow)
JPH09283478A (ja) ウエハキャリヤ洗浄装置