JPH0215722U - - Google Patents

Info

Publication number
JPH0215722U
JPH0215722U JP9369488U JP9369488U JPH0215722U JP H0215722 U JPH0215722 U JP H0215722U JP 9369488 U JP9369488 U JP 9369488U JP 9369488 U JP9369488 U JP 9369488U JP H0215722 U JPH0215722 U JP H0215722U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
cleaning liquid
rotary table
back side
developing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9369488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9369488U priority Critical patent/JPH0215722U/ja
Publication of JPH0215722U publication Critical patent/JPH0215722U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9369488U 1988-07-15 1988-07-15 Pending JPH0215722U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9369488U JPH0215722U (enrdf_load_stackoverflow) 1988-07-15 1988-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9369488U JPH0215722U (enrdf_load_stackoverflow) 1988-07-15 1988-07-15

Publications (1)

Publication Number Publication Date
JPH0215722U true JPH0215722U (enrdf_load_stackoverflow) 1990-01-31

Family

ID=31318164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9369488U Pending JPH0215722U (enrdf_load_stackoverflow) 1988-07-15 1988-07-15

Country Status (1)

Country Link
JP (1) JPH0215722U (enrdf_load_stackoverflow)

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