JPH0210458U - - Google Patents
Info
- Publication number
- JPH0210458U JPH0210458U JP8451088U JP8451088U JPH0210458U JP H0210458 U JPH0210458 U JP H0210458U JP 8451088 U JP8451088 U JP 8451088U JP 8451088 U JP8451088 U JP 8451088U JP H0210458 U JPH0210458 U JP H0210458U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vacuum evaporation
- hearth liner
- holds
- tile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案の第一実施例である真空蒸着装
置用半球型るつぼを示す図、第２図は第１図の側
面断面図、第３図は本考案の第二実施例である真
空蒸着装置用半箱型るつぼを示す図、第４図は第
３図の側面断面図、第５図は従来の真空蒸着装置
用半箱型るつぼの側面断面図、第６図は従来の真
空蒸着装置用半箱型るつぼの蒸着中の温度分布の
解析例を示す図である。
１…るつぼ本体、１ａ…水冷部、２…湾曲板状
のタイル、３〜７…平板状のタイル、８…冷却水
、９…ハースライナ、１０…蒸着用溶融金属。
Fig. 1 is a diagram showing a hemispherical crucible for vacuum evaporation equipment which is the first embodiment of the present invention, Fig. 2 is a side sectional view of Fig. 1, and Fig. 3 is a vacuum evaporation crucible which is the second embodiment of the present invention. A diagram showing a half-box crucible for vapor deposition equipment, FIG. 4 is a side sectional view of FIG. 3, FIG. 5 is a side sectional view of a conventional half-box crucible for vacuum evaporation equipment, and FIG. 6 is a conventional vacuum evaporation device. It is a figure which shows the example of analysis of the temperature distribution during vapor deposition of the half box type crucible for apparatuses. DESCRIPTION OF SYMBOLS 1... Crucible main body, 1a... Water cooling part, 2... Curved plate-shaped tile, 3-7... Flat plate-shaped tile, 8... Cooling water, 9... Hearth liner, 10... Molten metal for vapor deposition.
Claims (1)
イナを保持しかつ冷却するるつぼ本体からなる真
空蒸着装置用るつぼにおいて、 前記ハースライナは、複数の湾曲板状又は平板
状のタイルで構成し、該タイルは隣接するタイル
とのかみ合せのための凹部又は凸部を有すること
を特徴とする真空蒸着装置用るつぼ。[Claims for Utility Model Registration] A crucible for a vacuum evaporation device consisting of a hearth liner that holds molten metal and a crucible body that holds and cools the hearth liner, wherein the hearth liner is composed of a plurality of curved or flat tiles. A crucible for a vacuum evaporation apparatus, characterized in that the tile has a concave portion or a convex portion for engagement with an adjacent tile.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8451088U JPH0210458U (en) | 1988-06-28 | 1988-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8451088U JPH0210458U (en) | 1988-06-28 | 1988-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0210458U true JPH0210458U (en) | 1990-01-23 |
Family
ID=31309196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8451088U Pending JPH0210458U (en) | 1988-06-28 | 1988-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0210458U (en) |
-
1988
- 1988-06-28 JP JP8451088U patent/JPH0210458U/ja active Pending