JPH0267895U - - Google Patents
Info
- Publication number
- JPH0267895U JPH0267895U JP14594688U JP14594688U JPH0267895U JP H0267895 U JPH0267895 U JP H0267895U JP 14594688 U JP14594688 U JP 14594688U JP 14594688 U JP14594688 U JP 14594688U JP H0267895 U JPH0267895 U JP H0267895U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- boron nitride
- nitride layer
- sprayed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 229910052582 BN Inorganic materials 0.000 claims 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Description
第1図は本考案グラフフアイトるつぼの断面図
、第2図は本考案グラフアイトるつぼの実施例の
熱サイクル負荷条件を示す図表、第3図はa,b
とも本考案グラフアイトるつぼの形状を示す図で
ある。
第1図において、1はグラフアイトるつぼ、2
はコーテイング層である。
Fig. 1 is a cross-sectional view of the graphite crucible of the present invention, Fig. 2 is a chart showing the thermal cycle load conditions of the embodiment of the graphite crucible of the present invention, and Fig. 3 is a, b.
Both are diagrams showing the shape of the graphite crucible of the present invention. In Fig. 1, 1 is a graphite crucible, 2
is the coating layer.
Claims (1)
設けられた窒化ホウ素層と、更に該窒化ホウ素層
上に蒸着又は溶射されたチタン層を有することを
特徴とするグラフアイトるつぼ。 A graphite crucible comprising: a boron nitride layer provided on at least the outer surface of the graphite crucible body; and a titanium layer deposited or sprayed on the boron nitride layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14594688U JPH0267895U (en) | 1988-11-10 | 1988-11-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14594688U JPH0267895U (en) | 1988-11-10 | 1988-11-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0267895U true JPH0267895U (en) | 1990-05-23 |
Family
ID=31414985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14594688U Pending JPH0267895U (en) | 1988-11-10 | 1988-11-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0267895U (en) |
-
1988
- 1988-11-10 JP JP14594688U patent/JPH0267895U/ja active Pending